Process for making high temperature superconductor devices each having a line oriented in a spiral fashion
First Claim
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1. A process for producing high temperature superconductor mini-filters, spiral resonators or self-resonant coils on batches of single crystal substrates, each high temperature superconductor device comprised of a high temperature superconductor line oriented in a spiral fashion, the process comprising, for each batch:
- (a) depositing an epitaxial layer of CeO2 on a single crystal substrate by off-axis sputter deposition, the substrate temperature being maintained at a temperature in the range of about 700-800°
C. during the deposition, the substrate for any one batch being selected from the group consisting of LaAlO3, MgO and Al2O3;
(b) forming an epitaxial high temperature superconducting film on the layer of CeO2;
(c) coating the high temperature superconducting film with a photoresist;
(d) exposing the photoresist to ultraviolet light through a photomask containing a pattern for one or more devices wherein each device contains a spiral line;
(e) developing the photoresist to produce the pattern;
(f) using an argon beam, etching away the high temperature superconductor exposed when the photoresist was developed; and
(g) using an oxygen plasma, removing the remaining photoresist to expose the one or more high temperature superconductor devices,the presence of the epitaxial layer of CeO2 between the single crystal substrate and the high temperature superconducting film providing a buffer layer between the film and the substrate in each batch,whereby a high percentage of the mini-filters, spiral resonators or self-resonant coils produced in each batch exhibit acceptable performance properties despite the presence of variations in substrates from batch to batch.
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Abstract
A process for producing high temperature superconductor (HTS) mini-filters or coils in which the high temperature superconductor films are deposited on a layer of CeO2 on a substrate results in higher yields of mini-filters or coils.
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4 Claims
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1. A process for producing high temperature superconductor mini-filters, spiral resonators or self-resonant coils on batches of single crystal substrates, each high temperature superconductor device comprised of a high temperature superconductor line oriented in a spiral fashion, the process comprising, for each batch:
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(a) depositing an epitaxial layer of CeO2 on a single crystal substrate by off-axis sputter deposition, the substrate temperature being maintained at a temperature in the range of about 700-800°
C. during the deposition, the substrate for any one batch being selected from the group consisting of LaAlO3, MgO and Al2O3;(b) forming an epitaxial high temperature superconducting film on the layer of CeO2; (c) coating the high temperature superconducting film with a photoresist; (d) exposing the photoresist to ultraviolet light through a photomask containing a pattern for one or more devices wherein each device contains a spiral line; (e) developing the photoresist to produce the pattern; (f) using an argon beam, etching away the high temperature superconductor exposed when the photoresist was developed; and (g) using an oxygen plasma, removing the remaining photoresist to expose the one or more high temperature superconductor devices, the presence of the epitaxial layer of CeO2 between the single crystal substrate and the high temperature superconducting film providing a buffer layer between the film and the substrate in each batch, whereby a high percentage of the mini-filters, spiral resonators or self-resonant coils produced in each batch exhibit acceptable performance properties despite the presence of variations in substrates from batch to batch. - View Dependent Claims (2, 3, 4)
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Specification