Robust micromachined gyroscopes with two degrees of freedom sense-mode oscillator

• US 7,284,430 B2
• Filed: 08/15/2005
• Issued: 10/23/2007
• Est. Priority Date: 08/15/2005
• Status: Active Grant

• Current Assignee: Regents of the University of California (University of California)
• Original Assignee: Regents of the University of California (University of California)
• Inventors: Acar, Cenk, Shkel, Andrei M.
• Primary Examiner(s): CHAPMAN JR, JOHN E
• Application Number:
  US11/204,900
• Publication Number:
  US 20070034005A1
• Time in Patent Office: 799 Days
• Field of Search: 735/041.2, 735/041.4
• US Class Current: 73/504.12
• CPC Class Codes: G01C 19/5719 using planar vibrating masses driven in a translation vibration along an axis

Abstract

A three-degrees of freedom (DOF) MEMS inertial micromachined gyroscope with nonresonant actuation with a drive direction, sense direction and a direction perpendicular to the drive and sense directions comprises a planar substrate, a 2-DOF sense-mode oscillator coupled to the substrate operated at a flattened wide-bandwidth frequency region, and a 1-DOF drive mode oscillator coupled operated at resonance in the flattened wide-bandwidth frequency region to achieve large drive-mode amplitudes.

Claims

1. A three-degrees of freedom (DOF) MEMS inertial micromachined gyroscope with a drive direction, a sense direction, and a direction perpendicular to the drive and sense directions comprising:

a 2-DOF sense-mode oscillator means having a frequency response curve with two resonant peaks in a sense mode, the 2-DOF sense-mode oscillator means for operating at a frequency in a generally flat region of a frequency response curve of the 2-DOF sense mode oscillator means between the two resonant peaks of the frequency response curve;

a 1-DOF drive-mode oscillator means for operating at resonance in a drive mode at a frequency in the flat region of the frequency response curve of the 2-DOF sense mode oscillator means to achieve amplified drive-mode amplitudes; and

a planar substrate on which the 2-DOF sense-mode oscillator means and the 1-DOF drive mode oscillator means are disposed.

2. The gyroscope of claim 1 where the 2-DOF sense-mode oscillator means is comprised of two weakly coupled masses free to vibrate in two dimensions relative to the substrate in the sense mode.

3. The gyroscope of claim 1 where the 1-DOF drive-mode oscillator means comprises two weakly coupled masses together with a decoupling frame to which the two weakly coupled masses are in turn coupled, which masses and frame move together in the drive mode and which masses move independently of the frame and each other in the sense mode.

4. The gyroscope of claim 1 where the drive-mode oscillator means comprises a first mass and a frame structure coupled to the substrate and constrained to vibrate only in the drive direction relative to the substrate in the drive mode, where the first mass is also included within the sense-mode oscillator means and is coupled to the frame structure and is constrained to vibrate only in the sense direction with respect to the frame structure to minimize quadrature error and undesired electrostatic forces in the sense-mode due to drive-mode actuator imperfections.

5. The gyroscope of claim 4 where the 2-DOF sense-mode oscillator means is further comprised of a second mass, and where the 1-DOF drive-mode oscillator means is comprised of the frame structure, first mass and second mass, the frame structure, first and second masses vibrating together in the drive direction in the drive mode at a single peak resonance.

6. The gyroscope of claim 1 where the 2-DOF sense-mode oscillator means and the 1-DOF drive-mode oscillator means are stiff in a direction perpendicular to a plane of the substrate.

7. The gyroscope of claim 1 where the 2 DOF sense-mode oscillator means with the generally flat operation region between the two resonance peaks in a frequency response curve of the 2-DOF sense-mode oscillator means comprises means for ensuring that the sense-mode response amplitude and phase are insensitive to parameter fluctuations, resulting in robustness to residual stresses, variations in dimensions or material properties, and thermal fluctuations throughout operation time.

8. A method of operating a three-degrees of freedom (DOF) MEMS inertial micromachined gyroscope comprising:

driving a 1-DOF drive-mode oscillator in a drive mode in a drive direction at resonance to achieve amplified drive-mode amplitudes; and

simultaneously sensing motion of a 2-DOF sense-mode oscillator in a sense mode in a sense direction, the 2-DOF sense-mode oscillator having a frequency response curve with two resonance peaks and a generally flat region therebetween, the 2-DOF sense-mode oscillator being sensed in the generally flat frequency region between the two resonance peaks.

9. The method of claim 8 where driving the 1-DOF drive-mode oscillator comprises oscillating a second mass and oscillating a first mass in the drive direction in the drive mode, and constraining the second mass with respect to the first mass to oscillate relative to the first mass only in the sense direction in the sense mode, the first and second masses oscillating together in the drive direction in the drive mode at a single peak resonance.

10. The method of claim 8 further comprising:

oscillating a frame structure only in the drive direction in the drive mode relative to a substrate on which the frame is disposed;

where driving the 1-DOF drive-mode oscillator comprises oscillating a second mass, and oscillating a first mass, which second mass is constrained with respect to the first mass to oscillate relative to the first mass only in the sense direction in the sense mode, the first and second masses also oscillating together in the drive direction in the drive mode at a single peak resonance, and

where oscillating the first mass coupled to the frame structure only in the sense direction in the sense mode with respect to the frame structure minimizes quadrature error and undesired electrostatic forces in the sense-mode due to drive-mode actuator mperfections.

11. The method of claim 8 where the 2-DOF sense-mode oscillator and the 1-DOF drive mode oscillator are stiff in a direction perpendicular to a plane which defines a substrate on which the drive-mode and sense-mode oscillators are disposed, so that driving the 1-DOF drive-mode oscillator and sensing with a 2-DOF sense-mode oscillator are substantially all in a plane parallel to the substrate.

12. The method of claim 8 where sensing with the 2-DOF sense-mode oscillator in the generally flat frequency region comprises insuring that the sense-mode response amplitude and phase are insensitive to parameter fluctuations resulting in robustness to in residual stresses, variations in dimensions or material properties, and thermal fluctuations throughout operation time.

13. An inertial sensor comprising a MEMS micromachined gyroscope, the gyroscope comprising:

a two-degrees of freedom (2-DOF) sense-mode oscillator means for operating in a sense mode with a frequency response curve with two separate resonance peaks;

a 1-DOF drive-mode oscillator means for operating at a resonance frequency in a drive mode to achieve amplified drive-mode amplitudes; and

a planar substrate on which the 2-DOF sense-mode oscillator means and the 1-DOF drive-mode oscillator means are disposed,

wherein the gyroscope is configured to have the 2-DOF sense-mode oscillator means operating in a frequency region between the two resonance peaks in the frequency response curve of the 2-DOF sense-mode oscillator means, and

wherein the resonance frequency of the 1-DOF drive-mode oscillator means is also in said region between said two resonance peaks.

14. A three-degrees of freedom (DOF) MEMS inertial micromachined gyroscope with a drive direction, a sense direction, and a direction perpendicular to the drive and sense directions comprising:

a planar substrate;

a 2-DOF sense-mode oscillator disposed on the substrate and comprised of two weakly coupled masses free to vibrate in two dimensions relative to the substrate, the 2-DOF sense-mode oscillator having a frequency response curve with two resonant peaks and operating at a frequency in a flat region of its frequency response curve between the two resonant peaks of the frequency response curve;

a 1-DOF drive-mode oscillator disposed on the substrate and comprised of the two weakly coupled masses together with a decoupling frame to which the two weakly coupled masses are in turn coupled, which masses and frame move together in the drive mode and which masses move independently of the frame and each other in the sense mode, the drive-mode oscillator operating at resonance in a drive mode at a frequency in the flat region of the frequency response curve of the 2-DOF sense mode oscillator to achieve amplified drive-mode amplitudes.