Real time monitoring system of semiconductor manufacturing information
First Claim
1. A system for monitoring semiconductor manufacturing in real time comprising a user interface and a services system, the services system for providing real time information to the user interface, the user interface comprising:
- an icon module that includes a database for storing a plurality of icons to provide stored icons that use vector data to represent respective pieces of equipment employed in semiconductor manufacture;
a layout module that includes a database for storing information on to a layout of a semiconductor manufacturing facility to provide stored information on the layout; and
a joiner module, receptive to the icon module and the layout module, for using vector data to merge stored icons received from the icon module with stored information on the layout received from the layout module to produce a merged graphical layout of the semiconductor manufacturing facility;
wherein, upon merging, the icons are accessible to display real time information relating to semiconductor manufacture.
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Abstract
The present disclosure provides a system for monitoring semiconductor manufacturing in real time which includes an icon module with a database for storing a plurality of icons to provide stored icons that use vector data to represent respective pieces of equipment employed in semiconductor manufacture, a layout module which includes a database for storing information on a layout of a semiconductor manufacturing facility to provide stored information on the layout, and a joiner module, which is receptive to the icon module and the layout module, for using vector data to merge stored icons received from the icon module with stored information on the layout received from the layout module to produce a merged graphical layout of the semiconductor manufacturing facility. Upon merging, the icons are accessible in the merged graphical display to display real time information relating to semiconductor manufacture.
35 Citations
34 Claims
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1. A system for monitoring semiconductor manufacturing in real time comprising a user interface and a services system, the services system for providing real time information to the user interface, the user interface comprising:
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an icon module that includes a database for storing a plurality of icons to provide stored icons that use vector data to represent respective pieces of equipment employed in semiconductor manufacture; a layout module that includes a database for storing information on to a layout of a semiconductor manufacturing facility to provide stored information on the layout; and a joiner module, receptive to the icon module and the layout module, for using vector data to merge stored icons received from the icon module with stored information on the layout received from the layout module to produce a merged graphical layout of the semiconductor manufacturing facility; wherein, upon merging, the icons are accessible to display real time information relating to semiconductor manufacture. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12, 13, 14, 15)
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16. A system for monitoring semiconductor manufacturing in real time comprising:
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a maintenance package to create and edit icons that represent respective pieces of equipment employed in semiconductor manufacture and to create and edit information on a layout of a semiconductor manufacturing facility; a storage and settings component operable to store and provide icons and information on a layout for a semiconductor manufacturing facility; a system operable to provide real time information relating to semiconductor manufacture; a layout joiner, receptive to the storage and settings component, operable to merge stored icons with stored information to produce a merged representation of the semiconductor manufacturing facility, wherein upon merging, the merged representation is accessible to display real time information relating to semiconductor manufacture; and a fabrication monitoring tool for monitoring the semiconductor manufacturing facility through the merged graphical layout produced by the layout joiner. - View Dependent Claims (17, 18, 19, 20, 21, 22, 23, 24, 25, 26)
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27. A method for monitoring semiconductor manufacturing in real time comprising:
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storing a plurality of icons that represent respective pieces of equipment employed in semiconductor manufacture; storing information on a layout of a semiconductor manufacturing facility; merging the stored icons with the stored information on the layout to produce a merged representation of the semiconductor manufacturing facility; providing real time information relating to semiconductor manufacturing to the merged representation; and accessing the icons to display the real time information relating to semiconductor manufacture. - View Dependent Claims (28, 29, 30, 31, 32, 33, 34)
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Specification