Micro-pump

• US 7,284,966 B2
• Filed: 10/01/2003
• Issued: 10/23/2007
• Est. Priority Date: 10/01/2003
• Status: Expired due to Fees

• Current Assignee: Agency For Science Technology and Research (Government of Singapore)
• Original Assignee: Agency For Science Technology and Research (Government of Singapore)
• Inventors: Xu, Guolin, Ting, Dor Ngi, Saw, Lin Kiat
• Primary Examiner(s): Koczo, Jr.; Michael
• Application Number:
  US10/676,601
• Publication Number:
  US 20050074340A1
• Time in Patent Office: 1,483 Days
• Field of Search: 417/395, 417/413.1, 417/413.2
• US Class Current: 417/395
• CPC Class Codes: F04B 19/006 Micropumps F04B43/043 and F04B43/095 take precedence
• CPC Class Codes: F04B 43/0054 particularities of the flexible members
• CPC Class Codes: F04B 43/046 with piezoelectric drive
• CPC Class Codes: F04B 43/06 Pumps having fluid drive
• CPC Class Codes: F04B 53/106 the valve being a membrane

Abstract

A micro-pump having a first layer, a second layer and an intermediate flexible layer is disclosed. The first layer and second layer may be of moldable plastics. The intermediate layer may be a substantially flat PDMS membrane layer having an inlet hole and an outlet hole. The first layer and the second layer are disposed on either side of the intermediate layer to define a pumping chamber that encloses an actuatable portion of the intermediate layer and valve seats that abut the inlet hole and the outlet hole of the intermediate layer. The actuatable portion is moveable to increase and reduce the volume of the pumping chamber to allow pressure to lift the respective intermediate layer portions surrounding the inlet hole and the outlet hole to thereby draw fluid and expel fluid from the pumping chamber respectively.

Claims

1. A micro-pump comprising:

a first layer having;

an inlet recess;

an inlet channel in fluid communication with the inlet recess; and

an outlet channel;

a second layer having;

an outlet; and

an inlet;

wherein the first layer and the second layer are disposed such that the inlet is opposite the inlet recess and at least a portion of the outlet channel is opposite an outlet recess and wherein at least one of the first layer and the second layer includes a pumping chamber in fluid communication with the inlet channel and the outlet channel; and

a third intermediate flexible layer having;

an inlet slit and an outlet slit positioned therein;

an actuatable portion abutting the pumping chamber;

a first valve portion adjacent the inlet slit, wherein the first valve portion is disposed over the inlet to block fluid passage between the inlet and the inlet recess and wherein the first valve portion is moveable away from the inlet in response to a first actuation of the actuatable portion to allow the inlet to be in fluid communication with the inlet recess through the inlet slit; and

a second valve portion adjacent the outlet slit, wherein the second valve portion is disposed between the outlet channel and the outlet so as to block fluid passage between the outlet channel and the outlet and wherein the second valve portion is moveable away from the outlet channel in response to a second actuation of the actuatable portion to allow the outlet channel to be in fluid communication with the outlet through the outlet slit;

wherein the inlet of the second layer comprises a recess surrounding a pedestal, the pedestal being in abutment with the inlet slit of the intermediate flexible layer; and

wherein a through-hole is defined in one of the first layer and the second layer to be in fluid communication with the pumping chamber.

2. A micro-pump according to claim 1, wherein the pumping chamber is defined by two respective pumping recesses in the first layer and the second layer, and wherein the actuatable portion of the intermediate flexible layer is arranged between the pumping recesses.

3. A micro-pump according to claim 1, wherein the outlet channel of the first layer comprises a recess surrounding a pedestal, the pedestal being in abutment with the outlet slit of the intermediate flexible layer.

4. A micro-pump according to claim 1 wherein the inlet slit and the outlet slit are respective through-holes in the intermediate flexible layer.

5. A micro-pump according to claim 1, wherein the intermediate flexible layer comprises a polymeric material.

6. A micro-pump according to claim 5, wherein the polymeric material is selected from the group consisting of polycarbonate, polyacrylic, polyoxymethylen, polyamide, polybutylenterephthalat and polyphenylenether.

7. A micro-pump according to claim 5, wherein the intermediate flexible layer is a membrane.

8. A micro-pump according to claim 7, wherein the membrane comprises a material selected from the group consisting of polydimethylsiloxane, MYLAR®

, polyurethane fluoride, and flourosilicone.

9. A micro-pump according to claim 1, wherein the intermediate flexible layer is a unitary layer.

10. A micro-pump according to claim 1, wherein the intermediate flexible layer is at least substantially flat.

11. A micro-pump according to claim 1, wherein the first layer and the second layer are molded.

12. A micro-pump comprising:

a first layer having;

an inlet recess;

an inlet channel in fluid communication with the inlet recess; and

an outlet channel;

a second layer having;

an outlet; and

an inlet;

wherein the first layer and the second layer are disposed such that the inlet is opposite the inlet recess and at least a portion of the outlet channel is opposite an outlet recess and wherein at least one of the first layer and the second layer includes a pumping chamber in fluid communication with the inlet channel and the outlet channel; and

a third intermediate flexible layer having;

an inlet slit and an outlet slit positioned therein;

an actuatable portion abutting the pumping chamber;

a first valve portion adjacent the inlet slit, wherein the first valve portion is disposed over the inlet to block fluid passage between the inlet and the inlet recess and wherein the first valve portion is moveable away from the inlet in response to a first actuation of the actuatable portion to allow the inlet to be in fluid communication with the inlet recess through the inlet slit; and

a second valve portion adjacent the outlet slit, wherein the second valve portion is disposed between the outlet channel and the outlet so as to block fluid passage between the outlet channel and the outlet and wherein the second valve portion is moveable away from the outlet channel in response to a second actuation of the actuatable .portion to allow the outlet channel to be in fluid communication. with the outlet through the outlet slit;

wherein the outlet channel of the first layer comprises a recess surrounding a pedestal, the pedestal being in abutment with the outlet slit of the intermediate flexible layer; and

wherein a through-hole is defined in one of the first layer and the second layer to be in fluid communication with the pumping chamber.