Photosensing throughout energy range and in subranges

• US 7,291,824 B2
• Filed: 12/22/2005
• Issued: 11/06/2007
• Est. Priority Date: 12/22/2005
• Status: Active Grant

• Current Assignee: Xerox Corporation (Xerox Holdings Corp.)
• Original Assignee: Palo Alto Research Center, Inc. (Xerox Holdings Corp.)
• Inventors: Kiesel, Peter, Schmidt, Oliver, Wolst, Oliver
• Primary Examiner(s): Epps; Georgia
• Assistant Examiner(s): YAM, STEPHEN K
• Application Number:
  US11/316,438
• Publication Number:
  US 20070145236A1
• Time in Patent Office: 684 Days
• Field of Search: 250573-576, 250/578.1, 250/226, 250/208.1, 356/410, 356/411, 356/434, 356/435
• US Class Current: 250/208.2
• CPC Class Codes: G01J 1/4228 arrangements with two or more detectors, e.g. for sensitivity compensation
• CPC Class Codes: G01J 3/02 Details
• CPC Class Codes: G01J 3/0213 using attenuators
• CPC Class Codes: G01J 3/26 using multiple reflection, e.g. Fabry-Perot interferometer, variable interference filters
• CPC Class Codes: G01J 3/2803 using photoelectric array detector
• CPC Class Codes: G01N 2021/4709 Backscatter
• CPC Class Codes: G01N 2021/6417 Spectrofluorimetric devices
• CPC Class Codes: G01N 21/47 Scattering, i.e. diffuse reflection G01N21/25, G01N21/41 take precedence G01N21/55 takes precedence
• CPC Class Codes: G01N 21/645 Specially adapted constructive features of fluorimeters
• CPC Class Codes: G01N 21/65 Raman scattering
• CPC Class Codes: H01L 27/14601 Structural or functional details thereof
• CPC Class Codes: H01L 27/14621 Colour filter arrangements

Abstract

An integrated circuit (IC) includes a photosensor array, some cells of which are reference cells that photosense throughout an application'"'"'s energy range, while other cells of which are subrange cells that photosense within respective subranges. For example, the subrange cells can receive photons in their respective subranges from a transmission structure that has laterally varying properties, such as due to varying optical thickness. The reference cells may be uncoated or may also receive photons through a transmission structure such as a gray filter. Subrange cells and reference cells may be paired in adjacent lines across the array, such as rows. Where photon emanation can vary along a path, quantities of incident photons photosensed by subrange cells along the path can be adjusted based on quantities photosensed by their paired reference cells, such as with normalization.

Claims

1. A method of sensing photon energies in an application'"'"'s energy range, the method comprising:

for a path along which photon emanation can vary, photosensing with an IC that includes a photosensor array;

the act of photosensing comprising, in each of two or more segments of the path;

with a respective first set of one or more cells of the array, photosensing quantity of incident photons substantially throughout the application'"'"'s energy range;

with a respective second set of one or more cells in the array, photosensing quantity of incident photons within a respective subrange of the application'"'"'s energy range;

the respective subranges of at least two of the segments being different from each other.

2. The method of claim 1 in which the act of photosensing further comprises, for each photosensor in the first and second sets of at least one of the segments:

photosensing incident photons during a respective sensing period for the photosensor; and

obtaining a signal indicating quantity of incident photons received during the photosensor'"'"'s sensing period.

3. The method of claim 2 in which the sensing periods of the photosensors in the first and second sets are approximately concurrent.

4. The method of claim 1, further comprising:

for at least one of the segments, using the quantities photosensed by the segment'"'"'s respective first and second sets of cells to produce signals indicating quantity of incident photons in the segment'"'"'s subrange adjusted based on quantity of incident photons throughout the application'"'"'s energy range.

5. The method of claim 4 in which the act of using photosensed quantities to produce signals includes normalization.

6. A system that senses photon energies in an application'"'"'s energy range, the system comprising:

an IC that includes a photosensor array, the array being positioned along a path along which photon emanation can vary;

the array including, along each of two or more segments of the path;

a respective first set of one or more cells that photosense quantity of incident photons substantially throughout the application'"'"'s energy range; and

a respective second set of one or more cells that photosense quantity of incident photons within a respective subrange of the application'"'"'s energy range;

the respective subranges of at least two of the segments being different from each other; and

adjusting circuitry that responds to cells in the array and that, for at least one of the segments, uses the quantities photosensed by the segment'"'"'s respective first and second sets of cells to produce signals indicating quantity of incident photons in the segment'"'"'s respective subrange adjusted based on quantity of incident photons throughout the application'"'"'s energy range.

7. The system of claim 6 in which the array includes first and second lines of cells extending along the path;

the first line including each segment'"'"'s first set of cells and the second line including each segment'"'"'s second set of cells.

8. The system of claim 7 in which the first and second lines are both at least one of straight lines and adjacent lines.

9. The system of claim 6 in which the array is a CMOS array or a CCD array.

10. The system of claim 6 in which the IC includes array circuitry in the array and peripheral circuitry outside the array, the adjusting circuitry including at least part of the peripheral circuitry.

11. The system of claim 6, further comprising:

external circuitry electrically connected to the IC;

the adjusting circuitry including at least part of the external circuitry.

12. The system of claim 6 in which the adjusting circuitry performs normalization.

13. The system of claim 6 in which the respective second set of cells of one of the segments includes one cell and the respective first set of cells includes one, two, or six cells.

14. The system of claim 13 in which the respective first and second sets of cells include one cell each.

15. The system of claim 6 in which the respective first and second sets of cells of at least one of the segments are near each other.

16. The system of claim 6 in which the application'"'"'s energy range has a minimum wavelength greater than 400 nm and a maximum wavelength less than 1100 nm.

17. The system of claim 6 in which the path includes at least nine segments, the respective subranges of all of the segments being different from each other.

18. The system of claim 6, further comprising:

a transmission structure that receives photons emanating from the path and, in response, provides photons to the array;

the transmission structure providing to the respective second set of cells of each segment photons within the segment'"'"'s subrange.

19. The system of claim 18 in which the transmission structure further provides photons substantially throughout the application'"'"'s energy range to the respective first set of cells of each segment.

20. A photon energy sensor that senses photon energies in an application'"'"'s energy range, the sensor comprising:

an IC that includes a photosensor array, the array including at least first and second lines of cells, the first and second lines including one or more first-second pairs of cells that are near each other, with a first line cell in each first-second pair being in the first line and a second line cell in each first-second pair being in the second line; and

over the second line of cells, a second line transmission structure that provides incident photons to cells in the second line;

for at least one of the first-second pairs of cells, the pair'"'"'s second line cell receiving from the second line transmission structure incident photons within a respective subrange of the application'"'"'s energy range and the pair'"'"'s first line cell receiving incident photons substantially throughout the application'"'"'s energy range.

21. The sensor of claim 20, further comprising, over the first line of cells, a first line transmission structure that provides incident photons to cells in the first line, the pair'"'"'s first line cell receiving from the first line transmission structure incident photons substantially throughout the application'"'"'s energy range.

22. The sensor of claim 21 in which the first line transmission structure is a gray filter.

23. The sensor of claim 20 in which the first and second lines are adjacent straight lines of cells, each first-second pair of cells being a pair of adjacent cells.

24. The sensor of claim 20 in which the pair'"'"'s first cell is substantially equal to or smaller in sensing area than the pair'"'"'s second cell.

25. The sensor of claim 20 in which the array further includes a third line of cells, the second and third lines including one or more second-third pairs of cells that are near each other, with a second line cell in each second-third pair being in the second line and a third line cell in each second-third pair being in the third line;

the pair'"'"'s third line cell receiving photons substantially throughout the application'"'"'s energy range;

at least one cell in the second line being the second line cell both of a first-second pair and a second-third pair.

26. The sensor of claim 25 in which the second line cell is between the first line cell in the first-second pair and the third line cell in the second-third pair.

27. The sensor of claim 25 in which the second line cell and the paired first and third line cells all have different sensing areas from each other.

28. The sensor of claim 20 in which the array further includes:

a third line of cells; and

over the third line of cells, a third transmission structure that provides incident photons to cells in the third line;

the first and third lines including one or more first-third pairs of cells that are near each other, with a first line cell in each first-third pair being in the first line and a third line cell in each first-third pair being in the third line;

for at least one of the first-third pairs of cells, the pair'"'"'s third line cell receiving from the third line transmission structure incident photons within a respective subrange of the application'"'"'s energy range and the pair'"'"'s first line cell receiving incident photons substantially throughout the application'"'"'s energy range;

at least one cell in the first line being the first line cell both of a first-second pair and a first-third pair.

29. The sensor of claim 28 in which the first line cell is between the second line cell in the first-second pair and the third line cell in the first-third pair.

30. A method of producing a sensor as in claim 20, the method comprising:

producing the photon energy sensor with the second line transmission structure over at least the second line of cells;

for at least one of the first-second pairs of cells, the pair'"'"'s first cell receiving incident photons substantially throughout an application'"'"'s energy range and the pair'"'"'s second cell receiving from the second line transmission structure incident photons within a respective subrange of the application'"'"'s energy range.