Pattern evaluation system, pattern evaluation method and program
First Claim
Patent Images
1. A pattern evaluation system which receives image data of a pattern to be evaluated to evaluate the pattern, said pattern evaluation system comprising:
- an edge model producing part which produces a pattern edge model in a form of an array of cells, said array having a relative intensity value stored therein and a position of an edge point being assigned thereto, the position of the edge point being defined as a coordinate value; and
an edge point coordinate detecting part which carries out an image matching processing of an image of the pattern and said pattern edge model to detect coordinates of an edge point of the pattern by scanning the image of the pattern with said pattern edge model,wherein said pattern edge model or the scanning direction thereof is rotated by an arbitrary angular interval equal to or less than 180-degrees during the image matching processing.
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Abstract
a pattern evaluation system which receives image data of a pattern to be evaluated to evaluate the pattern includes an edge model producing part which produces a pattern edge model and an edge point coordinate detecting part which carries out an image matching processing to an image of the pattern with the pattern edge model to detect coordinates of an edge point of the pattern.
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Citations
17 Claims
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1. A pattern evaluation system which receives image data of a pattern to be evaluated to evaluate the pattern, said pattern evaluation system comprising:
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an edge model producing part which produces a pattern edge model in a form of an array of cells, said array having a relative intensity value stored therein and a position of an edge point being assigned thereto, the position of the edge point being defined as a coordinate value; and an edge point coordinate detecting part which carries out an image matching processing of an image of the pattern and said pattern edge model to detect coordinates of an edge point of the pattern by scanning the image of the pattern with said pattern edge model, wherein said pattern edge model or the scanning direction thereof is rotated by an arbitrary angular interval equal to or less than 180-degrees during the image matching processing. - View Dependent Claims (2, 3, 4, 5, 6)
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7. A pattern evaluation method comprising:
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acquiring an image data of a pattern to be evaluated; producing a pattern edge model in a form of an array of cells, said array having a relative intensity value stored therein and a position of an edge point being assigned thereto, the position of the edge point being defined as a coordinate value; and carrying out an image matching processing of an image of the pattern and said pattern edge model to detect coordinates of an edge point of the pattern by scanning the image of the pattern with said pattern edge model, wherein said pattern edge model or the scanning direction thereof is rotated by an arbitrary angular interval equal to or less than 180-degrees during the image matching processing. - View Dependent Claims (8, 9, 10, 11, 12)
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13. A program contained on a computer readable medium which causes a computer to execute a pattern evaluation method comprising:
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acquiring an image data of a pattern to be evaluated; producing a pattern edge model in a form of an array of cells, said array having a relative intensity value stored therein and a position of an edge point being assigned thereto, the position of the edge point being defined as a coordinate value; and carrying out an image matching processing of an image of the pattern and said pattern edge model to detect coordinates of an edge point of the pattern by scanning the image of the pattern with said pattern edge model, wherein said pattern edge model or the scanning direction thereof is rotated by an arbitrary angular interval equal to or less than 180-degrees during the image matching processing. - View Dependent Claims (14, 15, 16, 17)
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Specification