Multi-workpiece processing chamber

• US 7,276,122 B2
• Filed: 04/21/2004
• Issued: 10/02/2007
• Est. Priority Date: 04/21/2004
• Status: Active Grant

• Current Assignee: Mattson Technology, Inc. (Beijing Economic & Technology Development Area), BeiJing E-Town Semiconductor Technology Co., Ltd.
• Original Assignee: Mattson Technology, Inc. (Beijing Economic & Technology Development Area)
• Inventors: Qin, Ce, Devine, Daniel J., George, Rene, Desai, Dixit
• Primary Examiner(s): MOORE, KARLA A
• Application Number:
  US10/828,614
• Publication Number:
  US 20050247265A1
• Time in Patent Office: 1,259 Days
• Field of Search: 156/345.31, 156/345.32, 204/298.26, 118/719
• US Class Current: 118/719
• CPC Class Codes: H01L 21/6719 characterized by the construction of the processing chambers, e.g. modular processing chambers

Abstract

A multi-workpiece chamber includes at least two processing stations, for exposing workpieces to a treatment process. A partition cooperates with the chamber such that the partition is disengagably removable from the chamber and re-engagable with the chamber for selectively dividing the processing stations. The partition is configured to provide for non-line-of-sight travel of certain ones of the process related products between the processing stations. An exhaust arrangement divides exhaust flow into at least two approximately equal exhaust flow portions that leave the multi-workpiece chamber in a way which enhances uniformity of the treatment process for the stations. A partition configuration is described including a partition portion between the stations and a baffle portion extending into an exhaust arrangement. A modified partition arrangement is provided for use in establishing a modified exchange characteristic of the process related products.

Claims

1. An apparatus for processing workpieces in a treatment process which generates process related products, said apparatus comprising:

a multi-workpiece chamber including at least two processing stations, each of which is configured for exposing one of the workpieces to a treatment process and defining an exhaust port that is at least generally between and equidistant from each of said processing stations and including an exhaust arrangement that is connected to said exhaust port to define an exhaust channel to support an exhaust flow for use in evacuating said chamber; and

a partition configuration that is configured to cooperate with said chamber such that the partition configuration is disengagably removable from the chamber and, thereafter, re-engagable with the chamber, said partition configuration including a partition portion that is positioned between said processing stations, when engaged with the chamber, and including a baffle portion supported by the partition portion and extending outward from said exhaust port and into said exhaust channel in a way which divides the exhaust flow into at least two exhaust flow portions that leave said multi-workpiece chamber in a way which enhances uniformity of said treatment process for the first and second workpiece stations.

2. The apparatus of claim 1 wherein said processing stations are located at least generally on a centerline and wherein said partition configuration defines a plane that is at least generally normal to and bisects said centerline.

3. The apparatus of claim 1 wherein said partition portion of said partition configuration is at least generally coplanar with said baffle portion.

4. The apparatus of claim 1 wherein said exhaust channel is at least generally circular in cross-section and the two exhaust flow portions include an at least generally equal cross-sectional area.

5. The apparatus of claim 1 wherein said workpieces are semiconductor wafers.

6. The apparatus of claim 1 wherein said certain ones of the process related products include non-reactive species and the other ones of the process related products include reactive species.

7. The apparatus of claim 1 wherein said partition portion is configured to provide for pressure equalization between said processing stations.

8. The apparatus of claim 1 wherein said baffle portion is formed as a solid at least generally planar sheet material.

9. The apparatus of claim 1 wherein said baffle portion includes a pair of major opposing surfaces that are rectangular in shape.

10. The apparatus of claim 1 wherein said partition portion and said baffle portion are integrally formed.

11. The apparatus of claim 1 wherein said exhaust channel is circular in cross section having a channel diameter and said baffle portion includes a width that is approximately equal to the channel diameter and the width of the baffle portion is receivable in the channel diameter.

12. The apparatus of claim 1 wherein said exhaust arrangement includes a pump spool defining a pump spool channel having a pump spool length and said pump spool is arranged proximate to the chamber such that the pump spool channel is aligned with and in flow communication with said exhaust port and such that said baffle portion extends into said pump spool and at least partially along the pump spool length.

14. The method of claim 1 including locating said processing stations at least generally on a centerline and positioning said partition configuration to define a plane that is at least generally normal to and bisects said centerline.

15. The method of claim 14 wherein said partition portion is arranged at least generally coplanar with said baffle portion.

16. The method of claim 1 including integrally forming said partition portion and said baffle portion.

17. The method of claim 1 including defining said exhaust channel having an at least generally circular cross-section and configuring the two exhaust flow portions to include an at least generally equal cross-sectional area.

18. The method of claim 1 wherein said workpieces are semiconductor wafers.

19. The method of claim 1 wherein said certain ones of the process related products include non-reactive species and the other ones of the process related products include reactive species.

13. A method for processing workpieces using a treatment process which generates process related products, said method comprising:

providing a multi-workpiece chamber including at least two processing stations, each of which is configured for exposing one of the workpieces to a treatment process and defining an exhaust port that is at least generally between and equidistant from each of said processing stations and including an exhaust arrangement that is connected to said exhaust port to define an exhaust channel to support an exhaust flow for use in evacuating said chamber; and

configuring a partition configuration to cooperate with said chamber such that the partition configuration is disengagably removable from the chamber and, thereafter, re-engagable with the chamber, said partition configuration including a partition portion for positioning between said processing stations, when engaged with the chamber, and including a baffle portion supported by the partition portion and extending outward from said exhaust port and into said exhaust channel in a way which divides the exhaust flow into at least two exhaust flow portions that leave said multi-workpiece chamber.

20. The method of claim 13 including configuring said partition portion to provide for pressure equalization between said processing stations.

21. The method of claim 13 wherein said baffle portion is formed as a solid at least generally planar sheet material.

22. The method of claim 13 wherein said baffle portion includes a pair of major opposing surfaces that are rectangular in shape.

23. The method of claim 13 including forming said exhaust channel having a circular cross-section having a channel diameter and further forming said baffle portion to include a width that is approximately equal to the channel diameter and the width of the baffle portion is receivable in the channel diameter.

24. The method of claim 13 including providing a pump spool, as part of said exhaust arrangement, defining a pump spool channel having a pump spool length and arranging said pump spool proximate to the chamber such that the pump spool channel is aligned with and in flow communication with said exhaust port and such that said baffle portion extends into said pump spool and at least partially along the pump spool length.