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Indium-tin oxide (ITO) film and process for its production

  • US 7,285,342 B2
  • Filed: 11/11/2004
  • Issued: 10/23/2007
  • Est. Priority Date: 05/12/2000
  • Status: Expired due to Term
First Claim
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1. A single layer indium-tin oxide (ITO) film for use as a transparent and conductive electrode on a substrate, comprising:

  • a single layer ITO film wherein the single layer has both;

    a) a specific resistance of less than 200 μ

    Ω

    cm andb) a surface roughness of less than 1 nm.

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