Electrostatic/electrostrictive actuation of elastomer structures using compliant electrodes

• US 7,291,512 B2
• Filed: 12/21/2005
• Issued: 11/06/2007
• Est. Priority Date: 08/30/2001
• Status: Expired due to Fees

• Current Assignee: Fluidigm Corporation
• Original Assignee: Fluidigm Corporation
• Inventors: Unger, Marc
• Primary Examiner(s): Picardat; Kevin M.
• Application Number:
  US11/316,282
• Publication Number:
  US 20060118895A1
• Time in Patent Office: 685 Days
• Field of Search: 438/50, 438/51, 438/52, 438/53, 438/54, 257414-420
• US Class Current: 438/53
• CPC Class Codes: B01L 2300/0816 Cards, e.g. flat sample carriers usually with flow in two horizontal directions
• CPC Class Codes: B01L 2300/0887 Laminated structure
• CPC Class Codes: B01L 2400/0481 squeezing of channels or chambers
• CPC Class Codes: B01L 2400/0655 pinch valves
• CPC Class Codes: B01L 3/0241 Drop counters; Drop formers making arrays for combinatorial libraries B01J19/0046; automation of dispensing for analysis G01N35/10
• CPC Class Codes: B01L 3/5025 for parallel transport of multiple samples
• CPC Class Codes: B01L 3/502707 characterised by the manufacture of the container or its components by shaping or joining plastic parts B29C59/00, B29C65/00; by laminating B32B37/00; manufacture of microstructural devices in general B81C
• CPC Class Codes: B01L 3/502738 characterised by integrated valves microvalves F16K99/0001
• CPC Class Codes: F04B 43/043 Micropumps
• CPC Class Codes: F04B 43/14 having plate-like flexible members
• CPC Class Codes: F16K 2099/0074 using photolithography, e.g. etching
• CPC Class Codes: F16K 2099/0078 using moulding or stamping
• CPC Class Codes: F16K 2099/008 Multi-layer fabrications
• CPC Class Codes: F16K 99/0001 Microvalves microdevices B81B1/00; manufacture or treatment of devices or systems in or on a substrate B81C1/00; microfluidic structures B01L3/5027; micropumps F04B19/006
• CPC Class Codes: F16K 99/0015 Diaphragm or membrane valves
• CPC Class Codes: F16K 99/0051 using electrostatic means
• CPC Class Codes: F16K 99/0053 using magnetostrictive means
• CPC Class Codes: F16K 99/0059 actuated by a pilot fluid
• CPC Class Codes: H01L 21/00 Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof

Abstract

A valve structure comprises an elastomeric block formed with first and second microfabricated recesses separated by a membrane portion of the elastomeric block. The valve is actuated by positioning a compliant electrode on a first side of the first recess proximate to and in physical communication with the membrane. Where the valve is to be electrostatically actuated, a second electrode is positioned on a second side of the first recess opposite the first side. Application of a potential difference across the electrodes causes the compliant electrode and the membrane to be attracted into the flow channel. Where the valve is to be electrostrictively actuated, a second electrode is positioned on the same side of the recess as the compliant electrode. Application of a potential difference across the electrodes causes the electrodes to be attracted such that elastomer membrane portion material between them is compressed and bows into the flow channel. Either of the electrostrictively or the electrostatically-actuated valve structures may include an electrically-conducting fluid in the second recess to serve as the compliant electrode.

Claims

1. A method of actuating an elastomeric structure comprising:

applying a potential difference between a compliant electrode and a second electrode positioned on opposite sides of a first microfabricated recess of an elastomeric block, such that the compliant electrode is attracted to the second electrode and an associated elastomeric membrane separating the first microfabricated recess from a second microfabricated recess is drawn into the first recess.

2. The method of claim 1 wherein the potential difference is applied between the second electrode and an electrically conducting fluid disposed in the second microfabricated recess.

3. The method of claim 1 wherein the potential difference is applied between the second electrode and a compliant electrode comprising an electroactive polymer.

6. The method of claim 1 wherein:

the compliant electrode comprises a first compliant electrode and the second electrode comprises a second compliant electrode; and

the elastomeric membrane is compressed by attraction of the first compliant electrode to the second compliant electrode, causing the elastomeric membrane to bow upward into the first microfabricated recess.

7. The method of claim 6 wherein the potential difference is applied between the first compliant electrode and an electrically conducting fluid disposed in the second microfabricated recess.

8. The method of claim 6 wherein the potential difference is applied between the first compliant electrode comprising a first electroactive polymer and the second compliant electrode comprising a second electroactive polymer.

9. The method of claim 8 wherein the first and second electroactive polymers are the same material.

4. A method of controlling a flow of material in an elastomeric structure comprising applying a potential difference to cause electrostatic actuation of a compliant electrode.

5. The method of claim 4 wherein the flow occurs through a microfluidic channel.