Apparatus for forming a striation reduced chemical mechanical polishing pad

• US 7,275,928 B2
• Filed: 11/23/2004
• Issued: 10/02/2007
• Est. Priority Date: 11/23/2004
• Status: Active Grant

• Current Assignee: Rohm and Haas Electronic Materials CMP Holdings, Inc.
• Original Assignee: Rohm and Haas Electronic Materials CMP Holdings, Inc.
• Inventors: Sarafinas, Aaron, Saikin, Alan H., Post, Robert L., Kolesar, David M.
• Primary Examiner(s): Davis; Robert
• Assistant Examiner(s): Chaet; Marissa W.
• Application Number:
  US10/996,199
• Publication Number:
  US 20060110488A1
• Time in Patent Office: 1,043 Days
• Field of Search: 425/145, 425/256, 425/447, 425/449, 428/147, 451/526, 451/28, 451/64, 366/136, 366/137, 366/139
• US Class Current: 425/447
• CPC Class Codes: B29B 7/726 Measuring properties of mixture, e.g. temperature or density B29B7/724 takes precedence
• CPC Class Codes: B29B 7/748 Plants B29B7/7433, B29B7/7485, B29B7/7495 take precedence
• CPC Class Codes: B29B 7/749 with stirring means for the individual components before they are mixed together
• CPC Class Codes: B29B 7/90 Fillers or reinforcements , e.g. fibres
• CPC Class Codes: B29C 39/006 Monomers or prepolymers by reaction injection moulding B29C67/246
• CPC Class Codes: B29C 39/24 Feeding the material into the mould
• CPC Class Codes: B29C 39/44 Measuring, controlling or regulating

Abstract

The present invention provides an apparatus for forming a chemical mechanical polishing pad, comprising a tank with polymeric materials, a storage silo with microspheres and a curative storage tank with curing agents. The apparatus further provides a premix prep tank for forming a pre-mixture of the polymeric materials and the microspheres and a recirculation loop in the premix prep tank for recirculating the pre-mixture until a desired bulk density is reached. The apparatus further provides a premix run tank for storing the pre-mixture, a mixer for forming a mixture of the pre-mixture and the curing agents and a mold for molding the mixture.

Claims

1. An apparatus for forming a chemical mechanical polishing pad, comprising:

a tank with polymeric materials;

a storage silo with microspheres;

a curative storage tank with curing agents;

a premix prep tank for forming a pre-mixture of the polymeric materials and the microspheres;

a recirculation loop in the premix prep tank for recirculating the pre-mixture until a desired bulk density is reached;

a premix run tank for storing the pre-mixture;

a mixer for forming a mixture of the pre-mixture and the curing agents; and

a mold for molding the mixture.

2. The apparatus of claim 1 further comprising an agitator for agitating the pre-mixture in the premix prep tank.

3. The apparatus of claim 1 further comprising a vacuum for degassing the premix prep tank.

4. The apparatus of claim 1 further comprising an in-line densitometer in the recirculation loop for measuring the bulk density of the pre-mixture.

5. The apparatus of claim 1 wherein the microsphere comprises polyvinyl alcohols, pectin, polyvinyl pyrrolidone, hydroxyethylcellulose, methylcellulose, hydropropylmethylcellulose, carboxymethylcellulose, hydroxypropylcellulose, polyacrylic acids, polyacrylamides, polyethylene glycols, polyhydroxyetheracrylites, starches, maleic acid copolymers, polyethylene oxide, polyurethanes, cyclodextrin, copolymers of acrylonitrile and vinylidene chloride and combinations thereof.

6. The apparatus of claim 1 wherein the polymeric material comprises, polyurethanes, polycarbonates, polyesters, silicones, polyimides, polysulfone, polyvinyl chloride, polyacrylonitrile, polymethylmethacrylate, polyvinylidene fluoride, polyethylene terephthalate, polyetheretherketone, polyetherketone, polyetherimide, ethylvinyl acetate, polyvinyl butyrate, polyvinyl acetate, acrylonitrile butadiene styrene, fluorinated ethylene propylene and perfluoralkoxy polymers, and combinations thereof.

7. An apparatus for forming a chemical mechanical polishing pad, comprising:

a first prepolymer storage tank with first polymeric materials;

a storage silo with microspheres;

a curative storage tank with curing agents;

a premix prep tank for forming a pre-mixture of the first polymeric materials and the microspheres;

a recirculation loop in the premix prep tank for recirculating the pre-mixture until a desired bulk density is reached;

a premix run tank for storing the pre-mixture;

a mixer for forming a mixture of the pre-mixture and the curing agents;

at least a second prepolymer storage tank with second polymeric materials for providing the second polymeric materials to the mixture until a desired bulk density is reached; and

a mold for molding the mixture.

8. The apparatus of claim 7 wherein the first and second polymeric materials are the same.

9. An apparatus for forming a chemical mechanical polishing pad, comprising:

a prepolymer storage tank with polymeric materials;

a storage silo with microspheres;

a curative storage tank with curing agents;

a premix run/prep tank for forming a pre-mixture of the polymeric materials and the microspheres;

a recirculation loop in the premix run/prep tank for recirculating the pre-mixture until a desired bulk density is reached;

a mixer for forming a mixture of the pre-mixture and the curing agents; and

a mold for molding the mixture.

10. The apparatus of claim 9 further comprising another prepolymer storage tank for providing additional polymeric materials to the mixture.