Microdevice having an annular lining for producing an electrospray emitter

• US 7,282,705 B2
• Filed: 12/19/2003
• Issued: 10/16/2007
• Est. Priority Date: 12/19/2003
• Status: Expired due to Fees

• Current Assignee: Agilent Technologies, Inc.
• Original Assignee: Agilent Technologies, Inc.
• Inventors: Brennen, Reid A.
• Primary Examiner(s): Berman; Jack I.
• Application Number:
  US10/741,901
• Publication Number:
  US 20050133713A1
• Time in Patent Office: 1,397 Days
• Field of Search: 250/288, 137/833, 137/827, 210/243, 210/656, 210/748, 204/600, 204/601, 239/690, 422/68.1, 436/173
• US Class Current: 250/288
• CPC Class Codes: B81B 1/00 Devices without movable or flexible elements, e.g. microcapillary devices
• CPC Class Codes: G01N 30/6095 Micromachined or nanomachined, e.g. micro- or nanosize
• CPC Class Codes: G01N 30/7266 by electric field, e.g. electrospray
• CPC Class Codes: H01J 49/167 Capillaries and nozzles specially adapted therefor; electrostatic spraying per se B05B5/00
• CPC Class Codes: Y10T 137/2191 By non-fluid energy field affecting input [e.g., transducer]
• CPC Class Codes: Y10T 137/2224 Structure of body of device

Abstract

A microdevice is constructed from a substrate having a microchannel formed therein and a cover plate arranged over the substrate. The cover plate in combination with the microchannel at least partially defines a conduit within the microdevice. The conduit has a surface that extends from an upstream region toward a downstream region and terminates at an opening. The microdevice also includes an annular lining that conforms to the conduit surface at the downstream region and extends from the opening toward the upstream region in the conduit. An emitter may be produced in situ by depositing an emitter material on the annular lining. In addition, material may be removed from the cover plate and/or substrate about the opening. As a result, an exterior microdevice surface is formed and a downstream portion of the emitter is exposed that protrudes from the exterior surface.

Claims

1. A microdevice comprising:

a substrate having a microchannel formed therein;

a cover plate arranged over the substrate such that the cover plate in combination with the microchannel at least partially defines a conduit within the microdevice, wherein the conduit has a surface that extends from an upstream region toward a downstream region and terminates at an opening; and

an annular lining that conforms to the conduit surface at the downstream region and extends from the opening toward the upstream region in the conduit.

2. The microdevice of claim 1, wherein the annular lining has a thickness of no more than about 10 micrometer.

3. The microdevice of claim 1, wherein the annular lining extends from the opening conformingly along the conduit surface for at least about 100 micrometers.

4. The microdevice of claim 3, wherein the annular lining extends from the opening conformingly along the conduit surface for at least about 1 millimeter.

5. The microdevice of claim 1, wherein the annular lining is comprised of an electrically conductive material.

6. The microdevice of claim 5, wherein the electrically conductive material is comprised of a metal.

7. The microdevice of claim 5, wherein the electrically conductive material is comprised of a polymer.

8. The microdevice of claim 1, further comprising an integrated emitter in the downstream region of the conduit.

9. The microdevice of claim 8, wherein the emitter is produced in situ by depositing an emitter material on the annular lining.

10. The microdevice of claim 9, wherein the emitter material is comprised of a metal.

11. The microdevice of claim 10, wherein the emitter has an exposed downstream portion that protrudes from an exterior surface of the cover plate and/or the substrate.

12. The microdevice of claim 8, wherein the emitter has a wall thickness of no more than about 100 micrometers.

13. The microdevice of claim 1, wherein the annular lining has an exposed downstream portion that protrudes from an exterior surface of the cover plate and/or the substrate and serves as an integrated emitter.

14. The device of claim 1, wherein the substrate and/or cover plate are comprised of a biofouling resistant material.

15. The device of claim 1, wherein the substrate and/or cover plate are comprised of an electrically insulating material.

16. The device of claim 15, wherein the electrically insulating material is a polymeric material.

17. The device of claim 16, wherein the polymeric material is selected from the group consisting of polyimides and polyketones.

18. The device of claim 16, wherein the material is selected from the group consisting of polycarbonates, polyesters, polysulfones, polyamides, polyethers, polyurethanes, polyfluorocarbons, polystyrenes, polyacrylonitriles, polybutadienes, polystyrenes, acrylate and acrylic acid polymers, polyolefins, silicones, mixtures thereof and copolymers of any of the foregoing.

19. The device of claim 15, wherein the electrically insulating material is a glass and/or ceramic material.

20. The device of claim 1, wherein the substrate and/or cover plate are comprised of an electrically conductive material.

21. A method for producing a microdevice, comprising:

(a) depositing a surface-conforming material on a cover plate and in a microchannel formed in a substrate; and

(b) arranging the cover plate over the substrate such that the cover plate in combination with the microchannel at least partially defines a conduit having a surface extending from an upstream region toward a downstream region and terminates at an opening, and the material deposited in step (a) forms an annular lining that conforms to the conduit surface at the downstream region and extends from the opening toward the upstream region in the conduit.

22. The method of claim 21, wherein step (a) is carried out through a vapor phase deposition technique.

23. The method of claim 22, wherein the vapor phase deposition technique is selected from the group consisting of evaporation and sputtering.

24. The method of claim 21, further comprising, after step (b), (c) depositing an emitter material on the annular lining, thereby producing an integrated emitter in situ.

25. The method of claim 24, wherein step (c) is carried out through electrodeposition of the emitter material onto the annular lining.

26. The method of claim 25, wherein the emitter material is electroplated onto the annular lining.

27. The method of claim 24, wherein step (c) is carried out through electroless deposition of the emitter material onto the annular lining.

28. A method for producing a microdevice, comprising:

(a) providing a microdevice comprised of

a substrate having a microchannel formed thereon,

a cover plate arranged over the substrate such that the cover plate in combination with the microchannel at least partially defines a conduit within the microdevice, wherein the conduit has a surface that extends from an upstream region toward a downstream region and terminates at an opening, and

an integrated emitter that is located within the conduit and conforms to the conduit surface at the downstream region; and

(b) removing material from the cover plate and/or substrate about the opening, thereby forming an exterior microdevice surface and exposing a downstream portion of the emitter that protrudes from the exterior surface.

29. The method of claim 28, wherein step (b) is carried out through laser ablation.

30. The method of claim 28, wherein step (b) is carried out through reactive ion etching.

31. The method of claim 28, wherein step (b) is carried out through wet or dry chemical etching.

32. The method of claim 28, wherein step (b) is carried out through application of heat.