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Method and system for controlling a product parameter of a circuit element

  • US 7,299,105 B2
  • Filed: 01/06/2005
  • Issued: 11/20/2007
  • Est. Priority Date: 02/27/2004
  • Status: Expired due to Fees
First Claim
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1. A method of controlling a product performance parameter of a circuit element, the method comprising:

  • performing a first controlled manufacturing process on the basis of first process measurement data to form a first pre-form of said circuit element;

    performing a second controlled manufacturing process on the basis of second process measurement data to form a second pre-form of said circuit element; and

    controlling said second controlled manufacturing process on the basis of said first process measurement data and a correlation of said first and second measurement data with said product parameter, wherein said correlation represents a sensitivity of said first and second measurement data with respect to a variation of said product performance parameter.

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