Method for fabricating a film bulk acoustic resonator

• US 7,281,304 B2
• Filed: 04/20/2004
• Issued: 10/16/2007
• Est. Priority Date: 04/22/2003
• Status: Active Grant

• Current Assignee: Samsung Electronics Co. Ltd.
• Original Assignee: Samsung Electronics Co. Ltd.
• Inventors: Song, In-sang, Hong, Young-tack, Kim, Sang-chae
• Primary Examiner(s): Tugbang; A. Dexter
• Assistant Examiner(s): NGUYEN, TAI V
• Application Number:
  US10/827,532
• Publication Number:
  US 20050034822A1
• Time in Patent Office: 1,274 Days
• Field of Search: 29/253.5, 295/94, 298/46, 298/47, 298/32, 298/30, 298/31, 310/313.R, 310/328, 310/312, 310/365, 310/334, 333/187, 333/189, 216/75, 216/100, 216 77- 78, 159/5, 159/17.2, 438/52
• US Class Current: 29/25.35
• CPC Class Codes: H03H 2003/022 the resonators or networks being of the cantilever type
• CPC Class Codes: H03H 3/02 for the manufacture of piezoelectric or electrostrictive resonators or networks H03H3/08 takes precedence
• CPC Class Codes: H03H 9/172 Means for mounting on a substrate, i.e. means constituting the material interface confining the waves to a volume
• CPC Class Codes: Y10T 29/42 Piezoelectric device making
• CPC Class Codes: Y10T 29/49005 Acoustic transducer
• CPC Class Codes: Y10T 29/49126 Assembling bases
• CPC Class Codes: Y10T 29/49128 Assembling formed circuit to base
• CPC Class Codes: Y10T 29/4913 Assembling to base an electrical component, e.g., capacitor, etc.
• CPC Class Codes: Y10T 29/49155 Manufacturing circuit on or in base
• CPC Class Codes: Y10T 29/49156 with selective destruction of conductive paths

Abstract

A method for fabricating a film bulk acoustic resonator (FBAR) includes depositing a dielectric layer on a substrate, providing a sacrificial layer on part of the dielectric layer; providing a bottom electrode on part of the sacrificial layer on part of the dielectric layer; providing a piezoelectric layer on the bottom electrode; patterning a top electrode on the piezoelectric layer; and removing the sacrificial layer. The substrate may have a cavity receiving the sacrificial layer. As a result, a cantilevered resonator having an air gap between the bottom electrode and the dielectric layer may be simply fabricated.

Claims

1. A method for fabricating a film bulk acoustic resonator, the method comprising:

providing a dielectric layer on a substrate;

providing a sacrificial layer on a portion of the dielectric layer, while leaving a portion of the dielectric layer exposed to form an exposed dielectric layer;

providing a bottom electrode on the sacrificial layer and on the exposed dielectric layer, the providing of the bottom electrode including depositing a conductive material on the sacrificial layer and on the exposed dielectric layer, the conductive material on the exposed dielectric layer forming a base section and the conductive material on the sacrificial layer forming an overhanging section;

providing a piezoelectric layer on the bottom electrode;

providing a top electrode on the piezoelectric layer; and

removing the sacrificial layer.

2. The method as claimed in claim 1, further comprising providing a second dielectric layer on the top electrode.

3. The method as claimed in claim 2, further comprising adjusting a thickness of the second dielectric layer in accordance with a desired resonance frequency.

4. The method as claimed in claim 1, wherein the providing of the bottom electrode further includes partially removing the conductive material forming the base section, so that a width of the conductive material forming the base section is smaller than a width of the conductive material forming the overhanging section;

and

wherein the providing of the top electrode includes depositing another conductive material on the piezoelectric layer and on the exposed dielectric layer, and patterning the another conductive material on the dielectric layer so that the top electrode includes a pad positioned in an area of the exposed dielectric layer where the conductive material forming the base section has been removed, the pad being spaced from the conductive material remaining in the base section.

5. The method as claimed in claim 4, wherein the providing of the piezoelectric layer further includes depositing a piezoelectric material on the bottom electrode and on the exposed dielectric layer and patterning the piezoelectric material on the exposed dielectric layer to include a portion of piezoelectric material in an area of the exposed dielectric layer where the conductive material forming the base section has been removed and separate from an area of the dielectric layer in which the pad is to be formed.

6. The method as claimed in claim 1, wherein the removing of the sacrificial layer forms an air gap between the bottom electrode and the dielectric layer.

7. The method as claimed in claim 1, wherein an upper surface of the sacrificial layer is higher than an upper surface of the dielectric layer.

8. A method for fabricating a film bulk acoustic resonator, the method comprising:

forming a cavity on a substrate;

providing a dielectric layer on the substrate;

providing a sacrificial layer on a portion of the dielectric layer, while leaving a portion of the dielectric layer exposed to form an exposed dielectric layer;

providing a bottom electrode on the sacrificial layer and on the exposed dielectric layer.

providing a piezoelectric layer on the bottom electrode;

providing a top electrode on the piezoelectric layer; and

removing the sacrificial layer,

wherein the providing of the bottom electrode includes depositing a conductive material on the exposed dielectric layer to form a base section and on the sacrificial layer to form an overhanging section, and partially removing the conductive material forming the base section, so that a width of the conductive material forming the base section is smaller than a width of the conductive material forming the overhanging section; and

the providing of the top electrode includes depositing another conductive material on the piezoelectric layer and on the exposed dielectric layer, and patterning the another conductive material so that the top electrode includes a pad positioned on the exposed dielectric layer where the conductive material forming the base section has been removed, the pad being spaced from the conductive material forming the base section.

9. The method as claimed in claim 8, wherein the providing of the sacrificial layer includes filling the cavity with a sacrificial material.

10. The method as claimed in claim 9, wherein the filling of the cavity includes depositing the sacrificial material on the dielectric layer and the cavity and planarizing the sacrificial material to provide the exposed dielectric layer.

11. The method as claimed in claim 10, wherein the planarizing includes a chemical mechanical polishing process.

12. The method as claimed in claim 8, further comprising providing a second dielectric layer on the top electrode.

13. The method as claimed in claim 12, further comprising adjusting a thickness of the second dielectric layer in accordance with a desired resonance frequency.

14. A method for fabricating a film bulk acoustic resonator, the method comprising:

providing a dielectric layer on a substrate;

providing a sacrificial layer on a portion of the dielectric layer, while leaving another portion of the dielectric layer exposed to form an exposed dielectric layer;

providing a bottom electrode on a portion of the sacrificial layer and on the exposed dielectric layer;

providing a piezoelectric layer on the bottom electrode;

providing a top electrode on the piezoelectric layer; and

removing the sacrificial layer.

15. The method as claimed in claim 14, further comprising providing a second dielectric layer on the top electrode.

16. The method as claimed in claim 15, further comprising adjusting a thickness of the second dielectric layer in accordance with a desired resonance frequency.

17. The method as claimed in claim 14, wherein the providing of the bottom electrode includes depositing a conductive material on the sacrificial layer and on the exposed dielectric layer, the conductive material on the exposed dielectric layer forming a base section and the conductive material on the sacrificial layer forming an overhanging section.

18. The method as claimed in claim 17, wherein the providing of the bottom electrode further includes partially removing the conductive material forming the base section, so that a width of the conductive material forming the base section is smaller than a width of the conductive material forming the overhanging section;

and

wherein the providing of the top electrode includes depositing another conductive material on the piezoelectric layer and on the exposed dielectric layer, and patterning the another conductive material on the dielectric layer so that the top electrode includes a pad positioned in an area of the exposed dielectric layer where the conductive material forming the base section has been removed, the pad being spaced from the conductive material remaining in the base section.

19. The method as claimed in claim 18, wherein the providing of the piezoelectric layer further includes depositing a piezoelectric material on the bottom electrode and on the exposed dielectric layer and patterning the piezoelectric material on the exposed dielectric layer to include a portion of piezoelectric material in an area of the exposed dielectric layer where the conductive material forming the base section has been removed and separate from an area of the dielectric layer in which the pad is to be formed.

20. The method as claimed in claim 14, wherein the removing of the sacrificial layer forms an air gap between the bottom electrode and the dielectric layer.

21. The method as claimed in claim 14, wherein an upper surface of the sacrificial layer is higher than an upper surface of the dielectric layer.

22. The method as claimed in claim 14, further comprising, before the providing of the dielectric layer, forming a cavity on the substrate.

23. The method as claimed in claim 22, wherein the providing of the sacrificial layer includes filling the cavity with a sacrificial material.