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Sensing film material

  • US 7,281,407 B2
  • Filed: 06/16/2005
  • Issued: 10/16/2007
  • Est. Priority Date: 01/11/2003
  • Status: Expired due to Fees
First Claim
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1. A film thickness sensor for sensing a property of a film of material, the sensor comprising first and second electrodes spaced to define a gap therebetween, the film of material being located within the gap, during use, characterised in that the width of the gap is different at different positions on the electrode members whereby the sensing characteristics of the sensor are different at different positions on the electrode members.

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