MEMS based RF components and a method of construction thereof
First Claim
1. A MEMS-based RF component comprising a form, said form being a three dimensional waveguide having at least one inner wall surrounding said waveguide, said at least one inner wall being conductive, said form being capable of supporting a signal and having at least one of an input and output, said form having a MEMS structure at least partially therein, said MEMS structure being constructed to control an RF signal within said form while all inner walls of said at least one inner wall remain conductive.
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Abstract
A three dimensional waveguide is integrated with a MEMS structure to control a signal in various RF components. The components include switches, variable capacitors, filters and phase shifters. A controller controls movement of the MEMS structure to control a signal within the component. A method of construction and a method of operation of the component are described. The switches have high power handling capability and can be operated at high frequencies. By integrating a three dimensional waveguide with a MEMS structure, the components can be small in size with good operating characteristics.
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Citations
41 Claims
- 1. A MEMS-based RF component comprising a form, said form being a three dimensional waveguide having at least one inner wall surrounding said waveguide, said at least one inner wall being conductive, said form being capable of supporting a signal and having at least one of an input and output, said form having a MEMS structure at least partially therein, said MEMS structure being constructed to control an RF signal within said form while all inner walls of said at least one inner wall remain conductive.
- 36. A method of constructing a MEMS-based RF component having a three dimensional waveguide with a MEMS structure at least partially therein, said waveguide having at least one wall surrounding said waveguide, said at least one wall being conductive, said method comprising constructing a base plate and a top cover that is sized and shaped to fit on said base plate, one of said base plate and said top cover having a MEMS structure incorporated therein, and affixing said cover to said plate to form said component, constructing said MEMS structure so that said at least one wall remains conducting as said MEMS structure generates.
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41. A method of operating an RF component having a form that is a three dimensional waveguide, said waveguide having at least one inner wall surrounding said waveguide, said at least one wall being conductive, said form having a MEMS structure at least partially therein with a controller for said MEMS structure, said method comprising operating said controller to move said MEMS structure to control an RF signal within said form while all inner walls of said at least one inner wall remain conductive.
Specification