Method for multi-step temperature control of a substrate
First Claim
1. A method for controlling the temperature of a substrate in a substrate processing system, the substrate processing system including a substrate holder having a substrate support with a plurality of temperature sensors reporting at least a temperature at an inner region and an outer region of said substrate and first and second heating elements heating respectively said inner and outer regions, said substrate holder including a base support having a cooling element for cooling said inner and outer regions, said substrate holder further including a thermal insulator disposed between said substrate support and said base support, said first and second heating elements and said cooling element being controlled by a temperature control system to maintain said substrate holder at a selectable set-point temperature, the method comprising:
- selecting a first base temperature for said base support;
selecting a second base temperature for said base support;
selecting a first inner set-point temperature and a first outer set-point temperature;
selecting a second inner set-point temperature and a second outer set-point temperature;
setting said base support to said first base temperature using said cooling element;
placing said substrate on said substrate holder;
heating said inner region of said substrate to said first inner set-point temperature and said outer region of said substrate to said first outer set-point temperature;
processing said substrate for a first period of time at said first inner and outer set-point temperatures;
changing the base temperature for said base support from said first base temperature to said second base temperature different from the first inner set-point temperature and the first outer set-point temperature;
changing the temperature of said inner and outer regions of said substrate to said second inner and outer set-point temperatures; and
processing said substrate for a second period of time at said second inner and outer set-point temperatures.
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Abstract
A method of changing the temperature of a substrate during processing of the substrate includes providing the substrate on a substrate holder, the substrate holder including a temperature controlled substrate support for supporting the substrate, a temperature controlled base support for supporting the substrate support and a thermal insulator interposed between the temperature controlled substrate support and the temperature controlled base support. The method further includes setting the temperature of the base support to a first base temperature corresponding to a first processing temperature of the substrate, setting the substrate support to a first support temperature corresponding to the first processing temperature of the substrate, setting the temperature of the base support to a second base temperature corresponding to a second processing temperature of the substrate, and setting the substrate support to a second support temperature corresponding to the second processing temperature of the substrate.
109 Citations
20 Claims
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1. A method for controlling the temperature of a substrate in a substrate processing system, the substrate processing system including a substrate holder having a substrate support with a plurality of temperature sensors reporting at least a temperature at an inner region and an outer region of said substrate and first and second heating elements heating respectively said inner and outer regions, said substrate holder including a base support having a cooling element for cooling said inner and outer regions, said substrate holder further including a thermal insulator disposed between said substrate support and said base support, said first and second heating elements and said cooling element being controlled by a temperature control system to maintain said substrate holder at a selectable set-point temperature, the method comprising:
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selecting a first base temperature for said base support; selecting a second base temperature for said base support; selecting a first inner set-point temperature and a first outer set-point temperature; selecting a second inner set-point temperature and a second outer set-point temperature; setting said base support to said first base temperature using said cooling element; placing said substrate on said substrate holder; heating said inner region of said substrate to said first inner set-point temperature and said outer region of said substrate to said first outer set-point temperature; processing said substrate for a first period of time at said first inner and outer set-point temperatures; changing the base temperature for said base support from said first base temperature to said second base temperature different from the first inner set-point temperature and the first outer set-point temperature; changing the temperature of said inner and outer regions of said substrate to said second inner and outer set-point temperatures; and processing said substrate for a second period of time at said second inner and outer set-point temperatures. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12, 13, 14, 15, 16, 17)
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18. A method for controlling the temperature of a substrate in a substrate processing system, the substrate processing system including a substrate holder having a substrate support with a plurality of temperature sensors reporting at least a temperature at an inner region and an outer region of said substrate and first and second heating elements heating respectively said inner and outer regions, said substrate holder including a base support having a cooling element for cooling said inner and outer regions, said substrate holder further including a thermal insulator disposed between said substrate support and said base support, said first and second heating elements and said cooling element being controlled by a temperature control system to maintain said substrate holder at a selectable set-point temperature, the method comprising:
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selecting a first base temperature for said base support; selecting a second base temperature for said base support; selecting a first inner set-point temperature and a first outer set-point temperature; selecting a second inner set-point temperature and a second outer set-point temperature; setting said base support to said first base temperature using said cooling element; placing said substrate on said substrate holder; heating said inner region of said substrate to said first inner set-point temperature and said outer region of said substrate to said first outer set-point temperature; changing the base temperature for said base support from said first base temperature to said second base temperature different from the first inner set-point temperature and the first outer set-point temperature; and ramping the temperature of said inner and outer regions of said substrate to said second inner and outer set-point temperatures while processing said substrate for a period of time.
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19. A method of changing the temperature of a substrate during processing of the substrate, comprising:
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providing the substrate on a substrate holder, the substrate holder comprising a temperature controlled substrate support for supporting the substrate, a temperature controlled base support for supporting the substrate support and a thermal insulator interposed between the temperature controlled substrate support and the temperature controlled base support; setting the temperature of the base support to a first base temperature corresponding to a first processing temperature of said substrate; setting the substrate support to a first support temperature corresponding to said first processing temperature of said substrate; setting the temperature of the base support to a second base temperature corresponding to a second processing temperature of said substrate; and setting the substrate support to a second support temperature corresponding to said second processing temperature of said substrate wherein the first processing temperature and the second processing temperature are different. - View Dependent Claims (20)
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Specification