Portable microwave plasma systems including a supply line for gas and microwaves

• US 7,271,363 B2
• Filed: 09/01/2004
• Issued: 09/18/2007
• Est. Priority Date: 09/01/2004
• Status: Active Grant

• Current Assignee: Recarbon Inc.
• Original Assignee: Amarante Technologies, Inc., Noritsu Koki Co., Ltd.
• Inventors: Lee, Sang Hun, Kim, Jay Joongsoo, Kinoshita, Togo
• Primary Examiner(s): Ralis; Stephen J.
• Application Number:
  US10/931,223
• Publication Number:
  US 20060081565A1
• Time in Patent Office: 1,112 Days
• Field of Search: 219/121.51, 219/121.55, 219/121.52, 219/121.48, 219/121.75, 219/121.43, 118/723.MW
• US Class Current: 219/121.43
• CPC Class Codes: H05H 1/46 using applied electromagnetic fields, e.g. high frequency or microwave energy H05H1/26 takes precedence
• CPC Class Codes: H05H 1/4637 using cables
• CPC Class Codes: H05H 2277/14 Portable devices

Abstract

Portable microwave plasma systems including supply lines for providing microwaves and gas flow are disclosed. The supply line includes at least one gas line or conduit and a microwave coaxial cable. A portable microwave plasma system includes a microwave source, a waveguide-to-coax adapter and a waveguide that interconnects the microwave source with the waveguide-to-coax adapter, a portable discharge unit and the supply line. The portable discharge unit includes a gas flow tube coupled to the supply line to receive gas flow and a rod-shaped conductor that is axially disposed in the gas flow tube and has an end configured to receive microwaves from the microwave coaxial cable and a tapered tip positioned adjacent the outlet portion of the gas flow tube. The tapered tip is configured to focus microwave traveling through the rod-shaped conductor and generate plasma from the gas flow.

Claims

1. A supply unit for use with a portable unit including:

a gas flow tube made of a conducting material and adapted to direct a gas flow therethrough and having an outlet portion and an inlet portion;

a rod-shaped conductor disposed in said gas flow tube and having a rear end and front end, said front end positioned adjacent said outlet portion, and configured to focus microwaves traveling through said rod-shaped conductor, said rod-shaped conductor extending along an axis of said gas flow tube;

a connector disposed around the rear end of said rod-shaped conductor and connected with said gas flow tube, said connector being made of a conducting material;

said supply unit comprising;

a microwave coaxial cable for transmitting microwaves, said microwave coaxial cable including;

a core conductor and

a ground conductor around said core conductor by way of a dielectric layer,

a leading end of said microwave coaxial cable being engageable with said connector in a state that

a leading end of said core conductor is connected with the rear end of said rod-shaped conductor, that is provided in said gas flow tube, in such a manner that said rod-shaped conductor is co-axially provided with said core conductor, and

a leading end of said ground conductor is connected with said connector so that said gas flow tube is grounded via the connector to said ground conductor;

at least one gas line for transmitting a flow of gas, said gas line being connectable with said gas flow tube; and

an attachment member for positioning said at least one gas line at a predetermined position relative to said microwave coaxial cable.

2. A supply unit as defined in claim 1, wherein said at least one gas line is provided as a through passage formed in said attachment member.

3. A supply unit for use with a portable unit including:

a gas flow tube made of a conducting material and adapted to direct a gas flow therethrough and having an outlet portion and an inlet portion;

a rod-shaped conductor disposed in said gas flow tube and having a rear end and a front end, said front end positioned adjacent said outlet portion, and configured to focus microwaves traveling through said rod-shaped conductor, said rod-shaped conductor extending along an axis of said gas flow tube;

a connector disposed around the rear end of said rod-shaped conductor and connected with said gas flow tube, said connector being made of a conducting material;

said supply unit comprising;

an attachment member having at least one passageway at least partially extending in said attachment member and being configured to transmit a flow of gas therethrough, said at least one passageway being connectable with said gas flow tube; and

a microwave coaxial cable having a portion disposed in said attachment member and being configured to transmit microwaves therethrough, said microwave coaxial cable including a core conductor and a ground conductor around said core conductor by way of a dielectric layer,

a leading end of said microwave coaxial cable being engageable with said connector in a state that

a leading end of said core conductor is connected with the rear end of said rod-shaped conductor, that is provided in said gas flow tube, in such a manner that said rod-shaped conductor is co-axially provided with said core conductor, and

a leading end of said ground conductor is connected with said connector so that said gas flow tube is grounded via the connector to said ground conductor.

4. A supply unit for use with a portable unit including:

a gas flow tube made of a conducting material and adapted to direct a gas flow therethrough and having an outlet portion and an inlet portion;

a rodshaped conductor disposed in said gas flow tube and having a rear end and a front end, said front end positioned adjacent said outlet portion, and configured to focus microwaves traveling through said rod-shaped conductor, said rod-shaped conductor extending along an axis of said gas flow tube;

a connector disposed around the rear end of said rod-shaped conductor and connected with said gas flow tube, said connector being made of a conducting material;

said supply unit comprising;

an attachment member;

at least one passageway having a portion connected to said attachment member and being configured to transmit a flow of gas therethrough, and being connectable with said gas flow tube; and

a microwave coaxial cable having a portion disposed in said attachment member and being configured to transmit microwaves therethrough, said microwave coaxial cable including a core conductor and a ground conductor around said core conductor by way of a dielectric layer,

a leading end of said microwave coaxial cable being engageable with said connector in a state that

a leading end of said core conductor is connected with the rear end of said rod-shaped conductor, that is provided in said gas flow tube, in such a manner that said rod-shaped conductor is co-axially provided with said core conductor, and

a leading end of said ground conductor is connected with said connector so that said gas flow tube is grounded via the connector to said ground conductor.

5. A supply line for use with a portable unit including:

a gas flow tube made of a conducting material and adapted to direct a gas flow therethrough and having an outlet portion and an inlet portion;

a rod-shaped conductor disposed in said gas flow tube and having a rear end and a front end, said front end positioned adjacent said outlet portion, and configured to focus microwaves traveling through said rod-shaped conductor, said rod-shaped conductor extending along an axis of said gas flow tube;

a connector disposed around the rear end of said rod-shaped conductor and connected with said gas flow tube, said connector being made of a conducting material;

said supply line comprising;

a positioning jacket;

a microwave coaxial cable disposed within said positioning jacket and configured to transmit microwaves therethrough, said microwave coaxial cable including a core conductor and a ground conductor around said core conductor by way of a dielectric layer,

a leading end of said microwave coaxial cable being engageable with said connector in a state that

a leading end of said core conductor is connected with the rear end of said rod-shaped conductor, that is provided in said gas flow tube, in such a manner that said rod-shaped conductor is co-axially provided with said core conductor, and

a leading end of said ground conductor is connected with said connector so that said gas flow tube is grounded via the connector to said ground conductor; and

at least one gas line interposed between said positioning jacket and said microwave coaxial cable and configured to transmit a flow of gas, and being connectable with said gas flow tube.

6. A supply line as recited in claim 5, wherein said positioning jacket comprises a dielectric material.

7. A supply line as recited in claim 5, wherein said gas line comprises a dielectric material.

8. A supply line for use with a portable unit including:

a gas flow tube made of a conducting material and adapted to direct a gas flow therethrough and having an outlet portion and an inlet portion;

a rod-shaped conductor disposed in said gas flow tube and having a rear end and a front end, said front end positioned adjacent said outlet portion, and configured to focus microwaves traveling through said rod-shaped conductor, said rod-shaped conductor extending along an axis of said gas flow tube;

a connector disposed around the rear end of said rod-shaped conductor and connected with said gas flow tube, said connector being made of a conducting material;

said supply line comprising;

a positioning jacket forming a gas flow channel, said gas flow channel being connectable with said gas flow tube;

a microwave coaxial cable axially disposed within said positioning jacket and configured to transmit microwave, said microwave coaxial cable including a core conductor and a ground conductor around said core conductor by way of a dielectric layer,

a leading end of said microwave coaxial cable being engageable with said connector in a state that

a leading end of said core conductor is connected with the rear end of said rod-shaped conductor, that is provided in said gas flow tube, in such a manner that said rod-shaped conductor is co-axially provided with said core conductor, and

a leading end of said ground conductor is connected with said connector so that said gas flow tube is grounded via the connector to said ground conductor; and

a plurality of centering disks interposed between said positioning jacket and said microwave coaxial cable, each of said plurality of centering disks having an outer rim for engaging said positioning jacket, an inner rim for holding said microwave coaxial cable and a plurality of spokes interconnecting said inner rim with said outer rim.

9. A supply line as recited in claim 8, wherein said positioning jacket has a circular cross section.

10. A supply line as recited in claim 8, wherein said positioning jacket comprises a dielectric material.

11. A supply unit for use with a portable unit including:

a gas flow tube made of a conducting material and adapted to direct a gas flow therethrough and having an outlet portion and an inlet portion;

a rod-shaped conductor disposed in said gas flow tube and having a rear end and a front end, said front end positioned adjacent said outlet portion, and configured to focus microwaves traveling through said rod-shaped conductor, said rod-shaped conductor extending along an axis of said gas flow tube;

a connector disposed around the rear end of said rod-shaped conductor and connected with said gas flow tube, said connector being made of a conducting material;

said supply unit comprising;

a microwave coaxial cable including;

a core conductor and

a ground conductor around said core conductor by way of a dielectric layer,

a leading end of said microwave coaxial cable being engageable with said connector in a state that

a leading end of said core conductor is connected with the rear end of said rod-shaped conductor, that is provided in said gas flow tube, in such a manner that said rod-shaped conductor being co-axially provided with said core conductor via a mating connector which concentrically holds said rear end of the rod-shaped conductor and said leading end of said core conductor, and

a leading end of said ground conductor is connected with said connector so that said gas flow tube is grounded via the connector to said ground conductor;

at least one gas line for transmitting a flow of gas, said gas line being connectable with said gas flow tube; and

an attachment member for positioning said at least one gas line at a predetermined position relative to said microwave coaxial cable.

12. The supply unit according to claim 11, wherein said mating connector has a first end and a second end and said first end is formed with a receptacle indent into which said rear end of the rod-shaped conductor is inserted and said second end is formed with a receptacle indent into which said leading end of said core conductor is inserted.

13. A microwave plasma system, comprising:

a supply line including;

at least one gas line adapted to direct a flow of gas therethrough; and

a microwave coaxial cable configured to transmit microwaves, and including a core conductor and a ground conductor around said core conductor by way of a dielectric layer;

a tube unit including;

a gas flow tube made of a conducting material and adapted to direct a gas flow therethrough and having an outlet portion and said gas flow tube being configured to couple to said supply line to receive the gas flow therefrom; and

a rod-shaped conductor disposed in said gas flow tube and extending along an axis of said gas flow tube, and having a rear end configured to receive microwaves from said microwave coaxial cable and a front end positioned adjacent said outlet portion and configured to focus microwaves traveling through said rod-shaped conductor; and

a connector disposed around the rear end of said rod-shaped conductor and connected with said gas flow tube, said connector being made of a conducting material, said connector allowing said core conductor to connect with the rear end of said rod-shaped conductor in a state of connecting with said ground conductor; and

a leading end of said microwave coaxial cable being engageable with said connector in a state that

a leading end of said core conductor is connected with the rear end of said rod-shaped conductor, that is provided in said gas flow tube, in such a manner that said rod-shaped conductor is co-axially provided with said core conductor, and

a leading end of said ground conductor is connected with said connector so that said gas flow tube is grounded via the connector to said ground conductor.

14. A microwave plasma system as recited in claim 13, further comprising:

at least one centering, disk located within said gas flow tube for securing said rodshaped conductor to said gas flow tube, said at least one centering disk having at least one through-pass hole; and

a holder located within said gas flow tube for positioning said rod-shaped conductor relative to said gas flow tube, said holder having at least one through-pass hole.

15. A microwave plasma system as recited in claim 14, wherein said at least one through-pass hole of said at least one centering disk is configured and disposed for imparting a helical shaped flow direction around said rod-shaped conductor to a gas passing along said at least one through-pass hole.

16. A microwave plasma system as recited in claim 13, wherein said supply line is separable from said tube unit.

17. A microwave plasma system as recited in claim 13, further comprising:

an adjustable power control unit operatively connected to said gas flow tube for controlling transmission of microwaves through said microwave coaxial cable.

18. A microwave plasma system as recited in claim 17, further comprising:

a two or more-conductor signal line interconnecting said adjustable power control unit with a power level control of a microwave supply unit, wherein said microwave supply unit provides the microwaves through said microwave coaxial cable.

19. A microwave plasma system as recited in claim 13, wherein said at least one gas line of said supply line includes a positioning jacket and wherein said microwave coaxial cable is axially disposed in said positioning jacket, said supply line further comprising:

a plurality of centering disks interposed between said positioning jacket and said microwave coaxial cable, each of said centering disks having an outer rim for engaging said positioning jacket, an inner rim for holding said microwave coaxial cable and a plurality of spokes interconnecting said inner rim with said outer rim.

20. A microwave plasma system as recited in claim 13, said supply line further comprising:

a positioning jacket,

wherein said microwave coaxial cable is axially disposed within said positioning jacket and said at least one gas line is interposed between said positioning jacket and said microwave coaxial cable along an axial direction of said positioning jacket.

21. A microwave plasma system, comprising:

a supply line including;

at least one gas line adapted to direct a flow of gas therethrough; and

a microwave coaxial cable having a core conductor and a ground conductor around said core conductor by way of a dielectric layer, and configured to transmit microwaves;

a tube unit including;

a gas flow tube made of a conducting material and adapted to direct a gas flow therethrough and having an outlet portion and an inlet portion;

a rod-shaped conductor axially disposed in said gas flow tube and extending along an axis of said gas flow tube, said rod-shaped conductor having a rear end configured to receive microwaves and a front end positioned adjacent to said outlet portion and configured to focus microwaves traveling through said rod-shaped conductor; and

an interface portion including;

a gas flow duct made of a conducting material and having an outlet portion configured to operatively couple to said gas flow tube and said gas flow duct being operatively coupled to said supply line; and

a conductor segment axially disposed within said gas flow duct, said conductor segment being configured to interconnect said rear end of said rod-shaped conductor with said core conductor; and

a connector disposed around an end of said conductor segment and connected with said gas flow duct, said connector being made of a conducting material, said connector allowing said core conductor to connect with an end of said conductor segment in a state of connecting with said ground conductor; and

a leading end of said microwave coaxial cable being engageable with said connector in a state that

a leading end of said core conductor is connected with the rear end of said rod-shaped conductor, that is provided in said gas flow tube, in such a manner that said rod-shaped conductor is co-axially provided with said core conductor, and

a leading end of said ground conductor is connected with said connector so that said gas flow tube is grounded via the connector to said ground conductor.

22. A microwave plasma system as recited in claim 21, further comprising:

at least one centering disk located within said gas flow tube for securing said rod-shaped conductor to said gas flow tube, said at least one centering disk having at least one through-pass hole.

23. A microwave plasma system as recited in claim 22, wherein said at least one through-pass hole is configured and disposed for imparting a helical shaped flow direction around said rod-shaped conductor to a gas passing along said at least one through-pass hole.

24. A microwave plasma system as recited in claim 21, further comprising:

a holder located within said gas flow tube for positioning said conductor segment relative to said gas flow duct, said holder having at least one through-pass hole.

25. A microwave plasma system as recited in claim 21, further comprising:

an adjustable power control unit operatively connected to said gas flow tube for controlling transmission of microwaves through said core conductor.

26. A microwave plasma system as recited in claim 25, further comprising:

a two or more-conductor signal line interconnecting said adjustable power control unit with a power level control of a microwave supply unit, wherein said microwave supply unit transmits microwaves through said core conductor.

27. A microwave plasma system as recited in claim 21, wherein said at least one gas line of said supply line includes a positioning jacket and wherein said microwave coaxial cable is axially disposed in said positioning jacket, said supply line further comprising:

a plurality of centering disks interposed between said positioning jacket and said microwave coaxial cable, each of said centering disks having an outer rim for engaging said positioning jacket, an inner rim for holding said microwave coaxial cable and a plurality of spokes interconnecting said inner rim with said outer rim.

28. A microwave plasma system as recited in claim 21, said supply line further comprising:

a positioning jacket,

wherein said microwave coaxial cable is axially disposed within said positioning jacket and said at least one gas line is interposed between said positioning jacket and said microwave coaxial cable along an axial direction of said positioning jacket.

29. A microwave plasma system, comprising:

a microwave source;

a waveguide-to-coax adapter having an inlet and a microwave coaxial outlet connector;

a waveguide interconnecting said microwave source with said inlet of said waveguide-to-coax adapter;

a supply line including;

at least one gas line adapted to direct a flow of gas therethrough; and

a microwave coaxial cable having a first end and a second end configured to connect to said microwave coaxial outlet connector, said microwave coaxial cable having a core conductor and a ground conductor around said core conductor by way of a dielectric layer;

a gas flow tube made of a conducting material and adapted to direct a gas flow therethrough and having an outlet portion and said gas flow tube being configured to couple to said supply line to receive the gas flow therefrom; and

a rod-shaped conductor axially disposed in said gas flow tube and extending along an axis of said gas flow tube, said rod-shaped conductor having a rear end configured to receive microwaves from said first end of said microwave coaxial cable and a front end positioned adjacent said outlet portion of said gas flow tube and configured to focus microwave traveling through said rod-shaped conductor; and

a connector disposed around the rear end of said rod-shaped conductor and connected with said gas flow tube, said connector being made of a conducting material, said connector allowing said core conductor to connect with the rear end of said rod-shaped conductor in a state of connecting with said ground conductor; and

a leading end of said microwave coaxial cable being engageable with said connector in a state that

a leading end of said core conductor is connected with the rear end of said rod-shaped conductor, that is provided in said gas flow tube, in such a manner that said rod-shaped conductor is co-axially provided with said core conductor, and

a leading end of said ground conductor is connected with said connector so that said gas flow tube is grounded via the connector to said ground conductor.

30. A microwave plasma system as recited in claim 29, wherein said microwave source comprises a microwave generator and a power supply for providing power thereto, said power supply having a power level control.

31. A microwave plasma system as recited in claim 30, further comprising:

an adjustable power control unit operatively connected to said gas flow tube for controlling transmission of microwaves through said microwave coaxial cable.

32. A microwave plasma system as recited in claim 31, further comprising:

a two or more-conductor signal line interconnecting said adjustable power control unit with said power level control.

33. A microwave plasma system as recited in claim 29, further comprising:

an isolator coupled to said waveguide and configured to dissipate retrogressing microwaves that travel toward said microwave source, said isolator including;

a dummy load for dissipating the retrogressing microwaves, and

a circulator for diverting the retrogressing microwaves to said dummy load.

34. A microwave plasma system as recited in claim 29, further comprising:

a coupler coupled to said waveguide and connected to a power meter for measuring microwave fluxes.

35. A microwave plasma system as recited in claim 29, further comprising:

at least one centering disk located within said gas flow tube for securing said rodshaped conductor to said gas flow tube, said at least one centering disk having at least one through-pass hole.

36. A microwave plasma system as recited in claim 35, wherein said at least one through-pass hole is configured and disposed for imparting a helical shaped flow direction around said rod-shaped conductor to a gas passing along said at least one through-pass hole.

37. A microwave plasma system as recited in claim 29, wherein said at least one gas line of said supply line includes a positioning jacket and wherein said microwave coaxial cable is axially disposed in said positioning jacket, said supply line further comprising:

a plurality of centering disks interposed between said positioning jacket and said microwave coaxial cable, each of said centering disks having an outer rim for engaging said positioning jacket, an inner rim for holding said microwave coaxial cable and a plurality of spokes interconnecting said inner rim with said outer rim.

38. A microwave plasma system as recited in claim 29, said supply line further comprising:

a positioning jacket,

wherein said microwave coaxial cable is axially disposed within said positioning jacket and said at least one gas line is interposed between said positioning jacket and said microwave coaxial cable along an axial direction of said positioning jacket.

39. A microwave plasma system, comprising:

a microwave source;

a waveguide-to-coax adapter having an inlet and a microwave coaxial outlet connector;

a waveguide interconnecting said microwave source with said inlet of said waveguide-to-coax adapter;

a supply line including;

at least one gas line adapted to direct a flow of gas therethrough; and

a microwave coaxial cable having a core conductor configured to transmit microwave and a ground conductor around said core conductor by way of a dielectric layer, and having one end connector configured to connect to said microwave coaxial outlet connector;

a gas flow tube made of a conducting material and adapted to direct a gas flow therethrough and having an outlet portion and an inlet portion;

a rod-shaped conductor axially disposed in said gas flow tube and extending along an axis of said gas flow tube, said rod-shaped conductor having a rear end configured to receive microwaves from the other end of said microwave coaxial cable and a front end positioned adjacent said outlet portion of said gas flow tube and configured to focus microwave traveling through said rod-shaped conductor; and

an interface portion including;

a gas flow duct made of a conducting material and having an outlet portion configured to operatively couple to said gas flow tube and said gas flow duct being operatively coupled to said supply line; and

a conductor segment axially disposed within said gas flow duct, said conductor segment being configured to interconnect said rear end of said rod-shaped conductor with said core conductor; and

a connector disposed around an end of said conductor segment and connected with said gas flow duct, said connector being made of a conducting material, said connector allowing said core conductor to connect with an end of said conductor segment in a state of connecting with said ground conductor; and

a leading end of said microwave coaxial cable being engageable with said connector in a state that

a leading end of said core conductor is connected with the rear end of said rod-shaped conductor, that is provided in said gas flow tube, in such a manner that said rod-shaped conductor is co-axially provided with said core conductor, and

a leading end of said ground conductor is connected with said connector so that said gas flow tube is grounded via the connector to said ground conductor.

40. A microwave plasma system as recited in claim 39, wherein said microwave source comprises a microwave generator and a power supply for providing power thereto, said power supply having a power level control.

41. A microwave plasma system as recited in claim 39, further comprising:

an adjustable power control unit operatively connected to said gas flow tube for controlling transmission of microwaves through said microwave coaxial cable.

42. A microwave plasma system as recited in claim 39, further comprising:

a two or more-conductor signal line interconnecting said adjustable power control unit with said power level control.

43. A microwave plasma system as recited in claim 39, further comprising:

an isolator coupled to said waveguide and configured to dissipate retrogressing microwaves that travel toward said microwave source, said isolator including;

a dummy load for dissipating the retrogressing microwaves, and

a circulator for diverting the retrogressing microwaves to said dummy load.

44. A microwave plasma system as recited in claim 39, further comprising:

a coupler coupled to said waveguide and connected to a power meter for measuring microwave fluxes.

45. A microwave plasma system as recited in claim 39, further comprising:

at least one centering disk located within said gas flow tube for securing said rod-shaped conductor to said gas flow tube, said at least one centering disk having at least one through-pass hole.

46. A microwave plasma system as recited in claim 45, wherein said at least one through-pass hole is configured and disposed for imparting a helical shaped flow direction around said rod-shaped conductor to a gas passing along said at least one through-pass hole.

47. A microwave plasma system as recited in claim 39, further comprising:

a holder located within said gas flow tube for positioning said conductor segment relative to said gas flow duct, said holder having at least one through-pass hole.

48. A microwave plasma system as recited in claim 39, wherein said at least one gas line of said supply line includes a positioning jacket and wherein said microwave coaxial cable is axially disposed in said positioning jacket, said supply line further comprising:

a plurality of centering disks interposed between said positioning jacket and said microwave coaxial cable, each of said centering disks having an outer rim for engaging said positioning jacket, an inner rim for holding said microwave coaxial cable and a plurality of spokes interconnecting said inner rim with said outer rim.

49. A microwave plasma system as recited in claim 39, said supply line further comprising:

a positioning jacket,

wherein said microwave coaxial cable is axially disposed within said positioning jacket and said at least one gas line is interposed between said positioning jacket and said microwave coaxial cable along an axial direction of said positioning jacket.