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Method for fabricating a film bulk acoustic resonator

  • US 7,281,304 B2
  • Filed: 04/20/2004
  • Issued: 10/16/2007
  • Est. Priority Date: 04/22/2003
  • Status: Active Grant
First Claim
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1. A method for fabricating a film bulk acoustic resonator, the method comprising:

  • providing a dielectric layer on a substrate;

    providing a sacrificial layer on a portion of the dielectric layer, while leaving a portion of the dielectric layer exposed to form an exposed dielectric layer;

    providing a bottom electrode on the sacrificial layer and on the exposed dielectric layer, the providing of the bottom electrode including depositing a conductive material on the sacrificial layer and on the exposed dielectric layer, the conductive material on the exposed dielectric layer forming a base section and the conductive material on the sacrificial layer forming an overhanging section;

    providing a piezoelectric layer on the bottom electrode;

    providing a top electrode on the piezoelectric layer; and

    removing the sacrificial layer.

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