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Wireless substrate-like sensor

  • US 7,283,255 B2
  • Filed: 03/01/2006
  • Issued: 10/16/2007
  • Est. Priority Date: 02/06/2002
  • Status: Expired due to Fees
First Claim
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1. A wireless substrate-like sensor assembly used to perform calibration of a semiconductor processing system, the sensor assembly comprising:

  • a wireless substrate-like sensor including;

    a processor;

    an internal power source; and

    an image acquisition system;

    a holster adapted to mechanically couple to the sensor to store the sensor when not in use;

    an automatic calibration target including;

    at least four target indicia, wherein the at least four target indicia are related to one another through a known relationship; and

    wherein the automatic calibration target is mountable to at least one station of the system; and

    wherein the sensor is adapted to provide location information relative to at least one automatic calibration target in at least two degrees of freedom.

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