MEMS device integrated chip package, and method of making same
First Claim
1. A process of forming a micro electromechanical (MEMS) package comprising:
- coupling a first MEMS device to an active surface of a semiconductor device using a first contact array;
providing a conveyance including a second MEMS device disposed therein and including a via extending through the entire thickness of the conveyance; and
supporting the conveyance over the active surface using a plurality of electrical contacts in a second contact array, wherein the second MEMS device communicates electrically to the semiconductor device via at least one of the contacts in the second contact array and wherein the first MEMS device is positioned within the via.
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Abstract
The present invention relates to a chip package that includes a semiconductor device and at least one micro electromechanical structure (MEMS) such that the semiconductor device and the MEMS form an integrated package. One embodiment of the present invention includes a semiconductor device, a first MEMS device disposed in a conveyance such as a film, and a second MEMS device disposed upon the semiconductor device through a via in the conveyance.
The present invention also relates to a process of forming a chip package that includes providing a conveyance such as a tape automated bonding (TAB) structure, that may hold at least one MEMS device. The method is further carried out by disposing the conveyance over the active surface of the device in a manner that causes the at least one MEMS to communicate electrically to the active surface. Where appropriate, a sealing structure such as a solder ring may be used to protect the MEMS.
33 Citations
9 Claims
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1. A process of forming a micro electromechanical (MEMS) package comprising:
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coupling a first MEMS device to an active surface of a semiconductor device using a first contact array; providing a conveyance including a second MEMS device disposed therein and including a via extending through the entire thickness of the conveyance; and supporting the conveyance over the active surface using a plurality of electrical contacts in a second contact array, wherein the second MEMS device communicates electrically to the semiconductor device via at least one of the contacts in the second contact array and wherein the first MEMS device is positioned within the via. - View Dependent Claims (2, 3, 4, 5, 6)
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7. A process comprising:
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coupling a first MEMS device to an active surface of a semiconductor device using a first contact array; providing a conveyance including a second MEMS device disposed therein and including a via extending through the entire thickness of the conveyance; and supporting the conveyance over the active surface using a plurality of electrical contacts in a second contact array, wherein the second MEMS device communicates electrically to the semiconductor device via at least one of the contacts in the second contact array, and wherein the first MEMS device is positioned within the via; and contacting encapsulation material with at least one of the semiconductor device, the first MEMS device, and the conveyance to form an integrated MEMS package. - View Dependent Claims (8, 9)
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Specification