MgO-based tunnel spin injectors

• US 7,274,080 B1
• Filed: 10/19/2004
• Issued: 09/25/2007
• Est. Priority Date: 08/22/2003
• Status: Expired due to Fees

• Current Assignee: International Business Machines Corporation
• Original Assignee: International Business Machines Corporation
• Inventors: Parkin, Stuart Stephen Papworth
• Primary Examiner(s): Baumeister; B. William
• Assistant Examiner(s): Such; Matthew W.
• Application Number:
  US10/969,735
• Time in Patent Office: 1,071 Days
• Field of Search: 257/30, 257421-427, 257/E43.001, 257/E29.323, 257/E27.006, 257/E21.665, 438/3, 438/29, 438/57, 977/933
• US Class Current: 257/421
• CPC Class Codes: H01L 29/66984 Devices using spin polarized carriers
• CPC Class Codes: Y10S 977/933 Spintronics or quantum computing

Abstract

A MgO tunnel barrier is sandwiched between semiconductor material on one side and a ferri- and/or ferromagnetic material on the other side to form a spintronic element. The semiconductor material may include GaAs, for example. The spintronic element may be used as a spin injection device by injecting charge carriers from the magnetic material into the MgO tunnel barrier and then into the semiconductor. Similarly, the spintronic element may be used as a detector or analyzer of spin-polarized charge carriers by flowing charge carriers from the surface of the semiconducting layer through the MgO tunnel barrier and into the (ferri- or ferro-) magnetic material, which then acts as a detector. The MgO tunnel barrier is preferably formed by forming a Mg layer on an underlayer (e.g., a ferromagnetic layer), and then directing additional Mg, in the presence of oxygen, towards the underlayer.

Claims

1. A device, comprising:

a first layer that includes at least one magnetic material from the group consisting of ferromagnetic materials and ferrimagnetic materials;

a MgO tunnel barrier in contact with the first layer; and

a second layer that includes semiconductor material, the second layer being in contact with the MgO tunnel barrier, the MgO tunnel barrier being sandwiched between the first layer and the second layer, thereby forming a first spintronic element, wherein the first layer, the MgO tunnel barrier, and the second layer are configured to enable spin-polarized charge carrier transport between the semiconductor material and the magnetic material, wherein each of the MgO tunnel barrier and the semiconductor material is crystalline, and wherein the first layer, the MgO tunnel barrier, and the second layer are configured so that, upon application of a voltage across the device, the spin polarization of charge carriers flowing between the MgO tunnel barrier and the semiconductor material is greater than 20%.

2. The device of claim 1, wherein at least one of the first layer and the second layer includes a spacer layer in contact with the MgO tunnel barrier, wherein the spacer layer does not substantially interfere with the tunneling properties of the MgO tunnel barrier, thereby allowing charge carriers to substantially maintain their spin polarization as they pass through the spintronic element.

3. The device of claim 1, wherein the first layer includes a ferromagnetic material.

4. The device of claim 3, wherein the ferromagnetic material includes Fe.

5. The device of claim 3, wherein the ferromagnetic material includes an alloy of Co and Fe.

6. The device of claim 5, wherein the Fe concentration is between 8 and 50 atomic %.

7. The device of claim 5, wherein the Fe concentration is between 12 and 25 atomic %.

8. The device of claim 3, wherein the ferromagnetic material is an alloy of at least 2 metals selected from the group consisting of Ni, Fe, and Co.

9. The device of claim 8, wherein the ferromagnetic material is bcc and substantially (100) oriented.

10. The device of claim 3, further comprising a layer of antiferromagnetic material, the ferromagnetic material being exchange biased by the antiferromagnetic material.

11. The device of claim 10, wherein the antiferromagnetic material includes an alloy selected from the group consisting of Ir—

Mn and Pt—

Mn.

12. The device of claim 3, wherein the layer of ferromagnetic material has a shape that is generally longer in one direction than in another direction, thereby fixing the magnetic moment of the ferromagnetic material through shape magnetic anisotropy.

13. The device of claim 3, further comprising:

a first lead that is in electrical communication with the semiconductor material; and

a second lead that is in electrical communication with the ferromagnetic material, the leads providing voltage across the spintronic element to enable the injection of spin polarized charge carriers into the spintronic element.

14. The device of claim 13, further comprising antiferromagnetic material that is in electrical communication with both the ferromagnetic material and the second lead.

15. The device of claim 3, wherein the MgO tunnel barrier and the ferromagnetic material are both substantially (100) oriented, and the ferromagnetic material is bcc.

16. The device of claim 1, wherein the semiconductor material is GaAs.

17. The device of claim 16, wherein the MgO tunnel barrier is in direct contact with both GaAs and the magnetic material.

18. The device of claim 1, wherein the semiconductor material is selected from the group consisting of Al_xGa_1-xAs, In_yGa_1-yAs, ZnSe, GaN, InGaN, GaNInAs, GaSb, InGaSb, InP, InGaP, Si, Ge, SiGe, and heterostructures thereof, in which x and y are between 0 and 100%.

19. The device of claim 1, wherein the MgO tunnel barrier is substantially (100) oriented.

20. The device of claim 1, wherein the MgO tunnel barrier has a thickness of between 3 and 50 angstroms.

21. The device of claim 1, further comprising a second spintronic element in electronic communication with the first spintronic element, the first and the second spintronic elements together forming respective devices for spin injection and spin detection.

22. The device of claim 1, wherein the first layer, the MgO tunnel barrier, and the second layer are configured so that, upon application of a voltage across the device, the spin polarization of charge carriers flowing between the MgO tunnel barrier and the semiconductor material is greater than 50%.

23. The device of claim 1, wherein the first layer, the MgO tunnel barrier, and the second layer are configured so that, upon application of a voltage across the device, the spin polarization of charge carriers flowing between the MgO tunnel barrier and the semiconductor material is greater than 40%.

24. A method of using the device of claim 1, comprising:

flowing charge carriers between a surface of the semiconductor material and the magnetic material, across the MgO tunnel barrier, wherein the charge carriers undergo spin dependent tunneling through the MgO tunnel barrier; and

detecting the spin polarization of the charge carriers.

25. The method of claim 24, wherein the charge carriers include electrons.

26. The method of claim 24, wherein the charge carriers include holes.

27. The method of claim 24, wherein the magnetic material includes a ferromagnetic material.

28. The method of claim 24, wherein the semiconductor material includes GaAs.

29. A method of using the device of claim 1, comprising:

applying a voltage across the device, so that a potential difference is established between the magnetic material and the semiconductor material, thereby inducing the flow of spin-polarized charge carriers between the magnetic material and the semiconductor material.

30. The method of claim 29, further comprising applying an electromagnetic field to change the direction of the spin of the charge carriers.

31. The method of claim 29, wherein the charge carriers include electrons.

32. The method of claim 29, wherein the charge carriers include holes.

33. The method of claim 29, wherein the magnetic material includes a ferromagnetic material.

34. The method of claim 29, wherein the semiconductor material includes GaAs.

35. A device, comprising:

a first layer that includes at least one magnetic material from the group consisting of ferromagnetic materials and ferrimagnetic materials, the first layer having a surface that is substantially free of oxide formed from the first layer;

a MgO tunnel barrier in contact with the surface of the first layer; and

a second layer that includes semiconductor material, the second layer having a surface that is in contact with the MgO tunnel barrier, the MgO tunnel barrier being sandwiched between the first layer and the second layer, wherein the MgO tunnel barrier and the semiconductor material are lattice-matched, each of the MgO tunnel barrier and the semiconductor material being crystalline.

36. The device of claim 35, wherein the surface of the second layer is substantially free of oxide formed from the second layer.

37. The device of claim 35, wherein at least one of the second layer and the first layer includes a spacer layer that is in contact with the MgO tunnel barrier, wherein the spacer layer does not substantially interfere with the tunneling properties of the MgO tunnel barrier.

38. The device of claim 35, wherein the MgO tunnel barrier has a thickness of between 3 and 50 angstroms.

39. The device of claim 35, wherein:

i) the amount of any oxide between the MgO tunnel barrier and the second layer and any oxide between the MgO tunnel barrier and the first layer is sufficiently low, and

ii) the MgO tunnel barrier, the first layer, and the second layer are sufficiently free of defects,

that the spin polarization of current flowing between the MgO tunnel barrier and the semiconductor material is greater than 20%.

40. The device of claim 35, wherein:

i) the amount of any oxide between the MgO tunnel barrier and the second layer and any oxide between the MgO tunnel barrier and the first layer is sufficiently low, and

ii) the MgO tunnel barrier, the first layer, and the second layer are sufficiently free of defects,

that the spin polarization of current flowing between the MgO tunnel barrier and the semiconductor material is greater than 40%.

41. A method, comprising:

forming a MgO tunnel barrier on a surface of an underlayer, wherein the surface is selected to be substantially free of oxide; and

forming an overlayer on the MgO tunnel barrier to construct a spintronic element, with one of the underlayer and the overlayer including a layer of semiconductor material, and the other of the underlayer and the overlayer including a layer of magnetic material selected from the group consisting of ferromagnetic materials and ferrimagnetic materials, wherein the MgO tunnel barrier is sandwiched between the underlayer and the overlayer, wherein the MgO tunnel barrier and the semiconductor material are formed so that they are lattice-matched, and each of the MgO tunnel barrier and the semiconductor material is crystalline.

42. The method of claim 41, wherein the MgO tunnel barrier is in direct contact with both the semiconductor material and the magnetic material.

43. The method of claim 41, wherein at least one of the underlayer and the overlayer includes a spacer layer that is in contact with the MgO tunnel barrier, wherein the spacer layer is selected to not substantially interfere with the tunneling properties of the MgO tunnel barrier, thereby allowing charge carriers to substantially maintain their spin polarization as they pass through the spintronic element.

44. The method of claim 41, wherein the magnetic material includes a ferromagnetic material, and the spintronic element further includes a layer of antiferromagnetic material, the ferromagnetic material being exchange biased by the antiferromagnetic material.

45. The method of claim 41, further comprising annealing the spintronic element to increase the spin polarization of charge carriers passed through the element.

46. The method of claim 45, wherein the charge carriers include electrons.

47. The method of claim 45, wherein the charge carriers include holes.

48. The method of claim 41, wherein the MgO tunnel barrier is substantially (100) oriented.

49. The method of claim 48, wherein the magnetic material includes ferromagnetic material, the ferromagnetic material being bcc and substantially (100) oriented.

50. The method of claim 41, said forming a MgO tunnel barrier including:

depositing Mg onto the surface of the underlayer to form a Mg layer thereon; and

directing additional Mg, in the presence of oxygen, towards the Mg layer to form a MgO tunnel barrier in contact with the underlayer, the oxygen reacting with the additional Mg and the Mg layer.

51. The method of claim 50, wherein the thickness of the Mg layer is selected to be large enough to prevent oxidation of the underlayer but small enough that, upon reaction of the oxygen with the Mg layer, substantially all the Mg in the Mg layer is converted into MgO.

52. The method of claim 50, further comprising annealing the MgO tunnel barrier to improve its tunneling characteristics.

53. The method of claim 50, wherein the Mg layer is deposited in the absence of substantial amounts of reactive oxygen.

54. The method of claim 41, wherein the MgO tunnel barrier has a thickness of between 3 and 50 angstroms.

55. The method of claim 41, further comprising annealing the MgO tunnel barrier at a temperature of at least 300°

C. to improve its tunneling characteristics.

56. A device, comprising:

a magnetic layer comprising at least one magnetic material from the group consisting of ferromagnetic materials and ferrimagnetic materials;

a MgO tunnel barrier; and

a semiconducting layer, wherein the MgO tunnel barrier is between the magnetic layer and the semiconducting layer, thereby forming a first spintronic element,

wherein the magnetic layer, the MgO tunnel barrier, and the semiconducting layer are in proximity with each other, so that, upon application of a voltage across the device, the spin polarization of charge carriers flowing between the MgO tunnel barrier and the semiconducting layer is greater than 20%, wherein the MgO tunnel barrier and the semiconducting layer are lattice-matched each of the MgO tunnel barrier and the semiconducting layer being crystalline.

57. The device of claim 56, wherein at least one of the magnetic layer and the semiconducting layer includes a spacer layer in contact with the MgO tunnel barrier, wherein the spacer layer does not substantially interfere with the tunneling properties of the MgO tunnel barrier, thereby allowing charge carriers to substantially maintain their spin polarization as they pass through the spintronic element.

58. The device of claim 56, wherein the magnetic layer includes a ferromagnetic material.

59. The device of claim 58, wherein the ferromagnetic material includes Fe.

60. The device of claim 58, wherein the ferromagnetic material is bcc and substantially (100) oriented.

61. The device of claim 58, further comprising a layer of antiferromagnetic material, the ferromagnetic material being exchange biased by the antiferromagnetic material.

62. The device of claim 58, wherein the semiconducting layer includes GaAs.

63. The device of claim 58, wherein the semiconducting layer includes a semiconductor selected from the group consisting of Al_xGa_1-xAs, In_yGa_1-yAs, ZnSe, GaN, InGaN, GaNInAs, GaSb, InGaSb, InP, InGaP, Si, Ge, SiGe, and heterostructures thereof, in which x and y are between 0 and 100%.

64. The device of claim 58, wherein the MgO tunnel barrier is substantially (100) oriented.

65. The device of claim 58, wherein the MgO tunnel barrier and the ferromagnetic material are both substantially (100) oriented, and the ferromagnetic material is bcc.

66. The device of claim 58, wherein the MgO tunnel barrier has a thickness of between 3 and 50 angstroms.

67. The device of claim 56, further comprising a second spintronic element in electronic communication with the first spintronic element, the first and the second spintronic elements together forming respective devices for spin injection and spin detection.

68. The device of claim 56, wherein the magnetic layer, the MgO tunnel barrier, and the semiconducting layer are configured so that, upon application of a voltage across the device, the spin polarization of charge carriers flowing between the MgO tunnel barrier and the semiconductor is greater than 40%.

69. A method of using the device of claim 56, comprising:

flowing charge carriers between a surface of the semiconducting layer and the magnetic material, across the MgO tunnel barrier, wherein the charge carriers undergo spin dependent tunneling through the MgO tunnel barrier; and

detecting the spin polarization of the charge carriers.

70. The method of claim 69, wherein the charge carriers include electrons.

71. The method of claim 69, wherein the charge carriers include holes.

72. The method of claim 69, wherein the magnetic material includes a ferromagnetic material.

73. The method of claim 69, wherein the semiconducting layer includes GaAs.

74. A method of using the device of claim 56, comprising:

applying a voltage across the device, so that a potential difference is established between the magnetic material and the semiconducting layer, thereby inducing the flow of spin-polarized charge carriers between the magnetic material and the semiconducting layer.

75. The method of claim 74, further comprising applying an electromagnetic field to change the direction of the spin of the charge carriers.

76. The method of claim 74, wherein the charge carriers include electrons.

77. The method of claim 74, wherein the charge carriers include holes.

78. The method of claim 74, wherein the magnetic material includes a ferromagnetic material.

79. The method of claim 74, wherein the semiconducting layer includes GaAs.

80. A device, comprising:

a first layer that includes at least one magnetic material from the group consisting of ferromagnetic materials and ferrimagnetic materials;

a MgO tunnel barrier in contact with the first layer; and

a second layer that includes semiconductor material, the second layer being in contact with the MgO tunnel barrier, the MgO tunnel barrier being sandwiched between the first layer and the second layer, thereby forming a first spintronic element, wherein the first layer, the MgO tunnel barrier, and the second layer are configured to enable spin-polarized charge carrier transport between the semiconductor material and the magnetic material, wherein each of the MgO tunnel barrier and the semiconductor material is crystalline, and wherein;

i) the amount of any oxide between the MgO tunnel barrier and the second layer and any oxide between the MgO tunnel barrier and the first layer is sufficiently low, and

ii) the MgO tunnel barrier, the first layer, and the second layer are sufficiently free of defects,

that the spin polarization of current flowing between the MgO tunnel barrier and the semiconductor material is greater than 40%.

81. The device of claim 80, wherein the semiconductor material includes GaAs.

82. The device of claim 81, further comprising a capping layer over the first layer.

83. A device, comprising:

a first layer that includes at least one magnetic material from the group consisting of ferromagnetic materials and ferrimagnetic materials;

a MgO tunnel barrier in contact with the first layer; and

a second layer that includes semiconductor material, the second layer being in contact with the MgO tunnel barrier, the MgO tunnel barrier being sandwiched between the first layer and the second layer, thereby forming a first spintronic element, wherein the first layer, the MgO tunnel barrier, and the second layer are configured to enable spin-polarized charge carrier transport between the semiconductor material and the magnetic material, wherein each of the MgO tunnel barrier and the semiconductor material is crystalline, and wherein;

i) the amount of any oxide between the MgO tunnel barrier and the second layer and any oxide between the MgO tunnel barrier and the first layer is sufficiently low, and

ii) the MgO tunnel barrier the first layer, and the second layer are sufficiently free of defects,

that the spin polarization of current flowing between the MgO tunnel barrier and the semiconductor material is greater than 20%.

84. A method, comprising:

forming a MgO tunnel barrier on a surface of an underlayer, wherein the surface is selected to be substantially free of oxide; and

forming an overlayer on the MgO tunnel barrier to construct a spintronic element, with one of the underlayer and the overlayer including a layer of semiconductor material, and the other of the underlayer and the overlayer including a layer of magnetic material selected from the group consisting of ferromagnetic materials and ferrimagnetic materials, wherein the MgO tunnel barrier is sandwiched between the underlayer and the overlayer, said forming a MgO tunnel barrier including;

depositing Mg onto the surface of the underlayer to form a Mg layer thereon; and

directing additional Mg, in the presence of oxygen, towards the Mg layer to form a MgO tunnel barrier in contact with the underlayer, the oxygen reacting with the additional Mg and the Mg layer,

wherein the thickness of the Mg layer is selected to be large enough to prevent oxidation of the underlayer but small enough that, upon reaction of the oxygen with the Mg layer, substantially all the Mg in the Mg layer is converted into MgO, and

wherein the MgO tunnel barrier and the semiconductor material are formed so that they are lattice-matched, and each of the MgO tunnel barrier and the semiconductor material is crystalline.

85. The method of claim 84, comprising annealing the MgO tunnel barrier at a temperature of at least 300°

C. to improve its tunneling characteristics.

86. The method of claim 85, wherein the semiconductor material includes GaAs, the MgO tunnel barrier is substantially (100) oriented, and the magnetic material includes ferromagnetic material that is bcc and substantially (100) oriented.

87. The method of claim 86, wherein upon application of a voltage across the spintronic element, the spin polarization of charge carriers flowing between the MgO tunnel barrier and the semiconductor material is greater than 20%.

88. A method, comprising:

forming a MgO tunnel barrier on a surface of an underlayer, wherein the surface is selected to be substantially free of oxide; and

forming an overlayer on the MgO tunnel barrier to construct a spintronic element, with one of the underlayer and the overlayer including a layer of semiconductor material, and the other of the underlayer and the overlayer including a layer of magnetic material selected from the group consisting of ferromagnetic materials and ferrimagnetic materials, wherein the MgO tunnel barrier is sandwiched between the underlayer and the overlayer, and the MgO tunnel barrier is in direct contact with both the semiconductor material and the magnetic material.

89. The method of claim 88, said forming a MgO tunnel barrier including:

depositing Mg onto the surface of the underlayer to form a Mg layer thereon; and

directing additional Mg, in the presence of oxygen, towards the Mg layer to form a MgO tunnel barrier in contact with the underlayer, the oxygen reacting with the additional Mg and the Mg layer.

90. The method of claim 89, wherein the thickness of the Mg layer is selected to be large enough to prevent oxidation of the underlayer but small enough that, upon reaction of the oxygen with the Mg layer, substantially all the Mg in the Mg layer is converted into MgO.

91. The method of claim 90, wherein the MgO tunnel barrier has a thickness of between 3 and 50 angstroms.

92. The method of claim 90, further comprising annealing the MgO tunnel barrier at a temperature of at least 300°

C. to improve its tunneling characteristics.

93. The method of claim 92, wherein the MgO tunnel barrier and the semiconductor material are formed so that they are lattice-matched, and each of the MgO tunnel barrier and the semiconductor material is crystalline.

94. The method of claim 90, wherein:

i) the amount of any oxide between the MgO tunnel barrier and the second layer and any oxide between the MgO tunnel barrier and the first layer is sufficiently low, and

ii) the MgO tunnel barrier, the overlayer, and the underlayer are sufficiently free of defects, that the spin polarization of current flowing between the MgO tunnel barrier and the semiconductor material is greater than 20%.

95. The method of claim 94, wherein the semiconductor material includes GaAs, the MgO tunnel barrier is substantially (100) oriented, and the magnetic material includes ferromagnetic material that is bcc and substantially (100) oriented.

96. A device, comprising:

a magnetic layer comprising at least one magnetic material from the group consisting of ferromagnetic materials and ferrimagnetic materials;

a MgO tunnel barrier; and

a semiconducting layer, wherein the MgO tunnel barrier is between the magnetic layer and the semiconducting layer, thereby forming a first spintronic element,

wherein the magnetic layer, the MgO tunnel barrier, and the semiconducting layer are in proximity with each other and are configured so that, upon application of a voltage across the device, the spin polarization of charge carriers flowing between the MgO tunnel barrier and the semiconducting layer is greater than 20%, each of the MgO tunnel barrier and the semiconducting layer being crystalline.

97. The device of claim 96, wherein the semiconducting layer includes GaAs.

98. The device of claim 96, wherein the semiconducting layer includes Si.