Probe current imaging
First Claim
Patent Images
1. A method, comprising:
- exposing one of a first probe and a second probe to a charged particle beam (CPB) of a charged particle beam device (CPBD); and
examining a current in at least one of the first and second probes, wherein the current is indicative of which of the first and second probes is exposed to the CPB.
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Abstract
A method including directing a first electrical signal to at least one of a plurality of probes each positioned within a chamber of a charged particle beam device. At least one of the plurality of probes is exposed to a charged particle beam of the charged particle beam device, and a second electrical signal is compared to the first electrical signal to determine a characteristic associated with the at least one of the plurality of probes.
79 Citations
20 Claims
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1. A method, comprising:
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exposing one of a first probe and a second probe to a charged particle beam (CPB) of a charged particle beam device (CPBD); and examining a current in at least one of the first and second probes, wherein the current is indicative of which of the first and second probes is exposed to the CPB. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9)
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10. A method, comprising:
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directing a first electrical signal to at least one of a plurality of probes each positioned within a chamber of a charged particle beam device (CPBD); exposing at least one of the plurality of probes to a charged particle beam (CPB) of the CPBD; and comparing a second electrical signal to the first electrical signal to determine a characteristic associated with the at least one of the plurality of probes. - View Dependent Claims (11, 12, 13, 14, 15, 16, 17, 18)
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19. An apparatus, comprising:
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means for directing a first electrical signal to at least one of a plurality of probes each positioned within a chamber of a charged particle beam device (CPBD); means for exposing at least one of the plurality of probes to a charged particle beam (CPB) of the CPBD; and means for comparing a second electrical signal to the first electrical signal to determine a characteristic associated with the at least one of the plurality of probes. - View Dependent Claims (20)
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Specification