Transfer chamber for cluster system

• US 7,282,460 B2
• Filed: 06/02/2004
• Issued: 10/16/2007
• Est. Priority Date: 06/02/2003
• Status: Active Grant

• Current Assignee: Jusung Engineering Company Limited
• Original Assignee: Jusung Engineering Company Limited
• Inventors: Jang, Geun-Ha
• Primary Examiner(s): COLEMAN, WILLIAM D
• Application Number:
  US10/859,893
• Publication Number:
  US 20040240983A1
• Time in Patent Office: 1,231 Days
• Field of Search: 438/800, 414/217, 414/220, 342/87
• US Class Current: 438/800
• CPC Class Codes: H01L 21/67196 characterized by the construction of the transfer chamber

Abstract

A transfer chamber for a cluster system includes a first body, a second body attached at one side of the first body, and a cover combined with an upper portion of the first body. The transfer chamber further includes a third body at another side of the first body, wherein the third body has the same shape as the second body.

Claims

1. A transfer chamber for a cluster system, comprising:

a first body of the transfer chamber;

a second body of the transfer chamber attached at one side of the first body; and

a cover combined with an upper portion of the first body;

wherein the first body has a parallelepiped shape.

2. The chamber according to claim 1, wherein the transfer chamber has a hexagonal pillar shape.

3. The chamber according to claim 1, wherein the first body is a rectangular parallelepiped.

4. The chamber according to claim 1, wherein the transfer chamber has an octagonal pillar shape.

5. The chamber according to claim 1, wherein an O-ring is interposed between the first body and the second body.

6. The chamber according to claim 1, wherein an O-ring is interposed between the first body and the cover.

7. The chamber according to claim 1, further comprising a third body at another side of the first body facing the second body.

8. The chamber according to claim 3, wherein the second body has a triangular prism shape.

9. The chamber according to claim 3, wherein the second body has a square pillar shape.

10. The chamber according to claim 9, wherein upper and lower sides of the second body have a trapezoid shape.

11. The chamber according to claim 7, wherein the third body has the same shape as the second body.