Method for determining a map, device manufacturing method, and lithographic apparatus
First Claim
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1. A method of determining a map of a surface, said method comprising:
- measuring a first part of a substrate belonging to a group of substrates;
based on a result of said measuring, computing a map of a second part of at least one substrate belonging to the group of substrates, the first part partially overlapping with the second part; and
storing the map in a machine-readable memory or making available the map for use.
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Abstract
A method according to one embodiment of the invention includes determining a map of a second part of a substrate belonging to a group of substrates. The method includes measuring a first part of at least one substrate belonging to the group to create an average profile map or average height map and computing a map of the second part of the substrate belonging to the group, based on the average profile map or the average height map. The computed map is stored for use during a later determination of a height or tilt of a substrate from the group.
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Citations
34 Claims
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1. A method of determining a map of a surface, said method comprising:
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measuring a first part of a substrate belonging to a group of substrates; based on a result of said measuring, computing a map of a second part of at least one substrate belonging to the group of substrates, the first part partially overlapping with the second part; and storing the map in a machine-readable memory or making available the map for use. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12, 13, 14, 15, 16, 17, 18, 27, 28)
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19. An apparatus comprising:
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a sensor configured to measure a first part of a substrate belonging to a group of substrates; and a processing unit configured to compute, based on a result of said measuring, a map of a second part of at least one substrate belonging .to the group of substrates, the first part partially overlapping with the second part. - View Dependent Claims (20, 21, 22)
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23. A method of determining a map of a surface, said method comprising:
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measuring a first part of a substrate belonging to a group of substrates; storing a result of said measuring; based on the result of said measuring, computing a map of at least one of a second part of at least one substrate belonging to the group of substrates and a part of another substrate belonging to the group, the first part partially overlapping with the second part; and storing the map in a machine-readable memory or making available the map for use. - View Dependent Claims (24)
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25. An apparatus comprising:
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a sensor configured to measure a first part of a substrate belonging to a group of substrates; a memory unit configured to store a result of said measuring; and a processing unit configured to compute, based on the result of said measuring, a map of at least one of a second part of at least one substrate and a part of another substrate belonging to the group, the first part partially overlapping with the second part. - View Dependent Claims (26)
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29. A method of extrapolating a profile map associated with a surface of a substrate, said method comprising:
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measuring a first part of the substrate belonging to a group of substrates; determining an average profile map based at least on the measurement of the first part of the substrate; computing, based on values of the average profile map, the profile map for a second part of at least one substrate that belongs to the group of substrates, wherein the first part is located adjacent to the second part; and storing the profile map for the second part in a machine-readable memory or making available the profile map for the second part for use. - View Dependent Claims (30, 31, 32, 33, 34)
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Specification