Polymer based distributive waveguide sensor for pressure and shear measurement

• US 7,295,724 B2
• Filed: 02/28/2005
• Issued: 11/13/2007
• Est. Priority Date: 03/01/2004
• Status: Expired due to Fees

• Current Assignee: Washington University In St Louis
• Original Assignee: University of Washington
• Inventors: Wang, Wei-Chih, Reinhall, Per G.
• Primary Examiner(s): Kim; Ellen E.
• Application Number:
  US11/068,938
• Publication Number:
  US 20050232532A1
• Time in Patent Office: 988 Days
• Field of Search: 385/13, 385/37
• US Class Current: 385/13
• CPC Class Codes: A61B 2562/0266 Optical strain gauges
• CPC Class Codes: A61B 5/1036 Measuring load distribution, e.g. podologic studies
• CPC Class Codes: A61B 5/6892 Mats
• CPC Class Codes: G01D 5/35303 using a reference fibre, e.g. interferometric devices
• CPC Class Codes: G01D 5/35316 using a Bragg gratings
• CPC Class Codes: G01D 5/35354 Sensor working in reflection
• CPC Class Codes: G01L 1/246 using integrated gratings, e.g. Bragg gratings
• CPC Class Codes: G02B 2006/12107 Grating
• CPC Class Codes: G02B 2006/12176 Etching
• CPC Class Codes: G02B 6/12007 forming wavelength selective elements, e.g. multiplexer, demultiplexer
• CPC Class Codes: G02B 6/132 by deposition of thin films

Abstract

According to embodiments of the present invention, a distributed pressure and shear stress sensor includes a flexible substrate, such as PDMS, with a waveguide formed thereon. Along the waveguide path are several Bragg gratings. Each Bragg grating has a characteristic Bragg wavelength that shifts in response to an applied load due to elongation/compression of the grating. The wavelength shifts are monitored using a single input and a single output for the waveguide to determine the amount of applied pressure on the gratings. To measure shear stress, two flexible substrates with the waveguide and Bragg gratings are placed on top of each other such that the waveguides and gratings are perpendicular to each other. To fabricate the distributive pressure and shear sensor, a unique micro-molding technique is used wherein gratings are stamped into PDMS, for example.

Claims

1. An apparatus, comprising:

a shear stress sensor having;

a first sensor having;

a first flexible substrate; and

a first detector array disposed in or on the first flexible substrate along a first series path, wherein the first series path includes a first input and a first output;

a second sensor having;

a second flexible substrate; and

a second detector array disposed in or on the second flexible substrate along a second series path, wherein the second series path includes a second input and a second output,

wherein the first sensor is disposed on the second sensor, and

wherein the first series path is disposed perpendicular to the second series path.

2. The apparatus of claim 1, wherein the first detector array comprises piezoelectric sensors.

3. The apparatus of claim 1, wherein the first detector array comprises capacitive sensors.

4. The apparatus of claim 1, wherein the first detector array comprises Bragg gratings.

5. The apparatus of claim 4, wherein the first and second series paths comprise first and second waveguides, respectively.

6. A method, comprising:

forming a first waveguide on a first flexible optical medium;

forming a first Bragg grating array in the first waveguide;

forming a second waveguide on a second flexible optical medium;

forming a second Bragg grating array in the second waveguide;

disposing the first flexible optical medium on the second optical medium;

constructing two molds of an interference pattern on two silicon substrates;

spinning a first photoresist on the silicon substrates;

writing a Bragg grating pattern on the first photoresist on the two silicon substrates;

developing the first photoresist;

transferring the Bragg grating pattern from the molds to two pieces of flexible optical material, and the Bragg grating pattern having perturbations with spaces therebetween, the two pieces of flexible optical material having a first index of refraction;

spin-coating a second optical material onto the two pieces of flexible optical material to substantially fill the grating spaces, the second optical material having a second index of refraction different from the first index of refraction;

etching away a portion of the second optical material; and

patterning the first and waveguides in the second optical material.

7. The method of claim 6, further comprising:

forming a top support layer and bottom support layer for each of the two pieces of flexible optical material; and

laminating together the top support layer and bottom support layer for each of the two pieces of flexible optical material and the two pieces of flexible optical material.