Apparatus for measuring characteristics of thin film by means of two-dimensional detector and method of measuring the same

• US 7,286,242 B2
• Filed: 09/23/2002
• Issued: 10/23/2007
• Est. Priority Date: 09/21/2001
• Status: Expired due to Term

• Current Assignee: HB SOLUTION Co., Ltd.
• Original Assignee: K'Mac Co., Ltd.
• Inventors: Lee, Joong Whan, Kim, Jin Yong, Park, Ji Jong, Kim, Yeong Ryeol
• Primary Examiner(s): Turner; Samuel A.
• Application Number:
  US10/489,108
• Publication Number:
  US 20040246493A1
• Time in Patent Office: 1,856 Days
• Field of Search: 356/504, 356/503, 356/498, 356/630, 356/482, 356/485, 356/492
• US Class Current: 356/504
• CPC Class Codes: G01B 11/0625 with measurement of absorption or reflection

Abstract

The present invention relates to a non-contact, non-destructive measuring apparatus that measures thickness profile and refractive index distribution of a single or multiple layers of thin films by means of the principle of reflectometry. According to the present invention, by employing more than one narrow band-pass optical filters and a two-dimensional array of CCD sensors, and by finding an optimal solution for the nonlinear functional relationship between the thickness of said thin film or thin films and the corresponding refractive indexes by using an iterative numerical computation method, said apparatus simultaneously measures local area-wise thickness profile and refractive index distribution among others of said a single layer or multiple layers of thin films on a substrate.

Claims

1. An apparatus for measuring a characteristic of a thin film, the apparatus comprising:

a substrate carrier unit, including;

a sample carrier for supporting and moving a substrate with a thin film thereon,

a driving portion for driving the sample carrier, and

a control portion for controlling the driving portion;

an optical unit, including a light source, for radiating an incident light onto the substrate supported by the substrate carrier;

a filter unit for selectively filtering a particular wavelength range of the incident light radiated onto the substrate or of light reflected from the substrate;

a 2-dimensional photodetector for detecting the light reflected from the substrate in 2 dimensions, the light having the particular wavelength range selected by the filter unit;

an image capturing unit for obtaining image information included in the reflected light detected by the 2-dimensional photodetector;

an image processing unit for computing the reflectivities of the thin film with respect to the particular wavelength range of the light using the image information included in the reflective light obtained by the image capturing unit; and

an information processing unit for computing the characteristic of the thin film based on the reflectivity.

2. The apparatus of claim 1, wherein the thin film formed on the substrate is a single layer or multiple layers.

3. The apparatus of claim 2, wherein the thin film formed on the substrate includes a photo resist layer.

4. The apparatus of claim 1 measuring a characteristic of a particular area of the thin film formed on the substrate.

5. The apparatus of claim 1, measuring characteristics of a plurality of areas in the thin film while moving the substrate carrier.

6. The apparatus of claim 1, wherein the optical unit comprises a source selected from the group consisting of a visible light source, an ultraviolet light source, and an infrared light source.

7. The apparatus of claim 1, wherein the optical unit comprises a condensing lens condensing light radiated from the light source and a diaphragm controlling the size of the light incident on the substrate.

8. The apparatus of claim 1, wherein the filter unit discontinuously filters the particular wavelength range of the light.

9. The apparatus of claim 8, wherein the filter unit is constructed with an optical filter wheel including a plurality of optical filters, each of which selectively filters light having a particular wavelength range, disposed about a shaft of rotation.

10. The apparatus of claim 8, wherein the filter unit is constructed with a tunable filter selectively filtering light having a particular wavelength range.

11. The apparatus of claim 10, wherein the tunable filter is a liquid crystal tunable filter or an acousto-optical tunable filter.

12. The apparatus of claim 1, wherein the filter unit continuously filters the particular wavelength range of the light.

13. The apparatus of claim 12, wherein the filter unit is constructed with an optical filter wheel including a plurality of optical filters, each of which selectively filters light having a particular wavelength range, disposed about a shaft of rotation.

14. The apparatus of claim 12, wherein the filter unit is constructed with a linear variable filter.

15. The apparatus of claim 12, wherein the filter unit is implemented with a circular variable filter or a partially circular variable filter.

16. The apparatus of claim 1, wherein the filter unit is disposed in an optical path between the light source and the 2-dimensional photodetector.

17. The apparatus of claim 16, wherein the filter unit is disposed in the optical path immediately in front of the 2-dimensional photodetector.

18. The apparatus of claim 1, wherein the 2-dimensional photodetector is implemented with a charge coupled device (CCD).

19. The apparatus of claim 1, wherein the image processing unit plots a graph of reflectivity versus wavelength based on the intensities of the reflected light extracted from the image information captured by the image capturing unit.

20. The apparatus of claim 1, wherein the characteristic of the thin film computed by the information processing unit is selected from the group consisting of a thickness, a thickness profile, and a refractive index distribution.

21. The apparatus of claim 1, wherein the information processing unit computes the characteristic of the thin film using a non-linear error minimization method.

22. The apparatus of claim 1 further comprising an image perceiving unit and a monitor that displays the reflectivities computed by the image processing unit and the characteristic of the thin film computed by the information processing unit.

23. The apparatus of claim 22, wherein the monitor displays the characteristic of the thin film in 2 dimensions or 3 dimensions.

24. The apparatus of claim 23, wherein the monitor displays the characteristic of the thin film in color.

25. The apparatus of claim 1 further comprising a look-up table storing operation parameters and variables that are repeatedly used to elevate the processing speeds of the image processing unit and the information processing unit.

26. The apparatus of claim 1, wherein the image processing unit and the information processing unit are included in one processing unit.

27. The apparatus of claim 1, further comprising a system control unit for controlling the image processing unit, the information processing unit and the substrate carrier control portion.

28. The apparatus of claim 27, wherein the system control unit controls the filter unit.

29. The apparatus of claim 27, wherein the control portion of the substrate carrier unit, the image processing unit, the information processing unit and the system control unit are combined and controlled by one master controller.

30. A method of measuring a characteristic of a thin film, the method comprising:

locating a substrate with the thin film thereon such that a particular area of the thin film to be measured is properly positioned using a substrate carrier;

radiating light onto the substrate;

selectively filtering a particular wavelength range of the light;

detecting the light that has been filtered and reflected from the substrate in 2 dimensions;

obtaining image information included in the detected reflected light;

extracting the intensities of the reflected light from the image information and computing the reflectivities of the thin film, with respect to the particular wavelength range of the light, using an image processing unit;

computing the characteristic of the thin film using the reflectivities of the thin film using an information processing unit; and

displaying the characteristic of the thin film on a monitor.

31. The method of claim 30, wherein the computing of the reflectivities of the thin film comprises comparing the intensity of the light reflected from the thin film on the substrate with the intensity of light incident on a reference substrate.

32. The method of claim 30, further comprising moving the substrate and computing the reflectivities of another area of the thin film after the computing of the reflectivities of the particular area of the thin film.

33. The method of claim 30, wherein the computing of the characteristic of the thin film using the reflectivities of the thin film comprises computing a thickness of the thin film using a non-linear error minimization method that minimizes an error between measured reflectivity and theoretical reflectivity.

34. The method of claim 33, wherein a thickness profile and a refractive index distribution of the thin film are computed based on the thickness and the reflectivities of the thin film.

35. The method of claim 30, wherein, in the radiating of light onto the substrate, a shorter wavelength of light is used for measuring a thinner film.

36. The method of claim 35, wherein a minimum thickness of the thin film, measured using visible light, ranges from 100 Å

to 200 Å

.

37. The method of claim 30, wherein the computing of the reflectivities of the thin Film is repeatedly performed to minimize an error in reflectivity measurement using the intensities of the light radiated onto a group of pixels in the particular region, the position of an image displayed through the pixels, the wavelength of the light radiated onto the pixels, and an arbitrarily defined initial thickness value of the thin film.

38. The method of claim 37, wherein a look-up table is used to save the time for computation.

39. The method of claim 30, wherein, in the selectively filtering of the particular wavelength range of the light, the particular wavelength range of the light is discontinuously filtered.

40. The method of claim 30, wherein, in the selectively filtering of the particular wavelength range of the light, the particular wavelength range of the light is continuously filtered.

41. The method of claim 30, further comprising controlling the substrate carrier, the image processing unit and the information processing unit using a system control unit.