Substrate proximity processing housing and insert for generating a fluid meniscus
First Claim
1. An apparatus for generating a fluid meniscus to be formed on a substrate, comprising:
- a housing having walls and a housing surface with flat regions to be positioned proximate to a surface of the substrate, the housing including a process configuration receiving region that is surrounded by the walls of the housing and the housing surface; and
a process configuration insert having an insert surface, the process configuration insert being defined to fit within the process configuration receiving region between the walls of the housing such that the insert surface and the housing surface define a proximity face having flat surface regions, the proximity face having a plurality of discrete conduits that extend through the housing and the process configuration insert, wherein the proximity face can be positioned proximate to the surface of the substrate.
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Abstract
An apparatus for generating a fluid meniscus to be formed on a surface of a substrate is provided including a housing where the housing includes a housing surface to be placed proximate to a substrate surface of the substrate. The housing further includes a process configuration receiving region that is surrounded by the housing surface. The apparatus also includes a process configuration insert which has an insert surface where the process configuration insert is defined to fit within the process configuration receiving region of the housing such that the insert surface and the housing surface define a proximity face that can be placed proximate to the substrate surface of the substrate.
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Citations
10 Claims
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1. An apparatus for generating a fluid meniscus to be formed on a substrate, comprising:
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a housing having walls and a housing surface with flat regions to be positioned proximate to a surface of the substrate, the housing including a process configuration receiving region that is surrounded by the walls of the housing and the housing surface; and a process configuration insert having an insert surface, the process configuration insert being defined to fit within the process configuration receiving region between the walls of the housing such that the insert surface and the housing surface define a proximity face having flat surface regions, the proximity face having a plurality of discrete conduits that extend through the housing and the process configuration insert, wherein the proximity face can be positioned proximate to the surface of the substrate. - View Dependent Claims (2, 3, 4, 5, 6, 7)
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8. An reconfigurable proximity head for generating a fluid meniscus to be formed on a substrate, the reconfigurable proximity head comprising:
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a housing body having walls extending between a process side and a cover side, the walls defining an opening at the cover side, and the process side having flat surface regions and further define a receiving region opening, the process side having the flat surface regions including a first set of discrete conduits in a first configuration; a process configuration insert configured to sit within the housing body and extend through the opening at the cover side and into the receiving region opening, the process configuration insert having an insert surface defined by flat surface regions, the insert surface includes a second set of discrete conduits in a second configuration, wherein the insert surface of the process configuration insert and the process side of the housing body define a proximity face having the first and second sets of discrete conduits with both the first configuration and the second configuration. - View Dependent Claims (9, 10)
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Specification