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Sensor for detecting high frequency signals

  • US 7,280,078 B2
  • Filed: 06/20/2005
  • Issued: 10/09/2007
  • Est. Priority Date: 11/20/2004
  • Status: Active Grant
First Claim
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1. A sensor that senses incident energy, the sensor comprising:

  • a receiver capable of receiving incident energy;

    a first MEMS, wherein a first portion of the first MEMS is electrically coupled to the receiver and is electrically coupled to a first reference signal, wherein a second portion of the first MEMS is driven by a first reference frequency corresponding to the first reference signal, wherein a first actual frequency and a first actual magnitude of oscillation of the second portion of the first MEMS is determined by an interaction of mechanical properties of the first MEMS and the first reference frequency, wherein the second portion of the first MEMS oscillates at the first actual frequency and the first actual magnitude when the received incident energy is below a first predetermined threshold, and wherein the second portion of the first MEMS oscillates at a second actual frequency and a second actual magnitude when the received incident energy is above a second predetermined threshold;

    a second MEMS, wherein a first portion of the second MEMS is electrically coupled to a second reference signal and substantially isolated from the received incident energy, wherein a second portion of the second MEMS is driven by a second reference frequency corresponding to the second reference signal, wherein a third actual frequency and a third actual magnitude of oscillation of the second portion of the second MEMS is determined by an interaction of mechanical properties of the second MEMS and the second reference frequency, wherein the second portion of the second MEMS oscillates at the third actual frequency and the third actual magnitude; and

    a detection system including a first sensing electrode associated with the second portion of the first MEMS, and a second sensing electrode associated with the second portion of the second MEMS, wherein the third actual frequency and the third actual magnitude is compared with either both the first actual frequency and the first actual magnitude or both the second actual frequency and the second actual magnitude to thereby determine the received incident energy, wherein the first MEMS and the second MEMS are exposed to common environmental conditions, and wherein the comparison that determines the received incident energy substantially eliminates any affect of the common environmental conditions.

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