Devices having vertically-disposed nanofabric articles and methods of making the same

• US 7,274,078 B2
• Filed: 06/22/2005
• Issued: 09/25/2007
• Est. Priority Date: 07/25/2001
• Status: Expired due to Term

• Current Assignee: Nantero Incorporated
• Original Assignee: Nantero Incorporated
• Inventors: Ward, Jonathan W., Segal, Brent M., Rueckes, Thomas, Jaiprakash, Venkatachalam C.
• Primary Examiner(s): Kebede; Brook
• Application Number:
  US11/158,544
• Publication Number:
  US 20070018260A1
• Time in Patent Office: 825 Days
• Field of Search: 257/414, 257/428, 257/429, 257/415, 257/E21.582, 977/700, 977/742, 977/743, 977/752, 977/783, 977/784, 977/902, 977/932, 977/943
• US Class Current: 257/414
• CPC Class Codes: B81B 2203/0338 Channels
• CPC Class Codes: B81B 2203/04 Electrodes
• CPC Class Codes: B81C 1/00142 Bridges deformable micromirrors G02B26/0841
• CPC Class Codes: B81C 2201/0109 Sacrificial layers not provided for in B81C2201/0107 - B81C2201/0108
• CPC Class Codes: B82Y 10/00 Nanotechnology for information processing, storage or transmission, e.g. quantum computing or single electron logic
• CPC Class Codes: B82Y 30/00 Nanotechnology for materials or surface science, e.g. nanocomposites
• CPC Class Codes: B82Y 40/00 Manufacture or treatment of nanostructures
• CPC Class Codes: C01B 2202/02 Single-walled nanotubes
• CPC Class Codes: C01B 2202/22 Electronic properties
• CPC Class Codes: C01B 32/162 characterised by catalysts
• CPC Class Codes: G11C 11/56 using storage elements with more than two stable states represented by steps, e.g. of voltage, current, phase, frequency
• CPC Class Codes: G11C 13/0033 Disturbance prevention or evaluation; Refreshing of disturbed memory data
• CPC Class Codes: G11C 13/025 using fullerenes, e.g. C60, or nanotubes, e.g. carbon or silicon nanotubes
• CPC Class Codes: G11C 2213/16 Memory cell being a nanotube, e.g. suspended nanotube
• CPC Class Codes: G11C 2213/77 Array wherein the memory element being directly connected to the bit lines and word lines without any access device being used
• CPC Class Codes: G11C 2213/81 Array wherein the array conductors, e.g. word lines, bit lines, are made of nanowires
• CPC Class Codes: G11C 23/00 Digital stores characterised by movement of mechanical parts to effect storage, e.g. using balls; Storage elements therefor
• CPC Class Codes: H01H 1/0094 Switches making use of nanoelectromechanical systems [NEMS]
• CPC Class Codes: H01L 21/76838 characterised by the formation and the after-treatment of the conductors etching for patterning the conductors H01L21/3213
• CPC Class Codes: H01L 2221/1094 Conducting structures comprising nanotubes or nanowires
• CPC Class Codes: H10K 85/221 : Carbon nanotubes
• CPC Class Codes: Y10S 977/943 : Information storage or retrieval using nanostructure

Abstract

Electro-mechanical switches and memory cells using vertically-disposed nanofabric articles and methods of making the same are described. An electro-mechanical device, includes a structure having a major horizontal surface and a channel formed therein. A conductive trace is in the channel; and a nanotube article vertically suspended in the channel, in spaced relation to a vertical wall of the channel. The article is electro-mechanically deflectable in a horizontal direction toward the conductive trace. Under certain embodiments, the vertically suspended extent of the nanotube article is defined by a thin film process. Under certain embodiments, the vertically suspended extent of the nanotube article is about 50 nanometers or less. Under certain embodiments, the nanotube article is clamped with a conducting material disposed in porous spaces between some nanotubes of the nanotube article. Under certain embodiments, the nanotube article is formed from a porous nanofabric. Under certain embodiments, the nanotube article is electromechanically deflectable into contact with the conductive trace and the contact is either a volatile state or non-volatile state depending on the device construction. Under certain embodiments, the vertically oriented device is arranged into various forms of three-trace devices. Under certain embodiments, the channel may be used for multiple independent devices, or for devices that share a common electrode.

Claims

1. An electro-mechanical device, comprising:

a structure having a major horizontal surface and a channel formed therein, the channel having first and second wall electrodes defining at least a portion of first and second vertical walls of the channel;

first and second nanotube articles vertically suspended in the channel and in spaced relation to a corresponding first and second wall electrode, and electromechanically deflectable in a horizontal direction toward or away from the corresponding first and second wall electrode in response to electrical stimulation.

2. The electro-mechanical device of claim 1, wherein the first and second nanotube articles are in electrical communication with each other.

3. The electro-mechanical device of claim 2, wherein the first and second nanotube articles comprise two different portions of a nanotube film.

4. The electro-mechanical device of claim 1, wherein the first and second nanotube articles are electromechanically deflectable into contact with the corresponding first and second wall electrode, and wherein at least one contact is a non-volatile state.

5. The electro-mechanical device of claim 1, wherein the first and second nanotube articles are electromechanically deflectable into contact with the corresponding first and second wall electrode, and wherein at least one contact is a volatile state.

6. The electro-mechanical device of claim 1, wherein the first and second wall electrodes are in electrical communication with each other.

7. The electro-mechanical device of claim 1, wherein the first and second wall electrodes are electrically insulated from each other.

8. The electro-mechanical device of claim 1, wherein the first and second nanotube articles are in electrical communication with corresponding high conductivity signal paths.

9. The electro-mechanical device of claim 1, further comprising a first central electrode interposed between the first and second nanotube articles.

10. The electro-mechanical device of claim 9, wherein the first and second nanotube articles are in spaced relation relative to the first central electrode and are electromechanically deflectable in a horizontal direction toward or away from the first central electrode in response to electrical stimulation.

11. The electro-mechanical device of claim 9, wherein the first and second nanotube articles are electromechanically deflectable into contact with the first central electrode in response to electrical stimulation, and wherein at least one contact is a non-volatile state.

12. The electro-mechanical device of claim 9, wherein the first and second nanotube articles are electromechanically deflectable into contact with the first central electrode in response to electrical stimulation, and wherein at least one contact is a volatile state.

13. The electro-mechanical device of claim 9, wherein the first and second nanotube articles are in electrical communication with corresponding high conductivity signal paths, and wherein the first central electrode has independent electrical stimulation.

14. The electro-mechanical device of claim 9, further comprising a second central electrode interposed between the first and second nanotube articles.

15. The electro-mechanical device of claim 14, wherein the first nanotube article is in spaced relation relative to the first central electrode and is electromechanically deflectable in a horizontal direction toward or away from the first central electrode in response to electrical stimulation, and wherein the second nanotube article is in spaced relation relative to the second central electrode and is electromechanically deflectable in a horizontal direction toward or away from the second central electrode in response to electrical stimulation.

16. The electro-mechanical device of claim 15, wherein the first and second nanotube articles are electromechanically deflectable into contact with the corresponding first and second central electrode in response to electrical stimulation, and wherein at least one contact is a non-volatile state.

17. The electro-mechanical device of claim 15, wherein the first and second nanotube articles are electromechanically deflectable into contact with the corresponding first and second central electrode in response to electrical stimulation, and wherein at least one contact is a volatile state.

18. The electromechanical device of claim 15, wherein the first and second central electrodes and the first and second wall electrodes have independent electrical stimulation.

19. An electro-mechanical device, comprising:

a structure having a major horizontal surface and a channel formed therein, the channel having electrodes defining at least a portion of the vertical walls of the channel; and

a nanotube article vertically suspended in the channel, wherein the nanotube article has a length and is in spaced relation to first and second vertical walls of the channel, and is electromechanically deflectable between two positional states, at least one of which is a non-volatile state.

20. The electro-mechanical device of claim 19, wherein the non-volatile state is determined by a geometrical relationship between the nanotube article length and the spaced relation.

21. The electro-mechanical device of claim 19, wherein the non-volatile state is determined by a coating on a wall of the channel.