×

Method for determining a map, device manufacturing method, and lithographic apparatus

  • US 7,292,351 B2
  • Filed: 12/16/2004
  • Issued: 11/06/2007
  • Est. Priority Date: 12/17/2003
  • Status: Active Grant
First Claim
Patent Images

1. A method of determining a map of a surface, said method comprising:

  • measuring a first part of a substrate belonging to a group of substrates;

    based on a result of said measuring, computing a map of a second part of at least one substrate belonging to the group of substrates, the first part partially overlapping with the second part; and

    storing the map in a machine-readable memory or making available the map for use.

View all claims
  • 2 Assignments
Timeline View
Assignment View
    ×
    ×