Methods for determining tool assignment preference and manufacturing systems using the same

• US 7,292,903 B2
• Filed: 07/20/2005
• Issued: 11/06/2007
• Est. Priority Date: 02/17/2005
• Status: Active Grant

• Current Assignee: Powerchip Semiconductor Manufacturing Corp. (Powerchip Technology Corporation)
• Original Assignee: Powerchip Semiconductor Corporation (Powerchip Technology Corporation)
• Inventors: Fu, Chia-Jen, Liu, Chih-Neng, Tseng, Li-Chuan
• Primary Examiner(s): VON BUHR, MARIA N
• Application Number:
  US11/184,793
• Publication Number:
  US 20060195209A1
• Time in Patent Office: 839 Days
• Field of Search: 700/96, 700 99-102, 705/7, 705/8
• US Class Current: 700/99
• CPC Class Codes: G05B 19/41865 characterised by job scheduling, process planning, material flow
• CPC Class Codes: G05B 2219/32258 Resource, machine assignment preferences, actual and anticipated load
• CPC Class Codes: G05B 2219/32283 Machine scheduling, several machines, several jobs
• CPC Class Codes: G05B 2219/45031 Manufacturing semiconductor wafers
• CPC Class Codes: Y02P 90/02 Total factory control, e.g. smart factories, flexible manufacturing systems [FMS] or integrated manufacturing systems [IMS]

Abstract

A method for determining tool assignment preference applied to a semiconductor manufacturing system. At least one first tool and second tool and at least one first semiconductor process and second semiconductor process applied to the tools are provided. Demand moves provided by the first and second semiconductor processes are calculated. Assignment preferences of the first and second tools are determined using a statistical method. The statistical method is a two-step data feedback method, comprising the steps of, in the first step, calculating assignment preferences of tools without setting assignment preferences, and, in the second step, assigning assignment preferences to the first and second tools according to the calculation result in the first step, wherein the first tool is assigned to a first assignment preference with a lowest average utility rate, and the second tool is assigned to a second assignment preference.

Claims

1. A method for determining tool assignment preference, applied to a semiconductor manufacturing system, comprising:

in the semiconductor manufacturing system, providing at least one first tool and second tool and at least one first semiconductor process and second semiconductor process applied to the tools;

calculating demand moves provided by the first and second semiconductor processes; and

determining assignment preferences of the first and second tools using a statistical method;

wherein the statistical method is a two-step data feedback method, comprising the steps of;

in the first step, calculating assignment preferences of tools without setting assignment preferences; and

in the second step, assigning assignment preferences of the first and second tools according to the calculation result in the first step, wherein the first tool is assigned to a first assignment preference with a lowest average utility rate, and the second tool is assigned to a second assignment preference.

2. The method for determining tool assignment preference as claimed in claim 1, wherein if a plurality of tools are provided in the semiconductor manufacturing system, assignment preferences of the first 20% tools with the lowest average utility rates are assigned to the first assignment preferences.

3. The method for determining tool assignment preference as claimed in claim 2, wherein assignment preferences of the remnant 80% tools are assigned to the second assignment preferences.

4. The method for determining tool assignment preference as claimed in claim 1, wherein the statistical method is a move linear programming method, comprising the steps of:

calculating required moves applied to the first and second tools corresponding to the first and second semiconductor processes;

totalizing the moves of the first and second tools respectively, thereby obtaining a first move amount and a second move amount;

comparing the first and second move amount; and

setting assignment preferences of the first and second tools according to the comparison result, wherein when the first move amount is larger than the second move amount and within a predetermined limit, the assignment preference of the first tool is assigned to the first assignment preference, and, when the second move amount is within a predetermined limit, the assignment preference of the second tool is assigned to the second assignment preference.

5. The method for determining tool assignment preference as claimed in claim 1, wherein the statistical method is a tool loading method, comprising the steps of:

calculating load proportions of the first and second tools within a last process cycle; and

setting assignment preferences of the first and second tools according to the calculation result, wherein when the first tool has a lowest load proportion, the assignment preference thereof is assigned to the first assignment preference, and the assignment preference of the second tool is assigned to the second assignment preference.

6. A manufacturing system, executing a manufacturing process using a method for determining and comprising a plurality of tools and a plurality of manufacturing processes applied to the tools, the method comprising:

in the semiconductor manufacturing system, providing at least one first tool and second tool and at least one first semiconductor process and second semiconductor process applied to the tools;

calculating demand moves provided by the first and second semiconductor processes; and

determining assignment preferences of the first and second tools using a statistical method;

wherein the statistical method is a two-step data feedback method, comprising the steps of;

in the first step, calculating assignment preferences of tools without setting assignment preferences; and

in the second step, assigning assignment preferences of the first and second tools according to the calculation result in the first step, wherein the first tool is assigned to a first assignment preference with a lowest average utility rate, and the second tool is assigned to a second assignment preference.

7. The manufacturing system as claimed in claim 6, wherein if a plurality of tools are provided in the semiconductor manufacturing system, assignment preferences of the first 20% tools with the lowest average utility rates are assigned to the first assignment preferences.

8. The manufacturing system as claimed in claim 7, wherein assignment preferences of the remnant 80% tools are assigned to the second assignment preferences.

9. The manufacturing system as claimed in claim 6, wherein the statistical method is a move linear programming method, comprising the steps of:

calculating required moves applied to the first and second tools corresponding to the first and second semiconductor processes;

totalizing the moves of the first and second tools respectively, thereby obtaining a first move amount and a second move amount;

comparing the first and second move amounts; and

setting assignment preferences of the first and second tools according to the comparison result, wherein when the first move amount is larger than the second move amount and within a predetermined limit, the assignment preference of the first tool is assigned to the first assignment preference, and, when the second move amount is within a predetermined limit, the assignment preference of the second tool is assigned to the second assignment preference.

10. The manufacturing system as claimed in claim 6, wherein the statistical method is a tool loading method, comprising the steps of:

calculating load proportions of the first and second tools within a last process cycle; and

setting assignment preferences of the first and second tools according to the calculation result, wherein when the first tool has a lowest load proportion, the assignment preference thereof is assigned to the first assignment preference, and the assignment preference of the second tool is assigned to the second assignment preference.

11. A storage medium for storing a computer program providing a method for determining tool assignment preference, comprising using a computer to perform the steps of:

at least one first tool and second tool and at least one first semiconductor process and second semiconductor process applied to the tools;

calculating demand moves provided by the first and second semiconductor processes; and

determining assignment preferences of the first and second tools using a statistical method;

wherein the statistical method is a two-step data feedback method, comprising the steps of;

in the first step, calculating assignment preferences of tools without setting assignment preferences; and

in the second step, assigning assignment preferences of the first and second tools according to the calculation result in the first step, wherein the first tool is assigned to a first assignment preference with a lowest average utility rate, and the second tool is assigned to a second assignment preference.

12. The storage medium as claimed in claim 11, wherein if a plurality of tools are provided in the semiconductor manufacturing system, assignment preferences of the first 20% tools with the lowest average utility rates are assigned to the first assignment preferences.

13. The storage medium as claimed in claim 12, wherein assignment preferences of the remnant 80% tools are assigned to the second assignment preferences.

14. The storage medium as claimed in claim 11, wherein the statistical method is a move linear programming method, comprising the steps of:

calculating required moves applied to the first and second tools corresponding to the first and second semiconductor processes;

totalizing the moves of the first and second tools respectively, thereby obtaining a first move amount and a second move amount;

comparing the first and second move amount; and

setting assignment preferences of the first and second tools according to the comparison result, wherein when the first move amount is larger than the second move amount and within a predetermined limit, the assignment preference of the first tool is assigned to the first assignment preference, and, when the second move amount is within a predetermined limit, the assignment preference of the second tool is assigned to the second assignment preference.

15. The storage medium as claimed in claim 11, wherein the statistical method is a tool loading method, comprising the steps of:

calculating load proportions of the first and second tools within a last process cycle; and

setting assignment preferences of the first and second tools according to the calculation result, wherein when the first tool has a lowest load proportion, the assignment preference thereof is assigned to the first assignment preference, and the assignment preference of the second tool is assigned to the second assignment preference.