Wiring technique

• US 7,294,906 B2
• Filed: 09/28/2004
• Issued: 11/13/2007
• Est. Priority Date: 09/29/2003
• Status: Expired due to Fees

• Current Assignee: Canon Kabushiki Kaisha (Canon Inc.)
• Original Assignee: Canon Kabushiki Kaisha (Canon Inc.)
• Inventors: Ukaji, Takao
• Primary Examiner(s): Nhu; David
• Application Number:
  US10/950,409
• Publication Number:
  US 20050095818A1
• Time in Patent Office: 1,141 Days
• Field of Search: 257/678, 257/666, 257/673, 257/712, 257/717, 257/720, 257/749, 257/763, 257/764, 257/98, 257/99
• US Class Current: 257/617
• CPC Class Codes: G03F 7/70716 Stages
• CPC Class Codes: G03F 7/70991 Connection with other apparatus, e.g. multiple exposure stations, particular arrangement of exposure apparatus and pre-exposure and/or post-exposure apparatus; Shared apparatus, e.g. having shared radiation source, shared mask or workpiece stage, shared base-plate; Utilities, e.g. cable, pipe or wireless arrangements for data, power, fluids or vacuum

Abstract

An apparatus for supplying electrical power to a movable member. The apparatus includes a fixed member, the movable member moving relative to the fixed member, a flexible wiring member having an end connected to the movable member and another end connected to the fixed member, configured to transmit the electrical power from the fixed member to the movable member, and a cooling member configured to cool the fixed member.

Claims

1. An apparatus for supplying electrical power to a movable member, said apparatus comprising:

a fixed member, the movable member moving relative to said fixed member;

a flexible wiring members having an end connected to the movable member and another end connected to said fixed member, configured to transmit the electrical power from said fixed member to said movable member; and

a cooling member configured to cool said fixed member,

wherein the electrical power includes at least one of a motor driving current for moving the movable member and a heating voltage for energizing a heater provided in relation to the movable member.

2. An apparatus according to claim 1, wherein said flexible wiring member includes a metal plate.

3. An apparatus according to claim 2, wherein the metal plate is made of phosphor bronze.

4. An apparatus according to claim 1, wherein said cooling member includes a cooling medium line provided inside said fixed member.

5. An apparatus according to claim 1, further comprising a shielding plate configured to block radiation heat from said fixed member and said flexible wiring member.

6. An apparatus according to claim 1, wherein said apparatus is configured to be operated in a vacuum ambience.

7. An apparatus according to claim 1, wherein said fixed member is made of alumina ceramics or copper.

8. An exposure apparatus comprising:

a fixed member;

a movable member, said movable member moving relative to said fixed member;

a flexible wiring member, having an end connected to said movable member and another end connected to said fixed member, configured to transmit electrical power from said fixed member to said movable member; and

a cooling member configured to cool said fixed member,

wherein the electrical power includes at least one of a motor driving current for moving said movable member and a heating voltage for energizing a heater provided in relation to said movable member.

9. An apparatus according to claim 8, wherein said exposure apparatus is configured to transfer a pattern of an original onto a substrate, and said movable member is configured to hold and to move one of the original and the substrate.

10. An apparatus according to claim 8, wherein said exposure apparatus is configured to use one of EUV light, X-rays and an electron beam for the exposure, and to be operated in a vacuum ambience.