Interdigitated, full wheatstone bridge flow sensor transducer
First Claim
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1. A sensor apparatus, comprising:
- a heating element comprising an upstream side and a downstream side;
a first heat sensing set configured adjacent to the upstream side of the heating element and comprising a first sensing element and a second sensing element, the first and second sensing elements configured in a serpentine, interdigitated pattern;
a second heat sensing set configured adjacent to the downstream side of the heating element and comprising a third sensing element and a fourth sensing element, the third and fourth sensing elements configured in a serpentine, interdigitated pattern that provides for a consistent measurement across a single sensing element and wherein said serpentine, interdigitated pattern provides for an interdigitated configuration that increases the consistency of measurement between said first, second, third and fourth sensing elements; and
a plurality of thermal isolation barriers configured adjacent to the first and second heat sensing sets, wherein the first sensing element is coupled to the third sensing element to form one half of a Wheatstone bridge and wherein the second sensing element is coupled to the fourth sensing element to form a second half of the Wheatstone bridge in order to thereby permit said sensor apparatus to quantify flow rate data with an enhanced signal-to-noise ratio, which in turn provides for an improvement in the accuracy and resolution of quantifying mass flow rates via said sensor apparatus.
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Abstract
A sensor apparatus includes a heating element comprising an upstream side and a downstream side. A first heat sensing set is generally configured adjacent to the upstream side of the heating element and comprises a first sensing element and a second sensing element, the first and second sensing elements configured in a serpentine, interdigitated pattern. A second heat sensing set can be configured adjacent to the downstream side of the heating element and comprises a third sensing element and a fourth sensing element, the third and fourth sensing elements configured in a serpentine, interdigitated pattern.
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Citations
19 Claims
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1. A sensor apparatus, comprising:
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a heating element comprising an upstream side and a downstream side; a first heat sensing set configured adjacent to the upstream side of the heating element and comprising a first sensing element and a second sensing element, the first and second sensing elements configured in a serpentine, interdigitated pattern; a second heat sensing set configured adjacent to the downstream side of the heating element and comprising a third sensing element and a fourth sensing element, the third and fourth sensing elements configured in a serpentine, interdigitated pattern that provides for a consistent measurement across a single sensing element and wherein said serpentine, interdigitated pattern provides for an interdigitated configuration that increases the consistency of measurement between said first, second, third and fourth sensing elements; and a plurality of thermal isolation barriers configured adjacent to the first and second heat sensing sets, wherein the first sensing element is coupled to the third sensing element to form one half of a Wheatstone bridge and wherein the second sensing element is coupled to the fourth sensing element to form a second half of the Wheatstone bridge in order to thereby permit said sensor apparatus to quantify flow rate data with an enhanced signal-to-noise ratio, which in turn provides for an improvement in the accuracy and resolution of quantifying mass flow rates via said sensor apparatus. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8)
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9. A system for sensing mass flow, comprising:
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a base configured to couple to a microchip; a heating element coupled to the base and configured in a serpentine pattern with an upstream side and a downstream side; a first heat sensing element coupled to the base and configured in a serpentine pattern adjacent to the upstream side of the heating element and further configured as a first leg of a Wheatstone bridge; a second heat sensing element coupled to the base and configured in a serpentine pattern interdigitated with the first heat sensing element and further configured as a second leg of a Wheatstone bridge; a third heat sensing element coupled to the base and configured in a serpentine pattern adjacent to the downstream side of the heating element and further configured as a third leg of a Wheatstone bridge; and a fourth heat sensing element coupled to the base and configured in a serpentine pattern interdigitated with the third heat sensing element and further configured as a fourth leg of a Wheatstone bridge in order to thereby permit said system to quantify flow rate data with an enhanced signal-to-noise ratio, which in turn provides for an improvement in the accuracy and resolution of quantifying mass flow rates via said system, wherein said serpentine pattern provides for a consistent measurement across a single sensing element and increases the consistency of measurement between said first, second, third and fourth sensing elements. - View Dependent Claims (10, 11, 12, 13)
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14. A method for sensing mass flow, comprising:
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providing a heating element configured in a serpentine pattern and comprising an upstream side and a downstream side; providing a first heat sensing set adjacent to the upstream side of the heating element configured as a first one-half of a Wheatstone bridge and comprising a first heat sensing element and a second heat sensing element configured in a serpentine, interdigitated pattern; providing a second heat sensing set adjacent to the downstream side of the heating element configured as a second one-half of a Wheatstone bridge and comprising a third heat sensing element and a fourth heat sensing element configured in a serpentine, interdigitated pattern that provides for a consistent measurement across a single sensing element and wherein said serpentine, interdigitated pattern provides for an interdigitated configuration that increases the consistency of measurement between said first, second, third and fourth sensing elements; measuring by the first heat sensing set a first temperature; measuring by the second heat sensing set a second temperature; and determining a mass flow rate in response to the first and second temperatures in order to thereby quantify flow rate data with an enhanced signal-to-noise ratio, which in turn provides for an improvement in the accuracy and resolution of quantifying mass flow rates. - View Dependent Claims (15, 16, 17, 18, 19)
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Specification