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Apparatus and method for depositing material onto a substrate using a roll-to-roll mask

  • US 7,294,209 B2
  • Filed: 01/02/2003
  • Issued: 11/13/2007
  • Est. Priority Date: 01/02/2003
  • Status: Expired due to Fees
First Claim
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1. A system for making an RFID device, the system comprising:

  • one or more supply reels that feed one or more source substrates;

    one or more supply reels that feed at least one electronic circuit and RF antenna;

    one or more deposition stations that deposit layers onto the one or more substrates, wherein the layers include;

    (i) layers to form a solid-state lithium-based battery, the battery layers including;

    a) a cathode layer;

    b) an electrolyte layer;

    c) an anode layer;

    (ii) a wiring layer to couple the battery to the at least one electronic circuit, and to couple the RF antenna to the at least one electronic circuit;

    a movable mask strip having a plurality of different mask areas used for different deposition operations;

    a supply reel that feeds a peel-and-stick adhesive layer; and

    a vacuum chamber that contains the supply reels and the deposition station.

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