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Semiconductor device

  • US 7,279,745 B2
  • Filed: 03/27/2006
  • Issued: 10/09/2007
  • Est. Priority Date: 03/30/2005
  • Status: Active Grant
First Claim
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1. A semiconductor device comprising:

  • a one conductivity type semiconductor substrate;

    an opposite conductivity type epitaxial layer laminated on the semiconductor substrate;

    a gate oxide film and a gate electrode, which are formed on the epitaxial layer;

    an opposite conductivity type buried diffusion layer formed across the semiconductor substrate and the epitaxial layer;

    a one conductivity type back gate diffusion layer which is formed in the epitaxial layer and overlaps with the buried diffusion layer at a bottom of the back gate diffusion layer;

    an opposite conductivity type drain diffusion layer which is formed in the epitaxial layer, at least partially overlaps with the back gate diffusion layer, and allows the overlapping region to be an opposite conductivity type diffusion region;

    an opposite conductivity type source diffusion layer formed in the back gate diffusion layer;

    a drain electrode connected to the drain diffusion layer; and

    a source electrode connected to the source diffusion layer.

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