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Slidably movable member and method of producing same

  • US 7,273,655 B2
  • Filed: 01/12/2005
  • Issued: 09/25/2007
  • Est. Priority Date: 04/09/1999
  • Status: Expired due to Term
First Claim
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1. A system comprising:

  • a) a metal or silicon nitride substrate;

    b) an oiliness agent; and

    c) a hard carbon-based film formed on the substrate, the hard carbon-based film comprising a sufficient number of polar groups to adsorb the oiliness agent to a degree to produce a lowered coefficient of friction;

    wherein the hard carbon-based film has a surface roughness, Ra, of not higher than 0.1 μ

    m.

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