Multi-axis interferometers and methods and systems using multi-axis interferometers

• US 7,283,248 B2
• Filed: 01/06/2005
• Issued: 10/16/2007
• Est. Priority Date: 01/06/2004
• Status: Expired due to Fees

• Current Assignee: Zygo Corporation (Ametek Incorporated)
• Original Assignee: Zygo Corporation (Ametek Incorporated)
• Inventors: Hill, Henry A.
• Primary Examiner(s): LEE, HWA S
• Application Number:
  US11/030,755
• Publication Number:
  US 20050146727A1
• Time in Patent Office: 1,013 Days
• Field of Search: 356/493, 356/498, 356/487, 356/486, 356/500, 356/510
• US Class Current: 356/498
• CPC Class Codes: G01B 2290/15 Cat eye, i.e. reflection always parallel to incoming beam
• CPC Class Codes: G01B 2290/70 Using polarization in the interferometer
• CPC Class Codes: G01B 9/02018 Multipass interferometers, e.g. double-pass
• CPC Class Codes: G01B 9/02019 contacting different points on same face of object
• CPC Class Codes: G01B 9/02028 Two or more reference or object arms in one interferometer
• CPC Class Codes: G01B 9/02058 by particular optical compensation or alignment elements, e.g. dispersion compensation
• CPC Class Codes: G01B 9/02061 Reduction or prevention of effects of tilts or misalignment

Abstract

In general, in one aspect, the invention features an apparatus including a multi-axis interferometer configured to produce at least three output beams each including interferometric information about a distance between the interferometer and a measurement object along a corresponding measurement axis, wherein at least three of the measurement axes are in a common plane, wherein the output beams each include a component that makes a pass to the measurement object along a common beam path.

Claims

1. An apparatus, comprising:

a multi-axis interferometer configured to produce at least three output beams each including interferometric information about a distance between the interferometer and a measurement object along a corresponding measurement axis, wherein at least three of the measurement axes are in a common plane,

wherein the output beams each include a component that makes a pass to the measurement object along a common beam path.

2. The apparatus of claim 1, wherein the at least three measurement axes are parallel.

3. The apparatus of claim 1, further comprising an electronic processing system coupled to the multi-axis interferometer, wherein the electronic processing system is configured to calculate a value for a second difference parameter (SDP) for the measurement object based on distance between the interferometer and the measurement object along the three measurement axes.

4. The apparatus of claim 3, wherein the SDP is given by the expression (x₂-x₁)−

η

(x₃-x₂), where x_i corresponds to the distance between the interferometry system and the measurement object for the i^th measurement axis and η

is a non-zero constant.

5. The apparatus of claim 4, wherein η

is selected so that the value for the expression is not sensitive to second order to rotation of the measurement object about an axis orthogonal to the common plane.

6. The apparatus of claim 3, wherein the electronic processor is configured to calculate a value for the SDP for each of multiple positions of the measurement object relative to the interferometer along an axis orthogonal to the measurement axes and determine information about a surface figure for the measurement object based on the multiple values.

7. The apparatus of claim 6, wherein the electronic processor is configured to monitor a position of the measurement object based on at least some of the interferometric information from the three output beams.

8. The apparatus of claim 7, wherein the electronic processor is further configured to use the information about the surface figure to improve the accuracy the monitored position.

9. The apparatus of claim 1, wherein the multi-axis interferometer is further configured to produce one or more additional output beams each including interferometric information about a distance between the interferometer and the measurement object along a corresponding measurement axis, wherein the measurement axes corresponding to the additional output beams are not coplanar with the at least three measurement axes.

10. The apparatus of claim 9, wherein the measurement axes corresponding to the additional output beams are parallel to the at least three measurement axes.

11. The apparatus of claim 1, further comprising a microlithography tool configured to expose a substrate with radiation passing through a mask, wherein the multi-axis interferometer is configured to provide information about a position of the substrate within the microlithography tool.

12. The apparatus of claim 11, wherein the measurement object is mechanically coupled to a wafer stage configured to support the wafer.

13. The apparatus of claim 11, wherein the multi-axis interferometer is mechanically coupled to a wafer stage configured to support the wafer and the measurement object is mechanically coupled to a rigid frame of the microlithography tool.

14. The apparatus of claim 1, further comprising a microlithography tool configured to expose a substrate with radiation passing through a mask, wherein the multi-axis interferometer is configured to provide information about a position of the mask within the microlithography tool.

15. The apparatus of claim 14, wherein the measurement object is mechanically coupled to a mask stage configured to support the mask.

16. The apparatus of claim 15, wherein the multi-axis interferometer is mechanically coupled to a mask stage configured to support the mask and the measurement object is mechanically coupled to a rigid frame of the microlithography tool.

17. The apparatus of claim 1, wherein the multi-axis interferometer is configured to direct at least three beams to contact the measurement object at least once and combine each beam with another beam to produce the output beams.

18. The apparatus of claim 1, further comprising an electronic processor that derives information about the surface profile of the measurement object from the output beams as the measurement object is scanned relative to the multi-axis interferometer along a distance nonparallel to the measurement axes.

19. The apparatus of claim 18, wherein distance over which the measurement object is scanned is orthogonal to the measurement axes.

20. Apparatus comprising:

a multi-axis interferometer configured to produce at least three output beams each including interferometric information about a distance between the interferometer and a measurement object along a corresponding measurement axis; and

an electronic processing system coupled to the multi-axis interferometer, wherein the electronic processing system is configured to calculate a value for a second difference parameter (SDP) for the measurement object based on the distances between the interferometer and the measurement object along the at least three measurement axes.

21. The apparatus of claim 20, wherein the at least three measurement axes are in a common plane.

22. The apparatus of claim 20, wherein the at least three measurement axes are parallel.

23. The apparatus of claim 20, wherein the SDP is given by the expression (x₂-x₁)−

η

(x₃-x₂, where x_i corresponds to the distance between the interferometry system and the measurement object for the i^th measurement axis and η

is a non-zero constant.

24. The apparatus of claim 20, wherein the at least three output beams each include a component that makes one pass to the measurement object along a common measurement beam path.

25. The apparatus of claim 20, wherein the electronic processor is configured to calculate the value for the SDP for each of multiple positions of the measurement object relative to the interferometer along an axis non-parallel to the measurement axes and determine information about a surface figure for the measurement object based on the multiple values.

26. The apparatus of claim 25, wherein the electronic processor is configured to monitor a position of the measurement object based on at least some of the interferometric information from the at least three output beams.

27. The apparatus of claim 26, wherein the electronic processor is further configured to use the information about the surface figure to improve the accuracy the monitored position.

28. The apparatus of claim 20, further comprising a microlithography tool configured to expose a substrate with radiation passing through a mask, wherein the multi-axis interferometer is configured to provide position information about the substrate or the mask.

29. An apparatus, comprising:

a multi-axis interferometer configured to produce at least three output beams each including interferometric information about a distance between the interferometer and a measurement object along a corresponding measurement axis, wherein the output beams each include a component that makes one pass to the measurement object along a common measurement beam path; and

an electronic processor configured to derive information about the surface figure profile of the measurement object from the output beams as the measurement object is scanned relative to the interferometry system along a distance non-parallel to the measurement axes.

30. The apparatus of claim 29, wherein the at least three measurement axes are in a common plane.

31. The apparatus of claim 29, wherein the at least three measurement axes are parallel.

32. The apparatus of claim 29, wherein distance over which the measurement object is scanned is orthogonal to the measurement axes.

33. The apparatus of claim 29, wherein the electronic processor is configured to monitor a position of the measurement object based on at least some of the interferometric information from the three output beams.

34. The apparatus of claim 33, wherein the electronic processor is further configured to use the information about the surface figure profile to improve the accuracy the monitored position.

35. The apparatus of claim 29, further comprising a microlithography tool configured to expose a substrate with radiation passing through a mask, wherein the interferometer is configured to provide position information about the substrate or the mask.

36. An apparatus, comprising:

a multi-axis interferometer configured to produce at least three output beams each including interferometric information about a distance between the interferometer and a measurement object along a corresponding measurement axis; and

an electronic processing system coupled to the multi-axis interferometer, wherein the electronic processing system is configured to calculate a value for an expression related to a second spatial derivative of a surface figure profile of the measurement object based on the distances between the interferometer and the measurement object along the at least three measurement axes.

37. The apparatus of claim 36, wherein the expression is a second difference parameter (SDP).

38. A method, comprising:

producing at least three output beams each including interferometric information about a distance between the interferometer and a measurement object along a corresponding measurement axis;

calculating a value for a second difference parameter (SDP) for the measurement object based on the distances between the interferometer and the measurement object along the at least three measurement axes; and

outputting a signal based on the calculated value.

40. The method of claim 38, wherein outputting the signal comprises deriving information about a surface figure profile of the measurement object from calculated value of the SDP.

41. The method of claim 40, further comprising using the interferometer to monitor the position of the measurement object while changing the relative position between the interferometer and the measurement object based on the surface figure profile.

39. A method, comprising:

producing at least three output beams each including interferometric information about a distance between the interferometer and a measurement object along a corresponding measurement axis, wherein the output beams each include a component that makes one pass to the measurement object along a common measurement beam path; and

deriving information about the surface figure profile of the measurement object from the output beams as the measurement object is scanned relative to the interferometry system along a distance non-parallel to the measurement axes; and

outputting a signal based on the calculated value.

42. The method of claim 39, further comprising using the interferometer to monitor the position of the measurement object while changing the relative position between the interferometer and the measurement object based on the surface figure profile.