Method of detecting RF powder delivered to a load and complex impedance of the load
First Claim
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1. A method of detecting one or more characteristics of a load, the method comprising:
- detecting one or more characteristics of a first signal at the output of a Radio Frequency (RF) power generator, wherein the first signal exhibits a fundamental frequency;
sampling the one or more characteristics of the first signal at a sampling frequency to produce a digital sampled signal, wherein the sampling frequency is determined based on a function of the fundamental frequency of the first signal, wherein the sampling frequency is less than the fundamental frequency of the first signal; and
determining one or more characteristics of a load from the digital sampled signal, wherein the load is in communication with the RF power generator.
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Abstract
Methods and systems of detecting one or more characteristics of a load are disclosed. One or more characteristics of a first signal may be detected at the output of a Radio Frequency (RF) power generator. The first signal may have a fundamental frequency. The one or more characteristics of the first signal may be sampled at a sampling frequency to produce a digital sampled signal. The sampling frequency may be determined based on a function of the fundamental frequency of the first signal. One or more characteristics of a load in communication with the RF power generator may then be determined from the digital sampled signal.
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16 Claims
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1. A method of detecting one or more characteristics of a load, the method comprising:
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detecting one or more characteristics of a first signal at the output of a Radio Frequency (RF) power generator, wherein the first signal exhibits a fundamental frequency; sampling the one or more characteristics of the first signal at a sampling frequency to produce a digital sampled signal, wherein the sampling frequency is determined based on a function of the fundamental frequency of the first signal, wherein the sampling frequency is less than the fundamental frequency of the first signal; and determining one or more characteristics of a load from the digital sampled signal, wherein the load is in communication with the RF power generator. - View Dependent Claims (2, 3, 4, 5, 6)
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7. A system for determining one or more characteristics of a load, the system comprising:
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a Radio Frequency (RF) power generator; a load in communication with the RF power generator; a detecting device located at the output of the RF power generator; an analog-to-digital (A-D) converter in communication with the detecting device; and a digital signal processor (DSP) in communication with the A-D converter, wherein the detecting device detects one or more characteristics of a first signal, wherein the A-D converter converts the one or more characteristics of the first signal into a digital form, wherein the A-D converter comprises a sampling device having a sampling frequency that is less than a fundamental frequency of the first signal, wherein the DSP determines one or more characteristics of the load from the digital form of the one or more characteristics of the first signal. - View Dependent Claims (8, 9, 10, 11, 12, 13, 14, 15, 16)
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Specification