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Process and circuit for protection of test contacts in high current measurement of semiconductor components

  • US 7,295,021 B2
  • Filed: 03/15/2005
  • Issued: 11/13/2007
  • Est. Priority Date: 03/15/2004
  • Status: Active Grant
First Claim
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1. A process for limiting a test current in heavy current testing of semiconductor components with test needles, comprising the steps of:

  • connecting upstream of each needle a circuit that is connected to a voltage supply, the circuit having at least one circuit component which has low resistance in the range of allowable test currents and has high resistance above a given limit current in order to limit the test current; and

    supplying a control voltage or current to the at least one circuit component, wherein the supply of the control voltage or current is carried out galvanically separated from the voltage supply of the circuit.

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