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Micro-electro-mechanical sensor with force feedback loop

  • US 7,275,433 B2
  • Filed: 08/02/2005
  • Issued: 10/02/2007
  • Est. Priority Date: 08/03/2004
  • Status: Active Grant
First Claim
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1. A micro-electro-mechanical device, comprising:

  • a microstructure having a driving mass movable with respect to a rest position, according to a driving axis;

    a driving device configured to drive oscillation of the driving mass at a resonance frequency, the driving device having a feedback loop including the driving mass; and

    a micro-electro-mechanical sensor having a detection axis perpendicular to the driving axis and including;

    a sensing mass configured to be drawn by the driving mass along the driving axis and to move along the detecting axis in response to rotations of the microstructure about a third axis perpendicular to the driving axis and the detection axis; and

    a displacement-detecting means for detecting a displacement of the sensing mass according to the detection axis, the displacement-detecting means including a force feedback loop supplying electrostatic forces tending to restore the sensing mass into said rest position in response to the displacement of the sensing mass according to the detection axis, said force feedback loop being an analog feedback loop using a modulated feedback signal.

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