Sensor for detecting high frequency signals

• US 7,280,078 B2
• Filed: 06/20/2005
• Issued: 10/09/2007
• Est. Priority Date: 11/20/2004
• Status: Active Grant

• Current Assignee: Triton Services, Inc.
• Original Assignee: Scenterra, Inc.
• Inventors: Salsman, Kenneth E., So, Daniel W.
• Primary Examiner(s): LE, HOANGANH T
• Application Number:
  US11/157,272
• Publication Number:
  US 20060284774A1
• Time in Patent Office: 841 Days
• Field of Search: 343/703, 343/701, 343/700.MS, 374/121, 374/244, 324/244, 735/79, 73/233.1, 436/164
• US Class Current: 343/703
• CPC Class Codes: G01J 3/42 Absorption spectrometry; Double beam spectrometry; Flicker spectrometry; Reflection spectrometry beam switching arrangements G01J3/08
• CPC Class Codes: G01R 23/163 adapted for measuring in circuits having distributed constants
• CPC Class Codes: G01R 23/17 with optical or acoustical auxiliary devices
• CPC Class Codes: G01R 29/0871 Complete apparatus or systems; circuits, e.g. receivers or amplifiers G01R29/0878, G01R29/0892 take precedence; dosimeters, warning devices G01R29/0857
• CPC Class Codes: G01R 29/0878 Sensors; antennas; probes; detectors wave guide measuring sections G01R1/24
• CPC Class Codes: H01Q 1/247 with frequency mixer, e.g. for direct satellite reception or Doppler radar

Abstract

A sensor that senses incident RF signals is provided. The sensor is capable of sensing signals in the Gigahertz (GHz) and Terahertz (THz) range. The sensor may utilize one or more cantilevers, an interferometer, or may be formed in a box-type configuration.

Claims

1. A sensor that senses incident energy, the sensor comprising:

a receiver capable of receiving incident energy;

a first MEMS, wherein a first portion of the first MEMS is electrically coupled to the receiver and is electrically coupled to a first reference signal, wherein a second portion of the first MEMS is driven by a first reference frequency corresponding to the first reference signal, wherein a first actual frequency and a first actual magnitude of oscillation of the second portion of the first MEMS is determined by an interaction of mechanical properties of the first MEMS and the first reference frequency, wherein the second portion of the first MEMS oscillates at the first actual frequency and the first actual magnitude when the received incident energy is below a first predetermined threshold, and wherein the second portion of the first MEMS oscillates at a second actual frequency and a second actual magnitude when the received incident energy is above a second predetermined threshold;

a second MEMS, wherein a first portion of the second MEMS is electrically coupled to a second reference signal and substantially isolated from the received incident energy, wherein a second portion of the second MEMS is driven by a second reference frequency corresponding to the second reference signal, wherein a third actual frequency and a third actual magnitude of oscillation of the second portion of the second MEMS is determined by an interaction of mechanical properties of the second MEMS and the second reference frequency, wherein the second portion of the second MEMS oscillates at the third actual frequency and the third actual magnitude; and

a detection system including a first sensing electrode associated with the second portion of the first MEMS, and a second sensing electrode associated with the second portion of the second MEMS, wherein the third actual frequency and the third actual magnitude is compared with either both the first actual frequency and the first actual magnitude or both the second actual frequency and the second actual magnitude to thereby determine the received incident energy, wherein the first MEMS and the second MEMS are exposed to common environmental conditions, and wherein the comparison that determines the received incident energy substantially eliminates any affect of the common environmental conditions.

2. The sensor of claim 1, wherein the second reference frequency is substantially equal to the first reference frequency.

3. The sensor of claim 1, wherein the first actual frequency is substantially different from the third actual frequency.

4. The sensor of claim 1, wherein the second actual frequency is a natural resonance frequency or harmonic thereof of the second portion of the first MEMS, wherein the received incident energy and the first reference signal are applied to the first MEMS at different frequencies, wherein a combination of the different frequencies generate a beat frequency which corresponds to the natural resonance frequency or the harmonic thereof of the second portion of the first MEMS.

5. The sensor of claim 4, wherein the second actual frequency of the second portion of the first MEMS is a lower frequency than the frequency of the received incident energy.

6. The sensor of claim 1, wherein the detection system further uses a phase difference between the third actual frequency and either the first actual frequency or the second actual frequency to determine the received incident energy.

7. The sensor of claim 1, wherein the first reference signal and the second reference signal include a direct current bias voltage.

8. The sensor of claim 1, wherein the first predetermined threshold is substantially equal to the second predetermined threshold.

9. The sensor of claim 1, wherein the first predetermined threshold is zero.

10. The sensor of claim 1 further comprising an electrode associated with each of the first and second MEMS which provide electrical fields to the first and second MEMS, respectively.

11. The sensor of claim 10, wherein the electrical fields correspond to direct currents.

12. The sensor of claim 10, wherein the electrical fields correspond to waveforms.

13. The sensor of claim 10, wherein the oscillation of the first and the second MEMS create a change in capacitance between the first MEMS and corresponding electrode, and a change in capacitance between the second MEMS and corresponding electrode.

14. The sensor of claim 10, wherein the oscillations of the first and second MEMS generate a transfer of electrical charge to each corresponding electrode from the respective first MEMS or the second MEMS.

15. The sensor of claim 1, wherein the first MEMS and the second MEMS are cantilevers.

16. The sensor of claim 1, wherein the receiver is an antenna.

17. The sensor of claim 1, wherein the incident energy is electromagnetic radiation.

18. The sensor of claim 1, wherein the incident energy is in the gigahertz range.

19. The sensor of claim 1, wherein the incident energy is in the terahertz range.

20. The sensor of claim 1, wherein the incident energy is IR radiation.

21. The sensor of claim 1, wherein the incident energy is visible light radiation.

22. The sensor of claim 1, wherein the incident energy is UV radiation.

23. The sensor of claim 1, wherein the incident energy is X-Ray radiation.

24. The sensor of claim 1, wherein the incident energy is alpha radiation.

25. The sensor of claim 1, wherein the incident energy is beta radiation.

26. The sensor of claim 1, wherein the incident energy is gamma radiation.

27. The sensor of claim 1, wherein the incident energy is neutron radiation.

28. The sensor of claim 1, wherein the incident energy is nuclear radiation.

29. The sensor of claim 1, wherein the incident energy is magnetic radiation.

30. The sensor of claim 1, wherein the receiver comprises a photodiode.

31. An array of the sensors of claim 1, wherein each of the sensors has a corresponding photoelectric pixel electrically connected to a corresponding one of the first MEMS, wherein the photoelectric pixels convert the received incident energy into electricity.

32. An array of the sensors of claim 1, wherein each of the sensors has a corresponding piezoelectric pixel electrically connected to a corresponding one of the first MEMS, wherein the piezoelectric pixels convert the received incident energy into electricity.

33. An array of the sensors of claim 1, wherein each of the sensors has a corresponding magnetostrictive pixel electrically connected to a corresponding one of the first MEMS, wherein the magnetostrictive pixels convert the received incident energy into electricity.

34. An array of the sensors of claim 1, wherein each of the sensors has a corresponding antenna pixel electrically connected to a corresponding one of the first MEMS, wherein the antenna pixels receive the incident energy such that antenna signals corresponding to the received incident energy is transmitted to the first MEMS.

35. An array of the sensors of claim 34, wherein each antenna pixel is h-shaped.

36. An array of the sensors of claim 31, wherein each sensor within the array of sensors is able to detect a different frequency of the incident energy from that of another sensor within the array of sensors.

37. An array of the sensors of claim 32, wherein each sensor within the array of sensors is able to detect a different frequency of the incident energy from that of another sensor within the array of sensors.

38. An array of the sensors of claim 33, wherein each sensor within the array of sensors is able to detect a different frequency of the incident energy from that of another sensor within the array of sensors.

39. An array of the sensors of claim 34, wherein each sensor within the array of sensors is able to detect a different frequency of the incident energy from that of another sensor within the array of sensors.

40. An may of the sensors of claim 1, wherein an output of the array of sensors is capable of producing an image corresponding to the received incident energy.

41. An may of the sensors of claim 1, wherein an output of the array of sensors is capable of producing a spectral analysis corresponding to the received incident energy.

42. An array of the sensors of claim 1, wherein a plurality of adjacent sensors within the array of sensors is designed to detect a predetermined received incident energy.