Reflective spatial light modulator

• US 7,280,263 B2
• Filed: 06/06/2005
• Issued: 10/09/2007
• Est. Priority Date: 06/19/2002
• Status: Expired due to Fees

• Current Assignee: Miradia Inc. (Walsin Lihwa Corporation)
• Original Assignee: Miradia Inc. (Walsin Lihwa Corporation)
• Inventors: Yang, Xiao, Pan, Shaoher X, Zhang, Shoucheng, Chen, Dongmin
• Primary Examiner(s): Mack; Ricky
• Assistant Examiner(s): STULTZ, JESSICA T
• Application Number:
  US11/147,420
• Publication Number:
  US 20060023294A1
• Time in Patent Office: 855 Days
• Field of Search: 359/263, 359/872, 359/223
• US Class Current: 359/263
• CPC Class Codes: G02B 26/0841 the reflecting element being moved or deformed by electrostatic means
• CPC Class Codes: Y10S 359/904 Micromirror

Abstract

A micro-mirror array that is useful, for example, in a reflective spatial light modulator. In one embodiment, the micro mirror array includes spacer support walls, a vertical torsion hinge, and a mirror plate, all being fabricated from a single wafer. The micro-mirror array has a large fill ratio.

Claims

1. A micro mirror comprising:

frame having an upper surface and a lower surface defining a frame height;

a hinge connected to the frame; and

a mirror plate having an upper surface and a lower surface defining a mirror plate thickness less than the frame height, wherein each of the frame, the hinge, and the mirror plate are fabricated from a single continuous piece of material.

2. The micro mirror of claim 1, wherein the single continuous piece of material is single crystal silicon.

3. The micro mirror of claim 1, wherein the hinge is a vertically oriented torsion spring hinge.

4. The micro mirror of claim 1, wherein the upper surface of the mirror plate is reflective.

5. The micro mirror of claim 1, further comprising a reflective layer on top of the upper surface of the plate.

6. The micro mirror of claim 1, wherein the mirror plate is adapted to rotate about a longitudinal axis of the hinge.

7. The micro mirror of claim 1, further comprising a mechanical stop for stopping rotation of the mirror plate relative to the frame when the mirror plate has rotated to a predetermined angle.

12. The spatial light modulator of claim 1 wherein the hinge extends from a first portion of the frame to a second portion of the frame.

13. The spatial light modulator of claim 12 wherein the first portion of the frame and the second portion of the frame are diagonally opposed corners of the frame.

14. The spatial light modulator of claim 1 wherein the upper surface of the mirror plate is substantially coplanar with the upper surface of the frame.

15. The spatial light modulator of claim 1 wherein an upper surface of the hinge is substantially coplanar with the upper surface of the frame.

16. The spatial light modulator of claim 15 wherein the upper surface of the mirror plate is substantially coplanar with the upper surface of the frame.

17. The spatial light modulator of claim 16 wherein the upper surface of the mirror plate is polished to reflect light.

18. The spatial light modulator of claim 16 wherein a reflective layer is deposited on the upper surface of the mirror plate.

8. A spatial light modulator comprising:

a plurality of micro mirrors in an array, each micro mirror in the array having a mirror plate with an upper surface and a lower surface defining a mirror plate thickness;

a plurality of hinges, each hinge connected to a mirror plate;

a frame with a plurality of support walls characterized by a wall height greater than the mirror plate thickness, each hinge connected to at least one support wall, for supporting the hinge and the mirror plate, wherein the mirror plates, the hinges, and the frame are fabricated from a single continuous piece of material.

9. The array of claim 8, wherein there is a gap of 0.2 microns or less between an edge of the upper surface of the mirror plate and a support wall of the support frame.

10. The array of claim 8, wherein the upper surfaces of the mirror plates are substantially rectangular in shape.

11. The array of claim 10, wherein the upper surfaces of the mirror plates have an area of approximately 225 square microns.

19. The array of micro-mirrors of claim 8 wherein the single continuous piece of material comprises single crystal silicon.

20. The array of micro-mirrors of claim 8 wherein a surface of each of the plurality of micro-mirrors is reflective.

21. The array of micro-mirrors of claim 20 wherein the plurality of hinges and the plurality of micro-mirrors lie in the plane parallel to the upper surface of the frame.