Method and system for constrained pixel graytones interpolation for pattern rasterization

• US 7,286,137 B2
• Filed: 02/28/2005
• Issued: 10/23/2007
• Est. Priority Date: 02/28/2005
• Status: Active Grant

• Current Assignee: ASML Holding NV
• Original Assignee: ASML Holding NV
• Inventors: Baba-Ali, Nabila
• Primary Examiner(s): Sajous; Wesner
• Application Number:
  US11/066,264
• Publication Number:
  US 20060192789A1
• Time in Patent Office: 967 Days
• Field of Search: 345/426, 345/428, 345/581, 345/586, 345/589, 345/592, 345/596, 345/606, 345/610, 345/616, 345/626, 345/640, 345/690, 345643-644, 345/204, 345/22, 345/48, 345/56, 345/61, 345/63, 345/84, 382/254, 382/274, 382/276, 382/300, 382/162, 382/167, 358/518, 358/525, 430/5, 430/7, 430/43, 359/237, 359242-246, 359/271, 359/277
• US Class Current: 345/606
• CPC Class Codes: G03F 7/70291 Addressable masks, e.g. spatial light modulators [SLMs], digital micro-mirror devices [DMDs] or liquid crystal display [LCD] patterning devices

Abstract

A method and system for preparing data to be used by a patterning device. The method including the following steps: a first set of graytones for a set of pixels is calculated, the first set of graytones corresponding to a center of a pattern being located at a first grid position, and a second set of graytones for the set of pixels is calculated, the second set of graytones corresponding to the center of the pattern being located at a second grid position. A plurality of sets of graytones for the set of pixels is linearly interpolated with constraints, from the first and second set of graytones, the plurality of sets of graytones corresponding to the pattern being shifted by a continuous shift-amount between the first grid position and the second grid position.

Claims

1. A method, comprising:

(a) calculating a first graytone for a pixel, the first graytone corresponding to a center of a pattern being located at a first grid position;

(b) calculating a second graytone for the pixel, the second graytone corresponding to the center of the pattern being located at a second grid position;

(c) linearly interpolating, with at least one constraint, a plurality of graytones for the pixel, each of the plurality of graytones corresponding to the center of the pattern being shifted by one of a plurality of shift-amounts between the first grid position and the second grid position; and

(d) controlling an actuation state of a patterning device based on the first graytone, the second graytone, and the plurality of graytones.

2. The method of claim 1, wherein step (d) comprises:

controlling at least one of a tilt angle, a phase angle, and a voltage of the patterning device based on the first, second, and plurality of graytones.

3. The method of claim 2, wherein the patterning device comprises

one of a tilting mirror, a phase-tilting mirror, a pistoning mirror, and a grating light valve.

4. The method of claim 1, wherein step (c) comprises:

(c1) determining a first subset of the plurality of graytones based on a first linear interpolation between the first grid position and a transition point; and

(c2) determining a second subset of the plurality of graytones based on a second linear interpolation between the transition point and the second grid position.

5. The method of claim 4, wherein

a slope of the first linear interpolation and a slope of the second linear interpolation are equal to one of zero and alpha, wherein alpha is equal to (1−

Att)/Wp, with Att being a maximum negative graytone amplitude and Wp being a width of the pixel.

6. The method of claim 5, wherein step (c) further comprises:

(c3) determining a location of the transition point based on the first graytone of the pixel, the second graytone of the pixel, and alpha.

7. The method of claim 5, wherein

the slope of the first linear interpolation is equal to zero and the slope of the second linear interpolation is equal to alpha, if at least one of the following is true,

(i) the first graytone is equal to one and the second graytone is greater than (1−

Att)/2, and

(ii) the first graytone is equal to Att and the second graytone is less than (1−

Att)/2.

8. The method of claim 5, wherein

the slope of the first linear interpolation is equal to alpha and the slope of the second linear interpolation is equal to zero, if at least one of the following is true,

(i) the first graytone is equal to one and the second graytone is less than (1−

Att)/2,

(ii) the first graytone is equal to Att and the second graytone is greater than (1−

Att)/2, and

(iii) the first graytone is different than one of one and Att.

9. A system, comprising:

a computing module that computes first and second graytones for a pixel, the first and second graytones corresponding to a center of a pattern being located at first and second grid positions, respectively;

an interpolator that linearly interpolates, with at least one constraint, a plurality of graytones for the pixel, each of the plurality of graytones corresponding to the center of the pattern being shifted by one of a plurality of shift-amounts between the first grid position and the second grid position; and

a converter configured to generate control signals based on the first graytone, the second graytone, and the plurality of graytones, wherein the control signals control an actuation state of a patterning device.

10. The system of claim 9, wherein the control signals control at least one of a tilt angle, a phase angle, and a voltage.

11. The system of claim 9, further comprising:

an illumination system that supplies a beam of radiation that impinges on the spatial light modulator, wherein the patterning device is configured to pattern the beam of radiation; and

a projection system that projects the patterned beam onto a target portion of an object.

12. The system of claim 11, wherein the object is one of a semiconductor wafer, a flat panel display glass substrate, or a display of a projection device.

13. The system of claim 9, wherein the interpolator determines (i) a first subset of the plurality of graytones based on a first linear interpolation between the first grid position and a transition point, and (ii) a second subset of the plurality of graytones based on a second linear interpolation between the transition point and the second grid position.

14. The system of claim 13, wherein

a slope of the first linear interpolation and a slope of the second linear interpolation are set equal to one of zero and alpha, wherein alpha is equal to (1−

Att)/Wp, with Att being a maximum negative amplitude and Wp being a width of the pixel.

15. The system of claim 14, wherein the interpolator determines a location of the transition point based on the first graytone, the second graytone, and alpha.

16. The system of claim 14, wherein

the slope of the first linear interpolation is equal to zero and the slope of the second linear interpolation is equal to alpha, if at least one of the following is true,

(i) the first graytone is equal to one and the second graytone is greater than (1−

Att)/2, and

(ii) the first graytone is equal to Att and the second graytone is less than (1−

Att)/2.

17. The system of claim 14, wherein

the slope of the first linear interpolation is equal to alpha and the slope of the second linear interpolation is equal to zero, if at least one of the following is true,

(i) the first graytone is equal to one and the second graytone is less than (1−

Att)/2,

(ii) the first graytone is equal to Att and the second graytone is greater than (1−

Att)/2, and

(iii) the first graytone is different than one of one and Att.

18. The system of claim 11, wherein the patterning device comprises one of a tilting mirror, a phase-tilting mirror, a pistoning mirror, and a grating light valve.