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Maintenance unit for a sensor apparatus

  • US 7,282,889 B2
  • Filed: 07/10/2004
  • Issued: 10/16/2007
  • Est. Priority Date: 04/19/2001
  • Status: Expired due to Fees
First Claim
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1. A maintenance unit for maintaining and storing a sensor apparatus configured for measuring process conditions for processing a workpiece, the maintenance unit comprising:

  • a housing configured for holding the workpiece, the housing being configured for enclosing the sensor apparatus;

    an information processor including executable code for managing and maintaining the sensor apparatus; and

    a communication device for information transfer with the sensor apparatus.

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