Method for producing a pressure sensor for detecting small pressure differences and low pressures

• US 7,284,439 B2
• Filed: 12/15/2004
• Issued: 10/23/2007
• Est. Priority Date: 12/22/1997
• Status: Expired due to Term

• Current Assignee: MKS Instruments Incorporated
• Original Assignee: MKS Instruments Incorporated
• Inventors: Jonsson, Steffan
• Primary Examiner(s): NOORI, MAX H
• Application Number:
  US11/011,615
• Publication Number:
  US 20050262946A1
• Time in Patent Office: 1,042 Days
• Field of Search: 29/254.2, 295/95, 298/46, 298/57, 298/85, 737/15, 737/18, 737/24, 737/80, 361/283.4, 361/807, 361/821, 156/62.2, 156/89.11, 156/89.15, 264/605, 264/650, 264/662, 264671-673, 427127-131
• US Class Current: 73/724
• CPC Class Codes: G01L 13/025 using diaphragms
• CPC Class Codes: G01L 9/0073 using a semiconductive diaphragm
• CPC Class Codes: G01L 9/0075 using a ceramic diaphragm, e.g. alumina, fused quartz, glass

Abstract

A process for producing a plate for a capacitive sensor element. In one embodiment of the present invention, a method includes forming a plate from a substantially pure aluminum oxide slurry, heating the plate a first time in an oven to sinter the plate, cooling the plate after the heating step, heating the plate a second time to smooth the plate, and cooling the plate after the second heating.

Claims

1. A capacitive sensor element including:

a. a base plate comprising aluminum oxide ceramic material;

b. a ceramic plate comprising aluminum oxide ceramic material and a small amount of magnesium oxide, and arranged proximate to said base plate, said ceramic plate being substantially planar and having a peripheral edge, the peripheral edge of said ceramic plate being joined by a first edge seal to said base plate in such a way that a reference cavity is created between said base plate and said ceramic plate, said ceramic plate having first and second opposing surfaces, the first surface of said ceramic plate facing said base plate, and said base plate having a sufface facing said ceramic plate, said ceramic plate having a diameter of approximately 38 mm, and said ceramic plate having a thickness of 50 μ

m or less, said ceramic plate being composed of a material having a mean grain size that is approximately 2 μ

m, and said ceramic plate having a cross-section including at least 2 grains thereacross;

c. a front plate comprising aluminum oxide ceramic material and located opposite said ceramic plate, said front plate being joined to the peripheral edge of said ceramic plate by a second edge seal, said front plate together with said ceramic plate forming a measurement vacuum chamber, said front plate including a port for connecting the sensor element to a medium to be measured;

d. said base plate, said front plate, and said ceramic plate being symmetrically and tightly connected along the peripheral edge of said ceramic plate; and

e. an electrically-conductive material coated upon the first surface of said ceramic plate and coated upon the surface of said base plate to constitute the measuring capacitance, the electrically-conductive material coated upon the first surface of said ceramic plate being arranged at a distance of substantially 20-50 μ

m from the electrically conductive material coated upon the base plate, having a larger diameter than the electrically-conductive material coated upon the base plate, and not contacting or overlapping the first edge seal.

2. A sensor element according to claim 1 wherein the electrically conductive material coated upon the ceramic plate and the electrically conductive material coated upon the base plate, and which constitute the measurement capacitance are arranged at a distance of substantially 20 μ

m from each other.

3. A sensor element according to claim 1 where the mean grain size diameter of the ceramic plate material is approximately 2 μ

m.

4. A sensor element according to claim 1 wherein the ceramic plate includes at least 5 grains across the thickness of the cross-section thereof.

5. A sensor element according to claim 1 wherein the ceramic plate across its entire surface is substantially plane parallel.

6. A sensor element according to claim 1 where the contacts to the electrically conductive layers are led out through sealed through holes on the base plate.

7. A sensor element according to claim 1 where on or in the base plate a volume for an accommodating getter is provided which features a connection to the reference cavity and where the volume is sealingly tightly closed with a getter lid.

8. A sensor element according to claim 7 where the getter is of the “

non-evaporating”

type.

9. A sensor element according to claim 7 where the getter within the volume is pressed by means of a spring against the getter lid.

10. A sensor element according to claim 1 where the pressure in the reference cavity is approximately zero.

11. A capacitive sensor element including:

a. a base plate comprising aluminum oxide ceramic material;

b. a shielding plate arranged proximate to the base plate, the shielding plate being substantially planar and having a peripheral edge that is joined by a first edge seal to the base plate in such a way that a first cavity is created between the base plate and the shielding plate, the shielding plate having first and second opposing surfaces, the first surface of the shielding plate facing the base plate, and the base plate having a surface facing the shielding plate;

c. a ceramic plate comprising aluminum oxide ceramic material and arranged proximate to the shielding plate, the ceramic plate being substantially planar and having a peripheral edge, the peripheral edge of the ceramic plate being joined by a second edge seal to the shielding plate in such a way that a second cavity is created between the shielding plate and the ceramic plate, the ceramic plate having first and second opposing surfaces, the first surface of the ceramic plate facing the second surface of the shielding plate;

d. a front plate comprising aluminum oxide ceramic material and located opposite the second surface of the ceramic plate, the front plate being joined to the peripheral edge of the ceramic plate by a third edge seal, the front plate together with the ceramic plate forming a chamber, the front plate including a port for connecting the sensor element to a medium to be measured;

e. the base plate, the front plate, the shielding plate, and the ceramic plate being symmetrically and tightly connected along the peripheral edges thereof;

f. a first electrically-conductive material coated upon the surface of the base plate facing the shielding plate and a second electrically-conductive material coated upon the first surface of the shielding plate, the first electrically-conductive material and the second electrically-conductive material forming a reference capacitor, and arranged at a distance of substantially 20-50 μ

m; and

g. a third electrically-conductive material coated upon the first surface of the ceramic plate and a fourth electrically-conductive material coated upon the second surface of the shielding plate, the third electrically-conductive material and the fourth electrically-conductive material forming a measurement capacitor, and arranged at a distance of substantially 20 μ

m.

12. A sensor element according to claim 11, wherein the ceramic plate comprises a small amount of magnesium oxide.

13. A sensor element according to claim 11 wherein the shielding plate comprises a diameter of approximately 38 mm.

14. A sensor element according to claim 11 wherein the base plate and the shielding plate have a through-hole, the cross-sectional areas of which are small portions of the total area of the respective plates.

15. A sensor element according to claim 11 wherein on or in the base plate a through hole accommodates a getter connected to the first cavity and the second cavity.

16. A sensor element according to claim 15 wherein the getter comprises a lid.

17. A sensor element according to claim 15 wherein the getter is of the non-evaporating type.

18. A sensor element according to claim 11 wherein the ceramic plate comprises a diameter of approximately 38 mm, and a thickness of 50 μ

m or less.

19. A sensor element according to claim 11 wherein the ceramic plate comprises a mean grain size that is approximately 2 μ

m, and across-section including at least 2 grains thereacross.

20. A sensor element according to claim 11 wherein, the second electrically-conductive material has a larger diameter than the first electrically-conductive material, and does not contact or overlap the first edge seal.

21. A sensor element according to claim 11 wherein, the fourth electrically-conductive material has a larger diameter than the third electrically-conductive material, and does not contact or overlap the second edge seal.