Multi-stage vacuum pump

• US 7,278,839 B2
• Filed: 01/29/2004
• Issued: 10/09/2007
• Est. Priority Date: 10/23/2003
• Status: Expired due to Fees

• Current Assignee: Industrial Technology Research Institute
• Original Assignee: Industrial Technology Research Institute
• Inventors: Shen, Tean-Mu, Liu, Ming-Hsin, Chien, Jung-Chen, Fang, Hong-Sheng, Chen, Jiun-Hung
• Primary Examiner(s): Trieu; Theresa
• Application Number:
  US10/766,216
• Publication Number:
  US 20050089424A1
• Time in Patent Office: 1,349 Days
• Field of Search: 418/9, 418/201.1, 418/206.1, 418/206.6, 418/75, 418/200, 418/104, 418/140
• US Class Current: 418/9
• CPC Class Codes: F04C 18/086 Carter
• CPC Class Codes: F04C 18/126 with radially from the rotor body extending elements, not necessarily co-operating with corresponding recesses in the other rotor, e.g. lobes, Roots type
• CPC Class Codes: F04C 2220/12 Dry running
• CPC Class Codes: F04C 23/001 of similar working principle

Abstract

A multi-stage vacuum pump includes a plurality of casings connected in series and each casing defining a respective compression chamber, a plurality of partition plates each set in between each two casings. When compressed by rotors at shafts in one compression chamber, compressed air passes through the air path formed in the corresponding partition plate to the next compression chamber for further compression, and finally compressed air passes to the last compression chamber through the air path formed in the last partition plate. Because the invention is designed to let compressed air directly pass through the air path in each partition plate, the outer diameter and volume of the multi-stage vacuum pump can be minimized to reduce the weight and the manufacturing cost.

Claims

1. A multi-stage vacuum pump comprising:

a plurality of casings axially connected in series, said casings each defining a compression chamber inside thereof;

a plurality of partition plates each respectively mounted between two adjacent casings of said plurality of casings to separate the compression chambers of said two adjacent casings, said partition plates each having a predetermined wall thickness and two through holes;

a mover module, said mover module comprising two parallel shafts respectively extended through the two through holes of each of said partition plates, and a plurality of rotors symmetrically formed integral with said two parallel shafts respectively and arranged in pairs, wherein each pair of two adjacent rotors of said plurality of rotors is received in one corresponding compression chamber of said casings; and

a synchronizer gear module being driven to rotate said shafts and said rotors synchronously;

wherein said partition plates each have a front face, a rear face, and at least one air path respectively formed in the respective wall thickness and extended from said front face to said rear face; and

wherein the at least one air path of each said partition plate is formed in between the two through holes of the respective partition plate.

2. The multi-stage vacuum pump as claimed in claim 1, wherein said partition plates each are comprised of a pair of partition plate members, said pair of partition plate members being abutted against each other, one of said partition plate members of said pair of partition plate members defining a first air path, another of said partition plate members of said pair of partition plate members defining second air path, said first air path and said second air path being linked to form one air path of the respective partition plate.

3. The multi-stage vacuum pump as claimed in claim 1, wherein said partition plates each further have an annular groove, and an annular elastomer respectively mounted in said annular groove and pressed on the corresponding casing to seal the compression chamber of the corresponding casing.

4. The multi-stage vacuum pump as claimed in claim 1, wherein said partition plates each have a front opening in the respective front face, and a rear opening in the respective rear face in air-communication with said front opening through the at least one air path of the respective partition plate.

5. The multi-stage vacuum pump as claimed in claim 4, wherein the front opening of each of said partition plates adapted to guide air into the at least one air path of the respective partition plate, and the rear opening of each of said partition plates adapted to guiding air out of the at least one air path of the respective partition plate.

6. The multi-stage vacuum pump as claimed in claim 1, wherein said partition plates each are comprised of four partition plate members abutted against one another.

7. The multi-stage vacuum pump as claimed in claim 1, wherein said synchronizer gear module drives said rotors and said shafts to rotate synchronously without causing contact between each two adjacent rotors.