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Conductive bus structure for interferometric modulator array

  • US 7,289,259 B2
  • Filed: 02/11/2005
  • Issued: 10/30/2007
  • Est. Priority Date: 09/27/2004
  • Status: Expired due to Fees
First Claim
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1. A device comprising:

  • a substrate;

    a first electrode layer over the substrate, the first electrode layer having a first electrical resistance;

    a second electrode layer over the substrate, the second electrode layer having a second electrical resistance;

    a reflective surface being movable; and

    a conductive bus layer having a third electrical resistance, the third electrical resistance being lower than the first electrical resistance or the second electrical resistance, at least a portion of the conductive bus layer being electrically coupled to at least one of the first electrode layer and the second electrode layer.

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