Electromechanical memory array using nanotube ribbons and method for making same

• US 7,298,016 B2
• Filed: 05/25/2004
• Issued: 11/20/2007
• Est. Priority Date: 07/25/2001
• Status: Expired due to Fees

• Current Assignee: Nantero Incorporated
• Original Assignee: Nantero Incorporated
• Inventors: Brock, Darren K., Segal, Brent M., Rueckes, Thomas
• Primary Examiner(s): COLEMAN, WILLIAM D
• Application Number:
  US10/852,880
• Publication Number:
  US 20040214367A1
• Time in Patent Office: 1,274 Days
• Field of Search: 257/415, 977/700, 977/724, 977/742, 977/767
• US Class Current: 257/415
• CPC Class Codes: B82Y 10/00 Nanotechnology for information processing, storage or transmission, e.g. quantum computing or single electron logic
• CPC Class Codes: G11C 13/025 using fullerenes, e.g. C60, or nanotubes, e.g. carbon or silicon nanotubes
• CPC Class Codes: G11C 2213/16 Memory cell being a nanotube, e.g. suspended nanotube
• CPC Class Codes: G11C 2213/81 Array wherein the array conductors, e.g. word lines, bit lines, are made of nanowires
• CPC Class Codes: G11C 23/00 Digital stores characterised by movement of mechanical parts to effect storage, e.g. using balls; Storage elements therefor
• CPC Class Codes: H01H 1/0094 Switches making use of nanoelectromechanical systems [NEMS]
• CPC Class Codes: H01L 21/76838 characterised by the formation and the after-treatment of the conductors etching for patterning the conductors H01L21/3213
• CPC Class Codes: H01L 27/10 including a plurality of individual components in a repetitive configuration
• CPC Class Codes: Y10S 977/724 Devices having flexible or movable element
• CPC Class Codes: Y10S 977/742 Carbon nanotubes, CNTs
• CPC Class Codes: Y10S 977/796 for electrical or electronic purpose
• CPC Class Codes: Y10S 977/856 including etching/cutting
• CPC Class Codes: Y10S 977/888 Shaping or removal of materials, e.g. etching
• CPC Class Codes: Y10S 977/943 Information storage or retrieval using nanostructure
• CPC Class Codes: Y10T 428/24893 including particulate material
• CPC Class Codes: Y10T 428/24917 including metal layer

Abstract

Electromechanical circuits, such as memory cells, and methods for making same are disclosed. The circuits include a structure having electrically conductive traces and supports extending from a surface of the substrate, and nanotube ribbons suspended by the supports that cross the electrically conductive traces, wherein each ribbon comprises one or more nanotubes. The electro-mechanical circuit elements are made by providing a structure having electrically conductive traces and supports, in which the supports extend from a surface of the substrate. A layer of nanotubes is provided over the supports, and portions of the layer of nanotubes are selectively removed to form ribbons of nanotubes that cross the electrically conductive traces. Each ribbon includes one or more nanotubes.

Claims

1. A circuit comprising:

a structure having a conductive trace; and

lithographically patterned element of pre-defined shape formed from a nanotube layer disposed in spaced separation from the conductive trace.

2. The circuit of claim 1 wherein the lithographically-defined element has a plurality of nanotubes.

3. The circuit of claim 1 wherein the lithographically-defined element is electromechanically-deflectable in response to electrostatic forces.

4. A circuit comprising:

a structure having a conductive trace; and

a substantially planar entanglement of conductive nanotubes disposed in spaced relation to the conductive trace.

5. A system comprising:

a structure having an electrically conductive trace; and

a nanotube ribbon having a plurality of nanotubes in electrical contact, the ribbon having a pre-defined patterned shape and being disposed in spaced and crossed relation to the electrically conductive trace.