Combined absolute-pressure and relative-pressure sensor
First Claim
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1. A micromechanical sensor for measuring at least a first pressure of a first medium, comprising:
- at least one substrate, the substrate including at least two sensor elements, the at least two sensor elements including a first sensor element measuring an absolute-pressure variable of the first medium and a second sensor element measuring a relative-pressure variable of the first medium, wherein the second sensor element includes a diaphragm, and wherein at least one evaluation circuit configured to evaluate the relative-pressure variable is integrated into the diaphragm of the second sensor element.
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Abstract
A micromechanical sensor for measuring at least a first pressure of a first medium, as well as a method for manufacturing such a micromechanical sensor. The micromechanical sensor has at least one substrate having at least two sensor elements, which are preferably made of a semiconductive material. The substrate has at least a first sensor element for measuring an absolute-pressure variable of the first medium and a second sensor element for measuring a relative-pressure variable of the first medium.
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Citations
7 Claims
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1. A micromechanical sensor for measuring at least a first pressure of a first medium, comprising:
at least one substrate, the substrate including at least two sensor elements, the at least two sensor elements including a first sensor element measuring an absolute-pressure variable of the first medium and a second sensor element measuring a relative-pressure variable of the first medium, wherein the second sensor element includes a diaphragm, and wherein at least one evaluation circuit configured to evaluate the relative-pressure variable is integrated into the diaphragm of the second sensor element. - View Dependent Claims (2, 3, 4, 5, 6, 7)
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