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Siloxane epoxy polymers as metal diffusion barriers to reduce electromigration

  • US 7,285,842 B2
  • Filed: 04/27/2004
  • Issued: 10/23/2007
  • Est. Priority Date: 04/27/2004
  • Status: Active Grant
First Claim
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1. A structure comprisinga. a conductive layer comprising a conductive metal;

  • b. a diffusion barrier disposed onto a surface of said conductive layer, wherein said diffusion barrier comprises a first layer and a second layer, wherein said first layer is adjacent to said second layer and to said surface of said conductive layer, and wherein said first layer and said second layer are each independently selected from the group of siloxane epoxy polymers.

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