Method for fabricating an actuator system
First Claim
1. A method for fabricating an actuator system, the method comprising:
- forming a microelectromechanical (MEMS) structure comprising a mirror segment and a sacrificial layer;
forming a substrate comprising a control circuit for controlling the MEMS structure and a passivation layer for protecting the substrate;
bonding the MEMS structure with the substrate; and
after bonding the MEMS structure with the substrate, exposing the MEMS structure and the substrate to a release agent to eliminate the sacrificial layer of the MEMS structure, wherein the passivation layer protects the substrate from the release agent.
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Abstract
An apparatus comprising a substrate; and a platform elevated above the substrate and supported by curved flexures. The curvature of said flexures results substantially from variations in intrinsic residual stress within said flexures. In one embodiment the apparatus is a deformable mirror exhibiting low temperature-dependence, high stroke, high control resolution, large number of degrees of freedom, reduced pin count and small form-factor. Structures and methods of fabrication are disclosed that allow the elevation of mirror segments to remain substantially constant over a wide operating temperature range. Methods are also disclosed for integrating movable mirror segments with control and sense electronics to a produce small-form-factor deformable mirror.
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Citations
20 Claims
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1. A method for fabricating an actuator system, the method comprising:
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forming a microelectromechanical (MEMS) structure comprising a mirror segment and a sacrificial layer; forming a substrate comprising a control circuit for controlling the MEMS structure and a passivation layer for protecting the substrate; bonding the MEMS structure with the substrate; and after bonding the MEMS structure with the substrate, exposing the MEMS structure and the substrate to a release agent to eliminate the sacrificial layer of the MEMS structure, wherein the passivation layer protects the substrate from the release agent. - View Dependent Claims (2, 3, 16, 17, 18, 19, 20)
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4. A method for fabricating an actuator system, the method comprising:
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forming a microelectromechanical (MEMS) structure having a sacrificial layer; forming a substrate comprising a control circuit for controlling the MEMS structure and a passivation layer for protecting the substrate, wherein the passivation layer is comprised of a patternable polymer material; after forming the substrate, patterning and etching the passivation layer of the substrate to open a bond site on the substrate; bonding the MEMS structure with the substrate; and exposing the MEMS structure and the substrate to a release agent to eliminate the sacrificial layer of the MEMS structure, wherein the passivation layer protects the substrate from the release agent. - View Dependent Claims (5)
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6. A method for fabricating an actuator system, the method comprising:
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forming a microelectromechanical (MEMS) structure having a sacrificial layer; forming a substrate comprising a control circuit for controlling the MEMS structure and a passivation layer for protecting the substrate, wherein the passivation layer is comprised of a conductive material; bonding the MEMS structure with the substrate; exposing the MEMS structure and the substrate to a release agent to eliminate the sacrificial layer of the MEMS structure, wherein the passivation layer protects the substrate from the release agent; and after exposing the MEMS structure and the substrate to the release agent, removing the passivation layer from the substrate where the substrate is not bonded to the MEMS structure. - View Dependent Claims (7)
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8. A method for fabricating an actuator system, the method comprising:
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forming a microelectromechanical (MEMS) structure having a sacrificial layer, wherein forming the MEMS structure comprises; forming a platform connected with a set of one or more bimorph flexures; and for each bimorph flexure in the set of bimorph flexures; forming a first layer of the bimorph flexure, the first layer comprising a first material; and forming a second layer of the bimorph flexure, the second layer comprising a second material, the first and second materials having substantially similar coefficients of thermal expansion (CTEs); forming a substrate comprising a control circuit for controlling the MEMS structure and a passivation layer for protecting the substrate; bonding the MEMS structure with the substrate; and exposing the MEMS structure and the substrate to a release agent to eliminate the sacrificial layer of the MEMS structure, wherein the passivation layer protects the substrate from the release agent. - View Dependent Claims (9, 10, 11, 12, 13, 14, 15)
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Specification