Apparatus and method for measuring eccentricity of aspherical surface

• US 7,286,212 B2
• Filed: 11/03/2004
• Issued: 10/23/2007
• Est. Priority Date: 11/07/2003
• Status: Expired due to Fees

• Current Assignee: Olympus Corporation
• Original Assignee: Olympus Corporation
• Inventors: Namiki, Mitsuru
• Primary Examiner(s): Toatley, Jr.; Gregory J.
• Assistant Examiner(s): Giglio; Bryan J
• Application Number:
  US10/979,165
• Publication Number:
  US 20050174566A1
• Time in Patent Office: 1,084 Days
• Field of Search: 356/124, 356/127
• US Class Current: 356/127
• CPC Class Codes: G01B 11/2408 for measuring roundness
• CPC Class Codes: G01M 11/025 by determining the shape of the object to be tested measuring contours or curvatures by optical means G01B11/24

Abstract

An apparatus for measuring the eccentricity of the aspherical surface has a light source unit; a condenser lens condensing light rays in the proximity of the center of paraxial curvature of a surface to be examined, of an aspherical lens; an angle changing means for entering the rays on the surface to be examined, at angles θ1i (i=1, 2, . . . , N) with an optical axis; a holding tool of the aspherical lens; a light-splitting element; an imaging lens; a light-detecting element detecting the situation of light collected by the imaging lens; and an arithmetical unit. The arithmetical unit is such as to calculate the amount of eccentricity of the surface to be examined, from amounts of shift ΔP1i (i=1, 2, . . . , N) between spot positions P1i (i=1, 2, . . . , N) based on the design data of the surface to be examined and spot positions P1mi (i=1, 2, . . . , N) derived from the light-detecting element, with respect to light rays Q1i (i=1, 2, . . . , N) produced by the angle changing means.

Claims

1. An apparatus for measuring eccentricity of an aspherical surface in which an amount of eccentricity of an aspherical lens is measured, the apparatus comprising:

a first light source unit;

a first condenser lens for condensing light rays emitted from the first light source unit in a proximity of a center of paraxial curvature of a first surface to be examined, of the aspherical lens;

a first angle changing means for entering the light rays on the first surface, at angles θ

1i (i =1, 2, . . . , N) with an optical axis;

a holding tool for holding the aspherical lens;

a first light-splitting element interposed between the first angle changing means and the holding tool;

a first imaging lens for collecting light reflected by the first light-splitting element;

a first light-detecting element for detecting a situation of light collected by the first imaging lens; and

an arithmetical unit, the arithmetical unit including the processes of;

storing spot positions P1mi(i=1, 2, . . . , N) derived from the first light-detecting element with respect to light rays Q1i(i=1, 2, . . . , N) produced by the first angle changing means;

calculating spot positions P1i(i=1, 2, . . . , N) relative to the light rays Q1i(i=1, 2, . . . , N) on the basis of design data of the first surface; and

calculating the amount of eccentricity of the first surface from amounts of shift Δ

P1i(i=1, 2, . . . , N) between the spot positions P1i(i=1, 2, . . . , N) and the spot positions P1mi(i=1, 2, . . . , N).

2. An apparatus for measuring eccentricity of an aspherical surface according to claim 1, further comprising:

a second light source unit placed on an opposite side of the first light source unit, with the holding tool being arranged between the first light source unit and the second light source unit;

a second condenser lens placed on the optical axis, for condensing light rays emitted from the second light source unit in the proximity of a center of paraxial curvature of a second surface to be examined, which is situated on an opposite side of the first surface;

a second angle changing means for entering the light rays emitted from the second light source unit on the second surface at angles θ

2i(i=1, 2, . . . , N) with the optical axis;

a second light-splitting element interposed between the second angle changing means and the holding tool;

a second imaging lens for collecting light reflected by the second light-splitting element; and

a second light-detecting element for detecting a situation of light collected by the second imaging lens,

wherein the arithmetical unit includes the processes of;

storing spot positions P2mi(i=1, 2, . . . , N) derived from the second light-detecting element with respect to light rays Q2i(i=1, 2, . . . , N) produced by the second angle changing means;

calculating spot positions P2i(i=1, 2, . . . , N) relative to the light rays Q2i(i=1, 2, . . . , N) on the basis of design data of the second surface;

calculating an amount of eccentricity of the second surface from amounts of shift Δ

P2i(i=1, 2, . . . , N) between the spot positions P2i(i=1, 2, . . . , N) and the spot positions P2mi(i=1, 2, . . . , N); and

calculating inter-surface eccentricity of the aspherical lens by using amounts of eccentricity of the first surface and the second surface.

5. An apparatus for measuring eccentricity of an aspherical surface according to claim 1,

wherein the arithmetical unit preliminarily has, from the design data of the first surface:

an inclination angle shift change function g_{A shift}(y) of the first surface, calculated from differences between the spot positions P1i(i=1, 2, . . . , N) of light rays Q1i′

(i=1, 2, . . . , N) reflected from the first surface where the first surface is free of eccentricity and spot positions P1_{A si}(i=1, 2, . . . , N) of the light rays Q1i′

(i=1, 2, . . . , N) where the first surface is positioned as displaced parallel with a direction perpendicular to the optical axis of the first condenser lens by an amount of a unit shift δ

_A0; and

an inclination angle tilt change function g_{A tilt}(y) of the first surface, calculated from differences between the spot positions P1i(i=1, 2, . . . , N) of the light rays Q1i′

(i=1, 2, . . . , N) where the first surface is free of eccentricity and spot positions P1_{A ti}(i=1, 2, . . . , N) of the light rays Q1i′

(i=1, 2, . . . , N) where the first surface positioned as rotationally displaced by an amount of a unit tilt ε

_A0 in a plane containing the optical axis of the first condenser lens,

wherein an inclination angle distribution of the first surface, which is calculated from the amounts of shift Δ

P1i(i=1, 2, . . . , N) of the spot positions of the light rays Q1i′

(i=1, 2, . . . , N) actually obtained by the light-detecting element, is expressed as a function g1(δ

_A, ε

_A, y)=α

g_{A shift}(y)+β

g_{A tilt}(y) in which the inclination angle shift change function g_{A shift}(y) and the inclination angle tilt change function g_{A tilt}(y), each of which is multiplied by a coefficient, are added and linearly combined so that amounts of shift and tilt (ε

_A, ε

_A)=(α

δ

_A0, β

ε

_A0) of the first surface are determined from the coefficients α and

β

.

6. An apparatus for measuring eccentricity of an aspherical surface according to claim 2,

wherein the arithmetical unit preliminarily has, from the design data of the first surface and the second surface:

an inclination angle shift change function g_{A shift}(y) of the first surface, calculated from differences between the spot positions P1i(i=1, 2, . . . , N) of light rays Q1i′

(i=1, 2, . . . , N) reflected from the first surface where the first surface is free of eccentricity and spot positions P1_{A si}(i=1, 2, . . . , N) of the light rays Q1i′

(i=1, 2, . . . , N) where the first surface is positioned as displaced parallel with a direction perpendicular to the optical axis of the first condenser lens by an amount of a unit shift δ

_A0;

an inclination angle tilt change function g_{A tilt}(y) of the first surface, calculated from differences between the spot positions P1i(i=1, 2, . . . , N) of the light rays Q1i′

(i=1, 2, . . . , N) where the first surface is free of eccentricity and spot positions P1_{A ti}(i=1, 2, . . . , N) of the light rays Q1i′

(i=1, 2, . . . , N) where the first surface is positioned as rotationally displaced by an amount of a unit tilt ε

_A0 in a plane containing the optical axis of the first condenser lens;

an inclination angle shift change function g_{B shift}(y) of the second surface, calculated from differences between the spot positions P2i(i=1, 2, . . . , N) of light rays Q2i′

(i=1, 2, . . . , N) reflected from the second surface where the second surface is free of eccentricity and spot positions P2_{B si}(=1, 2, . . . , N) of the light rays Q2i′

(i=1, 2, . . . , N) where the second surface is positioned as displaced parallel with a direction perpendicular to the optical axis of the second condenser lens by an amount of a unit shift δ

_B0; and

an inclination angle tilt change function g_{B tilt}(y) of the second surface, calculated from differences between the spot positions P2i(i=1, 2, . . . , N) of the light rays Q2i′

(i=1, 2, . . . , N) where the second surface is free of eccentricity and spot positions P2_{B ti}(i=1, 2, . . . , N) of the light rays Q2i′

(i=1, 2, . . . , N) where the second surface is positioned as rotationally displaced by an amount of a unit tilt ε

_B0 in a plane containing the optical axis of the second condenser lens,

wherein an inclination angle distribution of the first surface, which is calculated from the amounts of shift Δ

P1i(i=1, 2, . . . , N) of the spot positions of the light rays Q1i′

(i=1, 2, . . . , N) actually obtained by the light-detecting element, is expressed as a function g1(δ

_A, ε

_A, y)=α

g_{A shift}(y)+β

g_{A tilt}(y) in which the inclination angle shift change function g_{A shift}(y) and the inclination angle tilt change function g_{A tilt}(y), each of which is multiplied by a coefficient, are added and linearly combined so that amounts of shift and tilt (δ

_A, ε

_A)=(α

δ

_A0) of the first surface are determined from the coefficients α and

β

, and

wherein an inclination angle distribution of the second surface, which is calculated from the amounts of shift Δ

P2i(i=1,2,. . . , N) of the spot positions of the light rays Q2i′

(i=1, 2, . . . , N) actually obtained by the second light-detecting elements, is expressed as a function g1(δ

_B, ε

_B, y)=α

′

g_{B shift}(y)+β

′

g_{B tilt}(y) in which the inclination angle shift change function g_{B shift}(y) and the inclination angle tilt change function g_{B tilt}(y), each of which is multiplied by a coefficient, are added and linearly combined so that amounts of shift and tilt (δ

_B, δ

_B)=(α

′

δ

_B0, β

′

ε

_B0) of the second surface are determined from the coefficients α

′ and

β

′

, and so that a relative inter-surface eccentricity (δ

_A-δ

_B, ε

_A-ε

_B) between the first surface and the second surface is calculated.

7. An apparatus for measuring eccentricity of an aspherical surface according to claim 1,

wherein the first angle changing means includes a third condenser lens for condensing light rays emitted from the first light source unit, a first variable reflecting angle element in which reflecting angles of the light rays can be changed by rotation, and a first collimator lens for making the light rays reflected by the first variable reflecting angle element parallel to the optical axis, and wherein the first variable reflecting angle element is placed so that a center of rotation is located in the proximity of a back focal plane of the third condenser lens and a front focal plane of the first collimator lens that coincide with each other and the light rays Q1i(i=1, 2, . . . , N) are produced by rotation of the first variable reflecting angle element.

8. An apparatus for measuring eccentricity of an aspherical surface according to claim 2,

wherein the first angle changing means includes a third condenser lens for condensing light rays emitted from the first light source unit, a first variable reflecting angle element in which reflecting angles of the light rays can be changed by rotation, and a first collimator lens for making the light rays reflected by the first variable reflecting angle element parallel to the optical axis, and the first variable reflecting angle element is placed so that a center of rotation is located in the proximity of a back focal plane of the first condenser lens and a front focal plane of the first collimator lens that coincide with each other and the light rays Q1i(i=1, 2, . . . , N) are produced by rotation of the first variable reflecting angle element, and

wherein the second angle changing means includes a fourth condenser lens for condensing light rays emitted from the second light source unit, a second variable reflecting angle element in which reflecting angles of the light rays emitted from the second light source unit can be changed by rotation, and a second collimator lens for making the light rays reflected by the second variable reflecting angle element parallel to the optical axis, and the second variable reflecting angle element is placed so that a center of rotation is located in the proximity of a back focal plane of the fourth condenser lens and a front focal plane of the second collimator lens that coincide with each other and the light rays Q2i(i=1, 2, . . . , N) are produced by rotation of the second variable reflecting angle element.

9. An apparatus for measuring eccentricity of an aspherical surface according to claim 7,

wherein the first angle changing means has two variable reflecting angle elements arranged so that their reflection-angle changing directions make right angles with each other, and

wherein the light rays emitted from the first light source unit scan two-dimensionally through the two variable reflecting angle elements.

10. An apparatus for measuring eccentricity of an aspherical surface according to claim 8,

wherein each of the first angle changing means and the second angle changing means has two variable reflecting angle elements arranged so that their reflection-angle changing directions make right angles with each other, and

wherein the light rays emitted from the first light source unit scan two-dimensionally through the two variable reflecting angle elements in the first angle changing means and the light rays emitted from the second light source unit scan two-dimensionally through the two variable reflecting angle elements in the second angle changing means.

11. An apparatus for measuring eccentricity of an aspherical surface according to claim 7,

wherein the first variable reflecting angle element is constructed so that the reflecting angle is adjustable two-dimensionally.

12. An apparatus for measuring eccentricity of an aspherical surface according to claim 8,

wherein each of the first variable reflecting angle element and the second variable reflecting angle element is constructed so that the reflecting angle is adjustable two-dimensionally.

13. An apparatus for measuring eccentricity of an aspherical surface according to claim 1,

wherein the first angle changing means includes a first beam expander for expanding a beam section of collimated light produced by the first light source unit and a first aperture element having a variable aperture position so that the first aperture element is moved in a plane perpendicular to the optical axis of the first beam expander and thereby the light rays Q1i(i=1, 2, . . . , N) are produced.

14. An apparatus for measuring eccentricity of an aspherical surface according to claim 2,

wherein the first angle changing means includes a first beam expander for expanding a beam section of collimated light produced by the first light source unit and a first aperture element having a variable aperture position so that the first aperture element is moved in a plane perpendicular to the optical axis of the first beam expander and thereby the light rays Q1i(i=1, 2, . . . , N) are produced, and

wherein the second angle changing means includes a second beam expander for expanding a beam section of collimated light produced by the second light source unit and a second aperture element having a variable aperture position so that the second aperture element is moved in a plane perpendicular to the optical axis of the second beam expander and thereby the light rays Q2i(i=1, 2, . . . , N) are produced.

15. An apparatus for measuring eccentricity of an aspherical surface according to claim 7,

wherein first afocal lenses for increasing an angle magnification with respect to the light rays Q1i′

(i=1, 2, . . . , N) are interposed between the first collimator lens and the first imaging lens.

16. An apparatus for measuring eccentricity of an aspherical surface according to claim 8,

wherein first afocal lenses for increasing an angle magnification with respect to the light rays Q1i′

(i=1, 2, . . . , N) are interposed between the first collimator lens and the first imaging lens, and

wherein second afocal lenses for increasing an angle magnification with respect to the light rays Q2i′

(i=1, 2, . . . , N) are interposed between the second collimator lens and the second imaging lens.

3. A method for measuring eccentricity of an aspherical surface in which an amount of eccentricity of an aspherical lens is measured, the method comprising the steps of:

setting a unit shift δ

_A0 and a unit tilt ε

_A0 for expressing an amount of eccentricity of a first surface to be examined of the aspherical lens with a shift component and a tilt component, considering design data of the first surface;

calculating an inclination angle shift change function g_{A shift}(y) of the first surface, on the basis of the design data of the first surface;

calculating an inclination angle tilt change function g_{A shift}(y) of the first surface, on the basis of the design data of the first surface;

actually measuring an inclination angle distribution of tangents to the first surface;

performing fitting of the inclination angle distribution of tangents to the first surface, which has been actually measured, to a function expressed by α

g_{A shift}(y)+β

g_{A tilt}(y); and

calculating an amount of shift δ

_A and an amount of tilt ε

_A, which compose the amount of eccentricity of the first surface, from α and

β

, values of which have been determined by the previous step of fitting, and the unit shift α

_A0 and the unit tilt ε

_A0, on a basis of a relationship (δ

_A, ε

_A)=(α

δ

_A0, β

ε

_A0),

where the inclination angle shift change function g_{A shift}(y) is a function introduced from a difference in inclination angle distribution of tangents to the first surface, between a supposed state where the first surface is displaced in parallel from an ideal noneccentric position by an amount of the unit shift δ

_A0 and a supposed state where the first surface is in the ideal noneccentric position, the inclination angle tilt change function g_{A tilt}(y) is a function introduced from a difference in inclination angle distribution of tangents to the first surface, between a supposed state where the first surface is rotationally displaced from the ideal noneccentric position by an amount of the unit tilt ε

_A0 and the supposed state where the first surface is in the ideal noneccentric position.

4. A method for measuring eccentricity of an aspherical surface according to claim 3, further comprising a procedure for measuring an eccentricity of a second surface to be examined of the aspherical lens, the second surface being situated on an opposite side of the first surface,

the procedure comprising the steps of:

setting a unit shift δ

_B0 and a unit tilt ε

_B0 for expressing an amount of eccentricity of the second surface with a shift component and a tilt component, considering design data of the second surface;

calculating an inclination angle shift change function g_{B shift}(y) of the second surface, on the basis of design data of the second surface;

calculating an inclination angle tilt change function g_{B tilt}(y) of the second surface, on the basis of the design data of the second surface;

actually measuring an inclination angle distribution of tangents to the second surface;

performing fitting of the inclination angle distribution of tangents to the second surface, which has been actually measured, to a function expressed by α

′

g_{B shift}(y)+β

′

g_{B tilt}(y);

calculating an amount of shift δ

_B and an amount of tilt ε

_B, which compose the amount of eccentricity of the second surface, from α

′ and

β

′

, values of which have been determined by the previous step of fitting, and the unit shift δ

_B0 and the unit tilt ε

_B0, on a basis of a relationship (δ

_B, ε

_B)=(α

′

δ

_B0, β

′

ε

_B0); and

calculating an inter-surface eccentricity (δ

_A-δ

_B, ε

_A-ε

_B) of the aspherical lens from the amount of eccentricity of the first surface and the amount of eccentricity of the second surface,

where the inclination angle shift change function g_{B shift}(y) is a function introduced from a difference in inclination angle distribution of tangents to the second surface, between a supposed state where the second surface is displaced in parallel from an ideal noneccentric position by an amount of the unit shift δ

_B0 and a supposed state where the second surface is in the ideal noneccentric position, the inclination angle tilt change function g_{B tilt}(y) is a function introduced from a difference in inclination angle distribution of tangents to the second surface, between a supposed state where the second surface is rotationally displaced from the ideal noneccentric position by an amount of the unit tilt ε

_B0 and the supposed state where the second surface is in the ideal noneccentric position.