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Photoresist polymer and photoresist composition containing the same

  • US 7,279,256 B2
  • Filed: 05/09/2005
  • Issued: 10/09/2007
  • Est. Priority Date: 07/30/2004
  • Status: Expired due to Fees
First Claim
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1. A photoresist polymer comprising a polymerization repeating unit represented by Formula 1:

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